• 한국기계가공학회지
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• 제20권9호
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• pp.84-89
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• 2021

Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.

• 접착 및 계면
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• 제20권3호
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• pp.102-109
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• 2019

PET기재 필름 위에 코팅된 다층박막 필름의 층별성분을 ATR FT-IR과 Pyro GC/MS(Gas Chromatography/Mass Spectroscopy)를 이용하여 분석을 시도하였다. 필름의 단면은 액체질소에 담근 후 파괴시켜 얻었으며 광학 현미경을 이용하여 관찰하였다. 이 결과 코팅층의 총 두께는 $70{\mu}m$였으며 3개의 층으로 관찰되었다. 각 층의 두께는 너무 얇기 때문에 표면층을 제외하고는 직접분석이 어려워 적절한 용매로서 각 층을 드러나게 한 후 ATR FT-IR과 pyro-GC/MS를 이용하여 분석을 시도하였다. 이 결과 3개 층은 공통적으로 우레탄-아크릴레이트 공중합체로 밝혀졌다. 또한 무기 혹은 금속성분의 첨가여부는 XPS와 SEM-EDAX를 이용하여 분석하였으며 도장층 (1)에는 나노크기의 실리카 입자가 도장층 (2)에서는 알루미늄 박편이 존재함을 알게 되었다.

• 한국진공학회지
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• 제10권4호
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• pp.396-402
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• 2001

전자빔 증착기를 이용하여 1000 $\AA$의 두께를 가진 MgO박막을 구리 기판위에 상온에서 증착하였다. 스퍼터링수율 측정시 MgO 층에 충전현상을 없애주기 위해서 1000 $\AA$ 두께의 Al을 증착하였다. 갈륨 액체금속을 집속이온빔 이온원으로 사용하였다. 두 개의 정전렌즈를 사용하여 이온빔을 집속하였고, MgO에 이온빔을 주사하기 위해 편향기를 사용하였다. 가속전압의 변화에 따라 시료대 전류와 이차입자 전류를 측정하였고, 이 전류값은 소스에 인가하는 가속전압에 따라 변화되었다 MgO 박막의 스퍼터링 수율은 분석된 시료대 전류, 이차입자 전류 및 순수빔 전류의 값을 사용하여 결정하였다. 집속이온빔 장치의 가속전압이 15 kV일 때 MgO 박막의 스퍼터링 수율은 0.30으로 나왔고 가속전압의 값이 증가할 때 스퍼터링 수율이 선형적으로 증가하였다. 이러한 결과를 볼 때 집속이온빔 장치를 이용하면 MgO 박막의 스퍼터링 수율을 측정할 패 매우 효과적임을 알 수 있다.

• 센서학회지
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• 제30권4호
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• pp.255-260
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• 2021

We studied electrochemical sensors using printed carbon nanotube (CNT) film on a polyethylene terephthalate (PET) substrate. Multiwalled CNT films were printed on a PET substrate to study its feasibility as hazardous and noxious substances (HNS) detection sensor. The printed CNT film (PCF) with a 50 ㎛ thickness exhibited a specific resistance of 230 ohm. To determine the optimum sensor structure, a resistance-type PCF sensor (R-type PCF sensor) and a conductive-type PCF sensor (C-type PCF sensor) were fabricated and compared using diluted NH₃ droplets with various concentrations. The response magnitude, response time, sensitivity, linearity, and limit of detection (LOD) were compared, and it was concluded that the C-type PCF sensor exhibited superior performance. By applying a C-Type PCF sensor, we confirmed the detection performance of 12 types of floating HNS and the response of the sensor with selectivity according to the degree of polarity.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.202-206
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• 2009

고속회전 연료분사시스템의 분무특성을 연구하였다. 분무특성에 영향을 주는 직렬식 분무오리피스의 직경을 각각 1mm, 2mm, 3mm, 4mm, 5mm와 분무오리피스 수를 3개, 6개, 12개로 변화시켜가며 분무특성 연구를 수행하였다. PDPA 측정 시스템을 이용하여 분무입자의 크기와 속도, 분무분포 등을 측정하였고, 고속카메라를 이용하여 분무가시화를 수행하였다. 실험결과, 분무오리피스로부터 분출된 단일 액주의 길이는 회전속도에 의해 제어되며, 분무입자의 크기(SMD)는 분무오리피스의 직경과 수가 증가함에 따라 작아지는 경향을 보였다. 결국 분무입자의 크기를 제어하는 기본 메커니즘은 분무 오리피스내의 액막의 두께에 의해 결정됨을 알 수 있었다.

• 한국가시화정보학회지
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• 제14권2호
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• pp.18-24
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• 2016

This paper presents an experimental investigation to visualize cross-sectional two-phase flow structure and identify liquid-gas interface for condensation of steam at a low mass flux in a slightly inclined tube using the axial-viewing technique, which permits to look directly into flow during condensation of steam. In this technique, two-phase flow is viewed along the axis of a pipe by locating a high-speed video camera in front of a viewer that is fitted at the outlet of the pipe. A short section of the pipe is illuminated and is recorded through the viewer, which is kept free of liquid by mildly introducing air. Experiments were conducted in a pipe of 19.05 mm in inner diameter at atmospheric pressure. Cross-sectional two-phase flow structure is obtained at a steam mass flux of $2.62kg/m^2s$ as a function of steam quality in the range from 0.5 to 0.9. The results show that stratified-wavy flow is a unique flow pattern observed in the scope of the present study. Condensate film thickness, stratification angle and void fraction were measured from the obtained flow structure images. Finally, heat transfer coefficient was calculated using the measurement data and discussed in comparison with existing correlations.

• 대한기계학회논문집B
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• 제25권2호
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• pp.164-170
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• 2001

The influence of unsteady wake on the flow and heat transfer characteristics in a four-vane linear cascade was experimentally investigated. The unsteady wake was generated with four rotating rectangular plates located upstream of the cascade. Tested inlet Reynolds number based on chord length was set to 66,000 by controlling free-stream velocity. A hot-wire anemometer system was employed to measure turbulent velocity components. For the convective heat transfer coefficients measurement on turbine blade surface, thermochromic liquid crystal and gold film Intrex were used. It was found that the unsteady wake enhances the turbulent motion in the cascade passage and accordingly promotes the development and transition of boundary layer. It was found that the heat transfer coefficients on the blade surface increase as the plate rotating speed increases. However, the increasing of heat transfer coefficients is not significant in the case that Strouhal number is higher than 0.503.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.287-287
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• 2010

We report a new direct patterning method, called liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas. LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. This procedure can be adopted for automated direct printing machines that generate patterns of functional materials with a wide range of feature sizes on diverse substrates. Arrays of TIPS-PEN TFTs were fabricated on 4" polyethersulfone (PES) substrates by LB-nTM using PDMS molds. An inverted staggered structure was employed in the TFT device fabrication. A 150 nm-thick indium-tin oxide (ITO) gate electrode and a 200 nm-thick SiO2dielectric layer were formed on a PES substrate by sputter deposition. An array of TIPS-PEN patterns (thickness: 60 nm) as active channel layers was fabricated on the substrate by LB-nTM. The nominal channel length of the TIPS-PEN TFT was 10 mm, while the channel width was 135 mm. Finally, the source and drain electrodes of 200 nm-thick Ag were defined on the substrate by LB-nTM. The TIPS-PEN TFTs can endure strenuous bending and are also transparent in the visible range, and therefore potentially useful for flexible and invisible electronics.

• 대한기계학회논문집B
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• 제23권7호
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• pp.864-870
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• 1999

An experimental study Is conducted in a four-vane linear cascade in order to examine the influence of the wake behind rectangular bars on the flow and heat transfer characteristics. Flow and heat transfer measurements are made for the inlet Reynolds number of 66000(based on chord length and free-stream velocity). Turbulent intensity and stress are measured using a hot-wire anemometer, and to measure the convective heat transfer coefficients on the blade surface liquid crystal/gold film Intrex technique is used. Each of experimental cases is characterized by the unsteadiness measured at the entrance of the cascade. The wake behind the rectangular bars enhances the turbulent motion of the flow in the cascade passage. It also promotes the boundary layer development and transition. The results show that heat transfer coefficients on the blade surface increase with increasing unsteadiness.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.374-374
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• 2012

Nowadays, Active Matrix Organic Light-Emitting Diodes (AM-OLEDs) are the superior display device due to their vivid full color, perfect video capability, light weight, low driving power, and potential flexibility. One of the advantages of AM-OLED over Liquid Crystal Display (LCD) lies in its flexibility. The potential flexibility of AM-OLED is not fully explored due to its sensitivity to moisture and oxygen which are readily present in atmosphere, and there are no flexible encapsulation layers available to protect these. Therefore, we come up with a new concept of Inorganic-Organic hybrid thin film as the encapsulation layer. Our Inorganic layer is Al2O3 and Organic layer is F-Alucone. We deposited these layers in vacuum state using Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) techniques. We found the results are comparable to commercial requirement of 10-6 g/m2 day for Water Vapor Transmission Rate (WVTR). Using ALD and MLD, we can control the exact thin film thickness and fabricate more dense films than chemical or physical vapor deposition methods. Moreover, this hybrid encapsulation layer potentially has both the flexibility of organic layers and superior protection properties of inorganic layer.