• Title/Summary/Keyword: liquid film thickness

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Measurement of Step Difference using Digital Holography of ITO Thin Film Fabricated by Sputtering Method (스퍼터링 공법으로 제작한 ITO 박막의 디지털 홀로그래피를 이용한 단차에 대한 측정)

  • Jung, Hyun Il;Shin, Ju Yeop;Park, Jong Hyun;Jung, Hyunchul;Kim, Kyeong-suk
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.9
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    • pp.84-89
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    • 2021
  • Indium tin oxide (ITO) transparent electrodes, which are used to manufacture organic light-emitting diodes, are used in light-emitting surface electrodes of display EL panels such as cell phones and TVs, liquid crystal panels, transparent switches, and plane heating elements. ITO is a major component that consists of indium and tin and is advantageous in terms of obtaining sheet resistance and light transmittance in a thin film. However, the optical performance of devices decreases with an increase in its thickness. A digital holography system was constructed and measured for the step measurement of the ITO thin film, and the reliability of the technique was verified by comparing the FE-SEM measurement results. The error rate of the step difference measurement was within ±5%. This result demonstrated that this technique is useful for applications in advanced MEMS and NEMS industrial fields.

Analysis of Multi-layered Thin Film Using ATR FT-IR and pyro-GC/MS (ATR FT-IR과 pyro-GC/MS를 이용한 다층박막필름의 분석)

  • Park, Sung Il;Lee, Jung-Hyun;Lee, Myung Cheon
    • Journal of Adhesion and Interface
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    • v.20 no.3
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    • pp.102-109
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    • 2019
  • The material constitution of multi-layered thin film coated on the PET base film was analyzed using ATR FT-IR and pyro GC/MS combination. The cross section of the film was acquired by cracking the film after dipping in liquid nitrogen and was observed using optical microscope. Total thickness of the coated film was $70{\mu}m$ and three layers were observed. Since each layers were too thin to analyze directly except the surface layer, analyzable area of each layers were exposed by using a proper solvent and were investigated using ATR FT-IR and pyro GC/MS. Results shows that three layers were commonly consisted of urethane-acrylate copolymers. Also, inorganic and/or metal inclusions detected by XPS and SEM-EDAX were exhibited by nano size $SiO_2$ particles in layer(1) and aluminum flakes in layer(2).

Sputtering yield of the MgO thin film grown on the Cu substrate by using the focused ion beam (집속이온빔을 이용한 구리 기판위에 성장한 MgO 박막의 스퍼터링 수율)

  • 현정우;오현주;추동철;최은하;김태환;조광섭;강승언
    • Journal of the Korean Vacuum Society
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    • v.10 no.4
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    • pp.396-402
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    • 2001
  • MgO thin films with 1000 $\AA$ thickness were deposited on Cu substrates by using an electron gun evaporator at room temperature. A 1000 $\AA$ thick Al layer was deposited on the MgO for removing the charging effect of the MgO thin film during the measurements of the sputtering yields. A Ga ion liquid metal was used as the focused ion beam(FIB) source. The ion beam was focused by using double einzel lenses, and a deflector was employed to scan the ion beams into the MgO layer. Both currents of the secondary particle and the probe ion beam were measured, and they dramatically changed with varying the applied acceleration voltage of the source. The sputtering yield of the MgO layer was determined using the values of the analyzed probe current, the secondary particle current, and the net current. When the acceleration voltage of the FIB system was 15 kV, the sputtering yield of the MgO thin film was 0.30. The sputtering yield of the MgO thin film linearly increases with the acceleration voltage. These results indicate that the FIB system is promising for the measurements of the sputtering yield of the MgO thin film.

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Liquid electrochemical sensors using carbon nanotube film (Carbon Nanotube Film을 이용한 액체 전기화학 센서)

  • Noh, Jaeha;An, Sangsu;Lee, Changhan;Lee, Sangtae;Lee, Moonjin;Seo, Dongmin;Chang, Jiho
    • Journal of Sensor Science and Technology
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    • v.30 no.4
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    • pp.255-260
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    • 2021
  • We studied electrochemical sensors using printed carbon nanotube (CNT) film on a polyethylene terephthalate (PET) substrate. Multiwalled CNT films were printed on a PET substrate to study its feasibility as hazardous and noxious substances (HNS) detection sensor. The printed CNT film (PCF) with a 50 ㎛ thickness exhibited a specific resistance of 230 ohm. To determine the optimum sensor structure, a resistance-type PCF sensor (R-type PCF sensor) and a conductive-type PCF sensor (C-type PCF sensor) were fabricated and compared using diluted NH3 droplets with various concentrations. The response magnitude, response time, sensitivity, linearity, and limit of detection (LOD) were compared, and it was concluded that the C-type PCF sensor exhibited superior performance. By applying a C-Type PCF sensor, we confirmed the detection performance of 12 types of floating HNS and the response of the sensor with selectivity according to the degree of polarity.

An Experimental Study of the High-Speed Rotating Fuel Injection System with In-line Injection Orifice (직렬식 분무오리피스를 적용한 회전 연료분사노즐의 분무특성연구)

  • Jang, Seong-Ho;Choi, Seong-Man
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2009.11a
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    • pp.202-206
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    • 2009
  • We studied the spray characteristics of the high-speed rotating fuel injection system. The diameter of in-line injection orifices are varied from 1mm to 5mm and the number of in-line injection orifices are varied from 3 to 12. Droplet size, velocity and spray distribution were measured by the PDPA(Phase Doppler Particle Analyzer) system and spray was visualized. From the test results, the liquid column generated from the injection orifice is mainly controlled by the rotational speeds. Also diameter of injection orifices and number of injection orifices have influence on the diameters of droplet. Consequently, we find out that the basic mechanism of controlling the droplet size is the liquid film thickness in the injection orifice.

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Visualization of cross-sectional two-phase flow structure during in-tube condensation (관내 응축 시 2상유동 단면구조의 가시화)

  • Pusey, Andree;Kim, Hyungdae
    • Journal of the Korean Society of Visualization
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    • v.14 no.2
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    • pp.18-24
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    • 2016
  • This paper presents an experimental investigation to visualize cross-sectional two-phase flow structure and identify liquid-gas interface for condensation of steam at a low mass flux in a slightly inclined tube using the axial-viewing technique, which permits to look directly into flow during condensation of steam. In this technique, two-phase flow is viewed along the axis of a pipe by locating a high-speed video camera in front of a viewer that is fitted at the outlet of the pipe. A short section of the pipe is illuminated and is recorded through the viewer, which is kept free of liquid by mildly introducing air. Experiments were conducted in a pipe of 19.05 mm in inner diameter at atmospheric pressure. Cross-sectional two-phase flow structure is obtained at a steam mass flux of $2.62kg/m^2s$ as a function of steam quality in the range from 0.5 to 0.9. The results show that stratified-wavy flow is a unique flow pattern observed in the scope of the present study. Condensate film thickness, stratification angle and void fraction were measured from the obtained flow structure images. Finally, heat transfer coefficient was calculated using the measurement data and discussed in comparison with existing correlations.

Influence of the Unsteady Wake on the Flow and Heat Transfer in a Linear Turbine Cascade (비정상 후류가 선형터빈익렬의 유동 및 열전달에 미치는 영향에 관한 연구)

  • Yun, Sun-Hyeon;Sim, Jae-Gyeong;Kim, Dong-Geon
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.2
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    • pp.164-170
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    • 2001
  • The influence of unsteady wake on the flow and heat transfer characteristics in a four-vane linear cascade was experimentally investigated. The unsteady wake was generated with four rotating rectangular plates located upstream of the cascade. Tested inlet Reynolds number based on chord length was set to 66,000 by controlling free-stream velocity. A hot-wire anemometer system was employed to measure turbulent velocity components. For the convective heat transfer coefficients measurement on turbine blade surface, thermochromic liquid crystal and gold film Intrex were used. It was found that the unsteady wake enhances the turbulent motion in the cascade passage and accordingly promotes the development and transition of boundary layer. It was found that the heat transfer coefficients on the blade surface increase as the plate rotating speed increases. However, the increasing of heat transfer coefficients is not significant in the case that Strouhal number is higher than 0.503.

Organic Thin-Film Transistors Fabricated on Flexible Substrate by Using Nanotransfer Molding

  • Hwang, Jae-Kwon;Dang, Jeong-Mi;Sung, Myung-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.287-287
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    • 2010
  • We report a new direct patterning method, called liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas. LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. This procedure can be adopted for automated direct printing machines that generate patterns of functional materials with a wide range of feature sizes on diverse substrates. Arrays of TIPS-PEN TFTs were fabricated on 4" polyethersulfone (PES) substrates by LB-nTM using PDMS molds. An inverted staggered structure was employed in the TFT device fabrication. A 150 nm-thick indium-tin oxide (ITO) gate electrode and a 200 nm-thick SiO2dielectric layer were formed on a PES substrate by sputter deposition. An array of TIPS-PEN patterns (thickness: 60 nm) as active channel layers was fabricated on the substrate by LB-nTM. The nominal channel length of the TIPS-PEN TFT was 10 mm, while the channel width was 135 mm. Finally, the source and drain electrodes of 200 nm-thick Ag were defined on the substrate by LB-nTM. The TIPS-PEN TFTs can endure strenuous bending and are also transparent in the visible range, and therefore potentially useful for flexible and invisible electronics.

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Influence of the Wake Behind Rectangular Bars on the Flow and Heat Transfer in the Linear Turbine Cascade (사각주 후류가 선형터빈익렬의 유동 및 열전달에 미치는 영향에 관한 연구)

  • Yoon, Soon Hyun;Sim, Jae Kyung;Woo, Chang Soo;Lee, Dae Hee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.7
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    • pp.864-870
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    • 1999
  • An experimental study Is conducted in a four-vane linear cascade in order to examine the influence of the wake behind rectangular bars on the flow and heat transfer characteristics. Flow and heat transfer measurements are made for the inlet Reynolds number of 66000(based on chord length and free-stream velocity). Turbulent intensity and stress are measured using a hot-wire anemometer, and to measure the convective heat transfer coefficients on the blade surface liquid crystal/gold film Intrex technique is used. Each of experimental cases is characterized by the unsteadiness measured at the entrance of the cascade. The wake behind the rectangular bars enhances the turbulent motion of the flow in the cascade passage. It also promotes the boundary layer development and transition. The results show that heat transfer coefficients on the blade surface increase with increasing unsteadiness.

The Organic-Inorganic Hybrid Encapsulation Layer of Aluminium Oxide and F-Alucone for Organic Light Emitting Diodes

  • Gwon, Deok-Hyeon;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.374-374
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    • 2012
  • Nowadays, Active Matrix Organic Light-Emitting Diodes (AM-OLEDs) are the superior display device due to their vivid full color, perfect video capability, light weight, low driving power, and potential flexibility. One of the advantages of AM-OLED over Liquid Crystal Display (LCD) lies in its flexibility. The potential flexibility of AM-OLED is not fully explored due to its sensitivity to moisture and oxygen which are readily present in atmosphere, and there are no flexible encapsulation layers available to protect these. Therefore, we come up with a new concept of Inorganic-Organic hybrid thin film as the encapsulation layer. Our Inorganic layer is Al2O3 and Organic layer is F-Alucone. We deposited these layers in vacuum state using Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) techniques. We found the results are comparable to commercial requirement of 10-6 g/m2 day for Water Vapor Transmission Rate (WVTR). Using ALD and MLD, we can control the exact thin film thickness and fabricate more dense films than chemical or physical vapor deposition methods. Moreover, this hybrid encapsulation layer potentially has both the flexibility of organic layers and superior protection properties of inorganic layer.

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