• Title/Summary/Keyword: linear motion error

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Measurement and Active Compensation for 3-DOF Motion Errors of an Air Bearing Stage with Magnetic Preloads (자기예압 공기베어링 스테이지의 3 자유도 운동오차 측정 및 능동 보정)

  • Ro, Seung-Kook;Kim, Soo-Hyun;Kwak, Yoon-Keun;Park, Chun-Hong
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.2
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    • pp.109-117
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    • 2009
  • This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

리니어모터 스테이지 진직도 보상 제어

  • Gang, Min-Sik;Choe, Jeong-Deok
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2007.06a
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    • pp.11-14
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    • 2007
  • An additive servo-system is developed to improve straightness of linear motor stages. For linear motor stages used in the field of high-precision linear motion process, high straightness accuracy is necessary as well as positioning accuracy in the longitudinal axis. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to modeling error and friction disturbance, a sliding mode control is addressed. The effectiveness of the suggested mechanism and the control are illustrated along with some experimental results.

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Vibration Control of Flexible SCARA Robots (유연한 수평 다관절 로봇의 진동제어)

  • 임승철;용대중
    • Journal of KSNVE
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    • v.7 no.3
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    • pp.387-392
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    • 1997
  • This paper concerns a SCARA robot with the flexible forearm linked to the rigid upper arm. The equations of motion are derived by the Lagrangian mechanics. For controller design, the perturbation approach is taken to separate the original equations of motion into linear equations describing small perturbed motions and nonlinear equations describing purely rigid motion of the robot. To effect the desired payload motion, open loop control inputs are determined based on the inverse dynamics of the latter. In order to reduce the positional error during maneuver, an active vibration suppression is done. To this end, a feedback control is designed for robustness against disturbance on the basis of the linear equations and the LQR theory modified to have a prescribed degree of stability. The proposed control scheme shows satisfactory performances in experiments as well as in numerical simulations.

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Vibration control of a flexible SCARA type robot (유연한 수평 다관절형 로봇의 진동제어)

  • 용대중;임승철
    • 제어로봇시스템학회:학술대회논문집
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    • 1996.10b
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    • pp.225-228
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    • 1996
  • This paper concerns a SCARA type robot with the second arm flexible. Its equations of motion are derived by the Lagrangian mechanics. For controller design, the perturbation approach is taken to separate the original equations of motion into linear equations describing small perturbed motions and nonlinear equations describing purely rigid motion of the robot. To effect the desired payload motion, open loop control inputs are first determined based on the inverse dynamics of the latter. Next, in order to reduce the positional error during maneuver, an active vibration suppression is done. To this end, a feedback control is designed for robustness against disturbance on the basis of the linear equations and the LQR theory modified with a prescribed degree of stability. The numerical simulations results show the satisfactory control performance.

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A Study on Effect of Various Cooling Methods in Motion of High-Precision Ball Screw (고속 고정밀 볼 스크류 구동에 따른 강제 냉각방식의 효과에 관한 연구)

  • Kim, Su-Sang;Xu, Zhe-Zhu;Kim, Hyun-Koo;Lyu, Sung-Ki
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.3
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    • pp.254-259
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    • 2013
  • Ball screw system is widely used as a precision mechanical linear actuator that translates rotational motion to linear motion for its high efficiency, great stiffness and long life. Recently, according to the requirements of high accuracy and stiffness, the pre-load on the ball screw which means of remove the backlash in the ball screw is usually used. Because of the preload which means the frictional resistance between the screw and nut, becomes a dominating heat source and it generates thermal deformation of ball screw which is the reason for low accuracy of the positioning decision. There are several methods to solve the problem that includes temperature control, thermal stable design and error compensation. In the past years, researchers focused on the error compensation technique for its ability to correct ball screw error effectively rather than the capabilities of careful machine design and manufacturing. Significant amounts of researches have been done to real-time error compensation. But in this paper, we developed a series of cooling methods to get thermal equilibrium in the ball screw system. So we find the optimum cooling type for improving positioning error which caused by thermal deformation in the ball screw system.

Motion planning of a robot manipulator for conveyor tracking (컨베이어 추적을 위한 로보트 매니퓰레이터의 동작 계획)

  • 박태형;이범희;고명삼
    • 제어로봇시스템학회:학술대회논문집
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    • 1989.10a
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    • pp.154-159
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    • 1989
  • This paper presents a motion planning algorithm for conveyor tracking. We formulate the problem as the linear quadratic tracking problem in optimal control theory and solve it through dynamic programming. In the proposed algorithm, the steady-state tracking error is eliminated completely, and the joint torque, velocity, acceleration, and jerks are considered as some constraints. Numerical examples are then presented to demonstrate the utility of the proposed motion planning algorithm.

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Study on the Linear Air Bearing Stage with Actively Controllable Magnetic Preload (초정밀 스테이지를 위한 능동형 자기예압 공기베어링에 관한 연구)

  • Ro S.K.;Park C.H.;Kim S.H.;Kwak Y.K.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.135-136
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    • 2006
  • A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

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Accuracy Simulation of Precision Rotary Motion Systems (회전운동 시스템의 정밀도 시뮬레이션 기술)

  • Hwang, Joo-Ho;Shim, Jong-Youp;Hong, Seong-Wook;Lee, Deug-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.3
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    • pp.285-291
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    • 2011
  • The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.

Nonlinear hierarchical motion estimation method based on decompositionof the functional domain (범함수 정의역 분할에 바탕을 둔 비선형 계층적 움직임 추정기법)

  • 심동규;박래홍
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.21 no.4
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    • pp.807-821
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    • 1996
  • In this paper, we proposed a nonlinear hierarchical mtion estimation method. Generally, the conventional hierarchical motion estimation methods have been proposed for fast convergence and detection of large motions. But they have a common drawback that large error in motion estimation is propapated across motion discontinuities. This artifiact is due to the constriaint of motion continuity and the linear interpolation of motion vectors between hierarchical levels. In this paper, we propose an effective hierarchical motion estimation mechod that is robust to motion discontinuities. The proposed algorithm is based on the decomposition of the functional domain for optimizing the intra-level motion estimation functional. Also, we propose an inter-level nonlinear motion estimation equation rather than using the conventional linearprojection scheme of motion field. computer simulations with several test sequences show tht the proposed algorithm performs better than several conventional methods.

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Influence of the Diagonal Dominance of Modal Damping Matrix on the Decoupling Approximation (모드 댐핑 행렬의 대각선 성분 우세가 비연관화 근사에 미치는 영향)

  • 김정수;최기흥;최기상
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.8
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    • pp.1963-1970
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    • 1993
  • A simple technique to decouple the modal equations of motion of a linear nonclassically damped system is to neglect the off-diagonal elements of the modal damping matrix. This is called the decoupling approximation. It has generally been conceived that smallness of off-diagonal elements relative to the diagonal ones would validate its use. In this study, the relationship between elements of the modal damping matrix and the error arising from the decoupling approximation is explored. It is shown that the enhanced diagonal dominance of the modal damping matrix need not diminish the error. In fact, the error may even increase. Moreover, the error is found to be strongly dependent on the exitation. Therefore, within the practical range of engineering applications, diagonal dominance of the modal damping matrix would not be sufficient to supress the effect of modal coupling.