리니어모터 스테이지 진직도 보상 제어

An additive servo-system is developed to improve straightness of linear motor stages. For linear motor stages used in the field of high-precision linear motion process, high straightness accuracy is necessary as well as positioning accuracy in the longitudinal axis. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to modeling error and friction disturbance, a sliding mode control is addressed. The effectiveness of the suggested mechanism and the control are illustrated along with some experimental results.