• Title/Summary/Keyword: linear motion error

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Ripple Compensation of Air Bearing Stage upon Gantry Control of Yaw motion (요 모션 갠트리 제어 시 공기베어링 스테이지의 리플 보상)

  • Ahn, Dahoon;Lee, Hakjun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.11
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    • pp.554-560
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    • 2020
  • In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

Explicit Motion of Dynamic Systems with Position Constraints

  • Eun, Hee-Chang;Yang, Keun-Hyuk;Chung, Heon-Soo
    • Journal of Mechanical Science and Technology
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    • v.17 no.4
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    • pp.538-544
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    • 2003
  • Although many methodologies exist for determining the constrained equations of motion, most of these methods depend on numerical approaches such as the Lagrange multiplier's method expressed in differential/algebraic systems. In 1992, Udwadia and Kalaba proposed explicit equations of motion for constrained systems based on Gauss's principle and elementary linear algebra without any multipliers or complicated intermediate processes. The generalized inverse method was the first work to present explicit equations of motion for constrained systems. However, numerical integration results of the equation of motion gradually veer away from the constraint equations with time. Thus, an objective of this study is to provide a numerical integration scheme, which modifies the generalized inverse method to reduce the errors. The modified equations of motion for constrained systems include the position constraints of index 3 systems and their first derivatives with respect to time in addition to their second derivatives with respect to time. The effectiveness of the proposed method is illustrated by numerical examples.

Identification and Robust $H_\infty$ Control of the Rotational/Translational Actuator System

  • Tavakoli Mahdi;Taghirad Hamid D.;Abrishamchian Mehdi
    • International Journal of Control, Automation, and Systems
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    • v.3 no.3
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    • pp.387-396
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    • 2005
  • The Rotational/Translational Actuator (RTAC) benchmark problem considers a fourth-order dynamical system involving the nonlinear interaction of a translational oscillator and an eccentric rotational proof mass. This problem has been posed to investigate the utility of a rotational actuator for stabilizing translational motion. In order to experimentally implement any of the model-based controllers proposed in the literature, the values of model parameters are required which are generally difficult to determine rigorously. In this paper, an approach to the least-squares estimation of the parameters of a system is formulated and practically applied to the RTAC system. On the other hand, this paper shows how to model a nonlinear system as a linear uncertain system via nonparametric system identification, in order to provide the information required for linear robust $H_\infty$ control design. This method is also applied to the RTAC system, which demonstrates severe nonlinearities, due to the coupling from the rotational motion to the translational motion. Experimental results confirm that this approach can effectively condense the whole nonlinearities, uncertainties, and disturbances within the system into a favorable perturbation block.

A STATISTICS INTERPOLATION METHOD: LINEAR PREDICTION IN A STOCK PRICE PROCESS

  • Choi, U-Jin
    • Journal of the Korean Mathematical Society
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    • v.38 no.3
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    • pp.657-667
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    • 2001
  • We propose a statistical interpolation approximate solution for a nonlinear stochastic integral equation of a stock price process. The proposed method has the order O(h$^2$) of local error under the weaker conditions of $\mu$ and $\sigma$ than those of Milstein' scheme.

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IDENTIFICATION OF MODAL PARAMETERS BY SEQUENTIAL PREDICTION ERROR METHOD (순차적 예측오차 방법에 의한 구조물의 모우드 계수 추정)

  • Lee, Chang-Guen;Yun, Chung-Bang
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 1990.10a
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    • pp.79-84
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    • 1990
  • The modal parameter estimations of linear multi-degree-of-freedom structural dynamic systems are carried out in time domain. For this purpose, the equation of motion is transformed into the autoregressive and moving average model with auxiliary stochastic input (ARMAX) model. The parameters of the ARMAX model are estimated by using the sequential prediction error method. Then, the modal parameters of the system are obtained thereafter. Experimental results are given for a 3-story building model subject to ground exitations.

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Development of two axis contouring control system based on stepping motor (스텝핑 모우터를 이용한 2축 윤곽제어 장치 개발에 관한 연구)

  • 김교형;이기설
    • 제어로봇시스템학회:학술대회논문집
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    • 1987.10b
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    • pp.228-231
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    • 1987
  • Microprocessor-based software DDA interpolator is developed and applied to two axis contouring control of X-Y table. Developed assembly program is composed of feedrate, linear and circular DDA interpolation routines. Reference-pulse type of open-loop stepping motor control system in which the micro-computer produces a sequence of reference pulses for each axis of motion is adopted. To test performance of the developed program, X-Y table drive system based on stepping motor and shaft encoder is designed. Contouring error of the system in linear and circular path is within .+-.0.2 mm.

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Precise Control of Antenna Position in Arc-Rail Based GB-SAR System (원형레일 기반 지상 SAR 시스템에서의 안테나 위치 정밀 제어 기술 재발)

  • Kim, Kwang-Eun;Cho, Seong-Jun;Sung, Nak-Hoon;Lee, Jae-Hee;Kang, Moon-Kyung
    • Korean Journal of Remote Sensing
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    • v.27 no.1
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    • pp.25-31
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    • 2011
  • Precise control of antenna position is very critical in ArcSAR system which uses an arc-rail as a platform for the antenna movement instead of linear rail. In order to minimize the antenna positional error, we improved the motion driving system and applied a newly developed motion control S/W which utilizes the real time antenna position information from magnetic linear scale and encoder. The experimental results showed that the rotational RMS error was reduced to $0.0062^{\circ}$ from $0.0432^{\circ}$. In terms of antenna positional RMS error for the arm length of 3m, it was reduced to 0.324mm from 2.262mm. It is expected that the ArcSAR system can be used to monitor the sub-millimetric displacement of terrain and structural targets.

Smart Control System Using Fuzzy and Neural Network Prediction System

  • Kim, Tae Yeun;Bae, Sang Hyun
    • Journal of Integrative Natural Science
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    • v.12 no.4
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    • pp.105-115
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    • 2019
  • In this paper, a prediction system is proposed to control the brightness of smart street lamps by predicting the moving path through the reduction of consumption power and information of pedestrian's past moving direction while meeting the function of existing smart street lamps. The brightness of smart street lamps is adjusted by utilizing the walk tracking vector and soft hand-off characteristics obtained through the motion sensing sensor of smart street lamps. In addition, the motion vector is used to analyze and predict the pedestrian path, and the GPU is used for high-speed computation. Pedestrians were detected using adaptive Gaussian mixing, weighted difference imaging, and motion vectors, and motions of pedestrians were analyzed using the extracted motion vectors. The preprocessing process using linear interpolation is performed to improve the performance of the proposed prediction system. Fuzzy prediction system and neural network prediction system are designed in parallel to improve efficiency and rough set is used for error correction.

Correction of MRI Artifact due to Planar Respiratory Motion (호흡운동에 의한 MRI 아티팩트의 수정)

  • 김응규;김규헌
    • Proceedings of the IEEK Conference
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    • 2003.07e
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    • pp.1863-1866
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    • 2003
  • In this study, respiratory motion is modeled by a 2-Dimensional linear expanding-shrinking movement. According to the introduced model, respiratory motion imposes phase error, non-uniform sampling and amplitude modulation distortions on the acquired MRI data. When the motion parameters are known or can be estimated, a reconstruction algorithm based on superposition method was used to removed the MRI artifact. For the purpose of estimating unknown motion parameters, we applied the spectrum shift method to find the respiratory fluctuation function, the x directional expansion coefficient and its center, and also we used the minimum energy method to find the y directional expansion coefficient and its center. The effectiveness of this presented method is shown by Computer simulations.

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MRI Artifact Correction due to Respiratory Motion (호흡운동에 따른 MRI 아티팩트 수정)

  • 김응규;김규헌
    • Proceedings of the Korea Institute of Convergence Signal Processing
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    • 2003.06a
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    • pp.58-61
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    • 2003
  • In this study, a planar respiratory motion is modeled by a 2-D linear expanding-shrinking movement. According to the introduced model, respiratory motion imposes phase error, non-uniform sampling and amplitude modulation distortions on the acquired MRI data. When the motion parameters are known or can be estimated, a construction algorithm based on superposition method was used to remove the MRI artifact. For the purpose of estimating unknown motion parameters, we used the spectrum shift method to find the respiratory fluctuation function, the x directional expansion coefficient and its center, and we also used the minimum energy method to find the y directional expansion coefficient and its center. Finally the effectiveness of this presented method is shown by computer simulations.

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