• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.179-183
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• 2000

This paper is concerned with achieving the high motion accuracy of linear motion bearing guide according to estimate accuracy average effect of bearing. Accuracy average effect can be obtained b analysis the relationship between motion error of the table and spatial frequency of the rail form error. And influences of ball diameter, ball number, and clock length on block motion error and block number on the table motion error are analyzed theoretically. In addition to, a simple experiment is performed in order to verify theoretical result.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.326-331
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• 2004

The linear motion (LM) guide using ball bearing has many advantages compared with conventional sliding guides. Therefore, LM guide using ball bearing has been used widely to increase the accuracy of the position of a system. This research investigates dynamic characteristics of LM guide through mainly linear analysis. Linear analysis is accomplished by Lagrange equation and finite element method. And another trial that is nonlinear analysis about one mode of LM guide(bouncing mode) from Hertzian contact theory is accomplished in the latter half of this research. Through nonlinear analysis we could observe the softening characteristic due to the Hertzian contact nonlinearity.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.77-85
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• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.

• Journal of the Korean Society of Safety
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• v.24 no.4
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• pp.11-16
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• 2009

This research investigates contact angle of Linear Guide Way through a experimental result and theoretical analysis. Since last ten years, most of researchers who concerned with the precision machinery and semiconductor device production etc. so the researches about Linear Guide Way have been unnoticed. The precision machinery and semiconductor device production system has the principle which transfers the mechanical moving to accuracy position control. The Linear Guide Way system has the principle which transfers mechanical moving to accuracy position control is very important to improve performance of the precision machinery and semiconductor device production system. So, In this research, in order to improvement for producing Linear Guide Way, bearing loading analysis and contact angle change through Linear Guide Way theoretical analysis and bearing modeling. Through this study, we may expect that there will be more improvement for producing Linear Guide Way.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.139-148
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• 2002

Motion errors of linear motion guideway are analyzed theoretically in this paper. For the analysis, an new algorithm predicting motion errors of bearing and guideway is proposed using the Hertz's elastic deformation theory. Accuracy averaging effect can be calculated quantitatively by analyzing relationship between motion errors of guideway and spatial frequency of rail form error. Influences of design parameters on the motion errors including the number of balls, preload, ball diameter, bearing length and the number of bearings are analyzed. As it is difficult to measure the rail form error, experimental results are compared with results analyzed by the equivalent analysis method which evaluate the motion errors of guideway using the measured errors of bearing. From the experimental results, it is confirmed that the proposed analysis method it effective lo analyze the motion errors of linear motion bearing and guideway.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.9 s.90
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• pp.868-876
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• 2004

The linear motion(LM) guide using ball bearing has many advantages compared with conventional sliding guides. Therefore, LM guide using ball bearing has been widely used to increase the accuracy of the position of a system. This research investigates dynamic characteristics of LM guide through mainly linear analyses. Linear analysis is accomplished by Lagrange equation and the finite element method. And another trial that performs nonlinear analysis about one mode(bouncing mode) of LM guide from Hertzian contact theory is accomplished in the latter half of this research. Through nonlinear analysis we could observe the softening characteristic due to the Hertzian contact nonlinearity.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.7 s.238
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• pp.955-963
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• 2005

This research investigates dynamic characteristics of a linear motion (LM) guide through a experimental result and theoretical analysis. The stiffness in the LM guide is determined by the preloading due to the minus clearance between the ball bearing and the contact surface and it can be derived by Hertzian contact theory and the nonlinear motion of equation. The vibration analysis is performed using Lagrange equations and its result agrees with the experiment result. Using the sensitivity analysis on design parameters such as the contact angles of ball bearings and the eccentricity of mass center, the variation of the natural frequencies can be predicted.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.820-825
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• 2007

A ballscrew-linear motion(LM) guide is well-described by its name: it is a LM guide that runs by ballscrew. It consists of LM rail, LM block, end plate, screw, nut and bearing balls. The ballscrew-LM guide has many advantages compared with conventional LM guide. The high efficiency achieved with rolling contact devices permits the employment of antibacklash methods. The balls provide the only physical contact between nut rail and block and ball screw and nut replacing the sliding friction with a rolling motion. The life of the ballscrew-LM is determinated by the balls. The objective of this paper is to introduce the design of the ballscrew-LM with the safety working load.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.392-397
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• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.463-464
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• 2010