• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.11-15
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• 2002

This paper presents the thermal characteristic analysis of a high-speed HMC with spindle speed of 50,000rpm. The spindle is supported by two radial and axial magnetic bearings. and the built-in motor is located between the axial and rear radial magnetic bearings. The X-axis and Y-axis feeding systems are composed of linear motor and linear motion guides, and the Z-axis feeding system is composed of servo-motor, ballscrew and linear motion guide. The thermal analysis model of high-speed HMC is constructed by the finite element method, and the thermal characteristics in the design stage are estimated based on the temperature distribution and thermal deformation under the conditions related to the heat generation of built-in motor, magnetic bearings, linear motors, servo-motor, ballscrew, and so on.

• 한국생산제조학회지
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• 제23권4호
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• pp.392-397
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• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.141-146
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• 2013

This research investigates the stability analysis for the rotating and the stationary grooved journal bearing. The dynamic coefficients of the journal bearing are calculated by using FEM and the perturbation method. When journal bearing is in whirling motion, the dynamic coefficients have time-varying components as a sine wave due to the reaction force of oil film toward the center of journal even in the steady state. The solutions for the equations of motion can be assumed as the Fourier series expansion. The equations of motion can be rewritten as the linear algebraic equations with respect to the Fourier coefficients. Then, stability of the grooved journal bearing can be calculated by Hill's infinite determinant. The periodic function of dynamic coefficients is derived using Fourier Fast Transform(FFT).The stability of journal bearing is determined as rotating speed increases and the stability of rotating grooved journal bearing is compared and discussed with the stability of stationary grooved journal bearing.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.669-674
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• 2004

In this study, the analytical method to evaluate the response of rotor-bearing system subjected to base excitation was presented. The equations of motion contain speed dependent gyroscopic terms, base rotation dependent parametric terms and several forcing function terms which depend on linear accelerations, rotational accelerations and a combination of linear and rotational combination. The study of rotor-bearing system excited by its base motion is not only able to predict the rotational performance, but provides the fundamental data for vibration isolation. In order to illustrate transient response, transient response analysis of a practical application sample were performed. The transient response was carried out for the given base excitation by using the state-space Newmark method that incorporates the average velocity concept.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.129-130
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• 2011

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.820-825
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• 2007

A ballscrew-linear motion(LM) guide is well-described by its name: it is a LM guide that runs by ballscrew. It consists of LM rail, LM block, end plate, screw, nut and bearing balls. The ballscrew-LM guide has many advantages compared with conventional LM guide. The high efficiency achieved with rolling contact devices permits the employment of antibacklash methods. The balls provide the only physical contact between nut rail and block and ball screw and nut replacing the sliding friction with a rolling motion. The life of the ballscrew-LM is determinated by the balls. The objective of this paper is to introduce the design of the ballscrew-LM with the safety working load.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.394-400
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• 2008

This paper presents an analytical method to investigate the stability of FDBs (fluid dynamic bearings) considering the tilting motion. The perturbed equations of motion are derived with respect to translational and tilting motion for the general rotor-bearing system with five degrees of freedom. The Reynolds equations and their perturbed equations are solved by using the FEM in order to calculate the pressure, load capacity, and the stiffness and damping coefficients. This research introduces the radius of gyration to the equations of notion in order to express the mass moment of interia with respect to the critical mass. Then the critical mass of FDBs is determined by solving the eigenvalue problem of the linear equations of motion. This research is numerically validated by comparing the stability chart of FDBs with the time response of the whirl radius obtained from the direct integration of the equations of motion. This research shows that the tilting motion is one of the major design considerations to determine the stability of rotating system. It also shows that the stability of FDBs considering only translation is overestimated in comparison with the stability of FDBs considering both translational and tilting motion.

• 한국정밀공학회지
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• 제20권7호
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• pp.91-98
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• 2003

In the field of precision manufacturing demanding high positioning performance, the mechanical friction in positioning device deteriorates the quality of the product and increases the cost of production for positioning devices. Therefore, we propose a contract-free linear actuator using active magnetic bearing. The structure and operating principle of the proposed system are explained, and the magnetic forces are analyzed by magnetic circuit theory to design magnetic bearings and linear actuator. With the derived equation of motion, the stability is identified. Experimental results are presented to show the feasibility.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.479-484
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• 1996

This paper describes a method of measuring tilt motion. This method measures the tilt motion of drilling machines using a laser interferometer, a simple sliding linear bearing, measurement of the probe and the LSC(least square center) method. The next order of business is discussing the procedure of measurement. First, The measured position is considered to be the point of contact between the drill shank and the probe. The revolution of the drill axis delivers the point of contact to the probe. Second, because the laser interferometer is attached on the sliding linear bearing, any movement of probe influences laser reflector. Thus, the laser program displays the moving factor of laser reflector. Namely, this is tilt factor. Third. the points of measurement are a full circle which has 8 points (each are 45$^{\circ}$), After it is finished measuring the 8 points, let the spindle of the drilling machine move down about 5 cm. Repeating this procedure three times, we can get tilt motion's values which are calculated by LSC method. Many error factors affect the accurate measurement of tilt motion. However in this paper we ignore some error factors because they are less significant than tilt motion.