• Title/Summary/Keyword: layer deposition

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Study on the Passivation of Si Surface by Incorporation of Nitrogen in Al2O3 Thin Films Grown by Atomic Layer Deposition (원자층 증착법으로 형성된 Al2O3 박막의 질소 도핑에 따른 실리콘 표면의 부동화 특성 연구)

  • Hong, Hee Kyeung;Heo, Jaeyeong
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.4
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    • pp.111-115
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    • 2015
  • To improve the efficiency of the Si solar cell, high minority carrier life time is required. Therefore, the passivation technology is important to eliminate point defects on the silicon surface, causing the loss of minority carrier recombination. PECVD or post-annealing of thermally-grown $SiO_2$ is commonly used to form the passivation layer, but a high-temperature process and low thermal stability is a critical factor of low minority carrier lifetime. In this study, atomic layer deposition was used to grow the $Al_2O_3$ passivation layer at low temperature process. $Al_2O_3$ was selected as a passivation layer which has a low surface recombination velocity because of the fixed charge density. For the high charge density, an improved minority carrier lifetime, and a low surface recombination, nitrogen was doped in the $Al_2O_3$ thin film and the improvement of passivation was studied.

Characteristics of Atomic Layer-Controlled ZnO:Al Films by Atomic Layer Deposition (원자층 증착법을 이용한 ZnO:Al 박막의 특성)

  • Oh, Byeong-Yun;Baek, Seong-Ho;Kim, Jae-Hyun;Lee, Hee-Jun;Kang, Young-Gu;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.40-40
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    • 2010
  • Structural, electrical, and optical properties of atomic layer-controlled AI-doped ZnO (ZnO:Al) films grown on glass by atomic layer deposition (ALD) were characterized with various $Al_2O_3$ film contents for use as transparent electrodes. Unlike films made using sputtering methods, the diffraction peak position of the films grown by ALD based on alternate self-limiting surface chemical reactions moved progressively to a wider angle (red shift) with increasing $Al_2O_3$ film content, which seems to be evidence of Zn substitution in the film by layer-by-layer growth. By adjusting the $Al_2O_3$ film content, the electrical resistivity of ZnO:Al film with the $Al_2O_3$ film content of 2.96% reached the lowest electrical resistivity of $9.80{\times}10^{-4}\Omega{\cdot}cm$, in which the carrier mobility, carrier concentration, and optical transmittance were $11.20\;cm^2V^{-1}s^{-1}$, $5.69{\times}10^{20}\;cm^{-3}$, and 94.23%, respectively. Moreover, the estimated figure of merit value for the transparent conductive oxide applications from our best sample was $7.7\;m{\Omega}^{-1}$.

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Eggshell Pigmentation Study in Blue-shelled and White-shelled Ducks

  • Liu, H.C.;Hsiao, M.C.;Hu, Y.H.;Lee, S.R.;Cheng, W.T.K.
    • Asian-Australasian Journal of Animal Sciences
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    • v.23 no.2
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    • pp.162-168
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    • 2010
  • This study attempted to clarify the difference in eggshell pigmentation between blue-shelled ducks (BSD) and whiteshelled ducks (WSD). The eggshell pigmentation deposition process is discussed. Ultraviolet spectro-photometer and HPLC were used to determine the biliverdin concentration in the shell gland, uterus liquid and eggshell at 6, 12, 18, 20, 23.5 h post-oviposition. The biliverdin concentration in the eggshell and uterus fluid showed significant differences between BSD and WSD, but not in the shell gland. The heme oxygenase activity in the shell gland of both kinds of ducks remained mostly constant during the ovulatory cycle with no variation. The assay of exogenous biliverdin injection into the shell gland antrum in the WSD indicated that exogenous biliverdin could be deposited continuously into the eggshell until the source was exhausted. A layer-by-layer dissolution assay was used to examine the eggshell pigment deposition process. The biliverdin concentration in the first to sixth layers of the eggshell in the BSD was significantly higher than that in the white-shelled counterpart. The blue pigment concentration increased persistently from the 6th layer to the $1^{st}$ layer. The BSD eggshells did not accumulate a large quantity of biliverdin in the most external layer. They tended to increase the deposition layer by layer. Our results demonstrated that different BSD and WSD eggshell colors were influenced by the amount of biliverdin in the uterus fluid and not determined by the amount of biliverdin in the shell gland. This implies the existence of a mechanism that controls biliverdin transportation from the shell gland into the uterus fluid, thereby playing a key role in regulating duck eggshell color.

Preparation of Cadmium-free Buffer Layers for CIGS Solar Cells (CIGS 태양전지용 Cd-Free 버퍼층 제조)

  • Moon, Jee Hyun;Kim, Ji Hyeon;Yoo, In Sang;Park, Sang Joon
    • Applied Chemistry for Engineering
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    • v.25 no.6
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    • pp.577-580
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    • 2014
  • Indium hydroxy sulfide ($In(OH)_xS_y$) as a cadmium (Cd)-free buffer layer for $CuInGaSe_2$ (CIGS) solar cells was prepared by the chemical bath deposition (CBD) and the reaction time was optimized. The band gap energy and transmittance data alongside the thickness results from the direct observation with focused ion beam system (FIB) could be a powerful tool for optimizing the conditions. In addition, X-ray diffractometer (XRD), X-ray photoelectron microscopy (XPS), and scanning electron microscope (SEM) were also employed for the layer characterization. The results indicated that the optimum reaction time for $In(OH)_xS_y$ buffer layer deposition by CBD was 20 min at $70^{\circ}C$ under the conditions employed. At the optimum conditions, the buffer layer thickness was near 57 nm and the band gap energy was 2.7 eV. In addition, it was found that there was no XPS peak shift in between the buffer layers deposited on molybdenum (Mo)/glass and that on CIGS layer.

Pd Seed Layer for Electroless Cu Deposition on TaN Diffusion Barrier by Self-Assembled-Monolayer Method(SAM) (Self assembled-monolayer(SAM)법을 이용한 TaN 확산방지막의 무전해 Cu 도금용 Pd seed layer 제조 및 특성)

  • Han, Won-Kyu;Cho, Jin-Ki;Choi, Jae-Woong;Kim, Jeong-Tae;Yeom, Seung-Jin;Kwak, Noh-Jung;Kim, Jin-Woong;Kang, Sung-Goon
    • Korean Journal of Materials Research
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    • v.17 no.9
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    • pp.469-474
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    • 2007
  • Electroless deposition(ELD) was applied to fabricate Cu interconnections on a TaN diffusion barrier with Pd seed layer. The Pd seed layer was obtained by self-assembled monolayer method(SAM) with PDDA and PSS as surfactants. We were able to obtain about 10nm Pd nano particles as seeds for electroless Cu deposition and the density of Pd seeds was much higher than that of Pd seeds fabricated by conventional Pd sensitization-activation method. Also we were able to obtain finer Cu interconnections by ELD. Therefore we concluded that the Pd seed layer by SAM was able to be applied to form Cu interconnection by ELD for under 30nm feature.

Formation of Uniform SnO2 Coating Layer on Carbon Nanofiber by Pretreatment in Atomic Layer Deposition (전처리를 이용한 탄소 나노 섬유의 균일한 SnO2 코팅막 형성)

  • Kim, Dong Ha;Riu, Doh-Hyung;Choi, Byung Joon
    • Journal of Powder Materials
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    • v.25 no.1
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    • pp.43-47
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    • 2018
  • Carbon nanofibers (CNF) are widely used as active agents for electrodes in Li-ion secondary battery cells, supercapacitors, and fuel cells. Nanoscale coatings on CNF electrodes can increase the output and lifespan of battery devices. Atomic layer deposition (ALD) can control the coating thickness at the nanoscale regardless of the shape, suitable for coating CNFs. However, because the CNF surface comprises stable C-C bonds, initiating homogeneous nuclear formation is difficult because of the lack of initial nucleation sites. This study introduces uniform nucleation site formation on CNF surfaces to promote a uniform $SnO_2$ layer. We pretreat the CNF surface by introducing $H_2O$ or $Al_2O_3$ (trimethylaluminum + $H_2O$) before the $SnO_2$ ALD process to form active sites on the CNF surface. Transmission electron microscopy and energy-dispersive spectroscopy both identify the $SnO_2$ layer morphology on the CNF. The $Al_2O_3$-pretreated sample shows a uniform $SnO_2$ layer, while island-type $SnO_x$ layers grow sparsely on the $H_2O$-pretreated or untreated CNF.

Rotation Speed Dependence of ZnO Coating Layer on SnSe powders by Rotary Atomic Layer Deposition Reactor (회전형 원자층 증착기의 회전 속도에 따른 SnSe 분말 상 ZnO 박막 증착)

  • Jung, Myeong Jun;Yun, Ye Jun;Byun, Jongmin;Choi, Byung Joon
    • Journal of Powder Materials
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    • v.28 no.3
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    • pp.239-245
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    • 2021
  • The SnSe single crystal shows an outstanding figure of merit (ZT) of 2.6 at 973 K; thus, it is considered to be a promising thermoelectric material. However, the mass production of SnSe single crystals is difficult, and their mechanical properties are poor. Alternatively, we can use polycrystalline SnSe powder, which has better mechanical properties. In this study, surface modification by atomic layer deposition (ALD) is chosen to increase the ZT value of SnSe polycrystalline powder. SnSe powder is ground by a ball mill. An ALD coating process using a rotary-type reactor is adopted. ZnO thin films are grown by 100 ALD cycles using diethylzinc and H2O as precursors at 100℃. ALD is performed at rotation speeds of 30, 40, 50, and 60 rpm to examine the effects of rotation speed on the thin film characteristics. The physical and chemical properties of ALD-coated SnSe powders are characterized by scanning and tunneling electron microscopy combined with energy-dispersive spectroscopy. The results reveal that a smooth oxygen-rich ZnO layer is grown on SnSe at a rotation speed of 30 rpm. This result can be applied for the uniform coating of a ZnO layer on various powder materials.

Study on Properties of Self-Assembled Monolayer as Anti-adhesion Layer on Metallic Nano Stamper (금속 나노 스탬퍼 점착방지막으로서의 자기조립 단분자막 특성 연구)

  • 최성우;강신일
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.10a
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    • pp.367-370
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    • 2003
  • In this study, application of SAM (self-assembled monolayer) to nano replication process as an anti-adhesion layer was presented to reduce the surface energy between the nano mold and the replicated polymeric nano patterns. The electron beam lithography was used for master nano patterns and the electorforming process was used to fabricate the nickel nano stamper. Alkanethiol SAM as an anti-adhesion layer was deposited on metallic nano stamper using solution deposition method. To analyze wettability and adhesion force of SAM, contact angle and LFM (Lateral Force Microscopy) were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. It was found that the surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the quality of SAM on the nickel stamper maintained under the actual molding environments.

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CIGS Thin Film Solar Cells by Electrodeposition

  • Saji, Viswanathan S.;Lee, Sang-Min;Lee, Chi-Woo
    • Journal of the Korean Electrochemical Society
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    • v.14 no.2
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    • pp.61-70
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    • 2011
  • Thin film solar cells with chalcopyrite $CuInSe_2/Cu(In,Ga)Se_2$ absorber materials, commonly known as "CIS/CIGS solar cells" have recently attracted significant research interest as a potential alternative energy-harvesting system for the next generation. Among the different deposition techniques available for the CIGS absorber layer, electrodeposition is an effective and low cost alternative to vacuum based deposition methods. This article reviews progress in the area of CIGS solar cells with an emphasis on electrodeposited absorber layer. Existing challenges in fabrication of stoichiometric absorber layer are highlighted.

Fabrication of Flexible CIGS thin film solar cells using STS430 substrate (STS430 기판을 이용한 Flexible CIGS 박막 태양전지 제조)

  • Jung, Seung-Chul;Ahn, Se-Jin;Yun, Jae-Ho;Yoon, Kyung-Hoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2008.05a
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    • pp.436-437
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    • 2008
  • Flexible CIGS thin film solar cell was fabricated using STS430 plate as a flexible substrate in this work. A diffusion barrier layer of $SiO_2$ thin film was deposited on STS430 substrate by PECVD followed by deposition of double layered Mo back contact. After depositing CIGS absorber layer by co-evaporation, CdS buffer layer by chemical bath deposition, ZnO window layer by RF sputtering and Al electrode by thermal evaporation, the solar cell fabrication processes were completed and its performance was evaluated. Corresponding solar cell showed an conversion efficiency of 8.35 % with $V_{OC}$ of 0.52 V, $J_{SC}$ of 26.06 mA/$cm^2$ and FF of 0.61.

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