Pd Seed Layer for Electroless Cu Deposition on TaN Diffusion Barrier by Self-Assembled-Monolayer Method(SAM)
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Han, Won-Kyu
(Division of Materials Science and Engineering, Hanyang University)
Cho, Jin-Ki (Department of advanced Materials Engineering, Korea Polytechnic University) Choi, Jae-Woong (Division of Materials Science and Engineering, Hanyang University) Kim, Jeong-Tae (R&D Divisions, Hynix Semiconductor Inc.) Yeom, Seung-Jin (R&D Divisions, Hynix Semiconductor Inc.) Kwak, Noh-Jung (R&D Divisions, Hynix Semiconductor Inc.) Kim, Jin-Woong (R&D Divisions, Hynix Semiconductor Inc.) Kang, Sung-Goon (Division of Materials Science and Engineering, Hanyang University) |
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