• Title/Summary/Keyword: layer deposition

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Effects of UV ozone annealing on conduction mechanism in Ta2O5 thin films deposited by atomic layer deposition (Atomic layer deposition으로 증착된 Ta2O5 박막의 전도기구에 대한 UV ozone annealing 효과)

  • 엄다일;전인상;노상용;황철성;김형준
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.57-57
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    • 2003
  • High dielectric constant materials (high K) have attracted a great deal of interest because of the dramatic scaling down of DRAM capacitor reaching its physical limit in terms of reduction of thickness. Among high-K materials that can replace silicon dioxide, tantalum pentoxide (Ta2O5) thin film, with their high dielectric constant (∼25) and good step coverage, is the candidate of choice.

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Rare Earth Oxide Atomic Layer Deposition for Hydrophobic Coating (소수성 코팅을 위한 원자층 증착 희토류 금속산화물)

  • LeeHan, Bo-Ram
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.11a
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    • pp.154-154
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    • 2015
  • 소수성 코팅은 광범위하게 응용 가능하다. 희토류 금속 산화물(Rare earth oxides, REO)은 소수성 코팅 물질로써 우수한 열적 기계적 안정성으로 인해 전도유망하다. 본 연구는 원자층 증착법(Atomic layer deposition, ALD)을 이용한 나노 단위 두께의 희토류 금속 산화물 박막을 이용하여 소수성 코팅의 기초 연구이다. 미래 소수성 코팅 물질로써의 응용 가능성을 함께 다룬다.

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Synthesis ad Self-assembled Multilayer Film Fabrication via Layer-by-layer Deposition of Water-soluble Aromatic Polyimines

  • Lee, Taek-Seung;Kim, Jae-Hyeon;Kumar, Jayant;Tripathy, Sukant
    • Proceedings of the Korean Fiber Society Conference
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    • 1997.10a
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    • pp.71-75
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    • 1997
  • A new series of water-soluble conjugated aromatic polyimines containing sulfonate groups have been synthesized via polycondensation reaction between diamines and dialdehydes at room temperature. Self-assembled multilayer films consisting each polyimine as a polyanion and poly(diallyldimethylammonium hydrochloride) as a polycation were fabricated successfully by alternate deposition in corresponding aqueous solutions.

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Epitaxial Growth of BSCCO Thin Films Fabricated by Son Beam Sputtering

  • Park, Yong-Pil;Lee, Joon-Ung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.484-488
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    • 1997
  • BSCCO thin film is fabricated cia both processes of co-deposition and layer-by-layer deposition at an ultralow growth rate using ion beam sputtering method. The adsorption of Bi atom and the appearance of Bi-2212 phase shows large differance between both processes. It is found that the resident time of Bi vapor species on the surface of the substrate strongly dominates the film composition and the formation of the structure.

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The Study of erosion characteristics for MgO layer in plasma display panel (플라즈마 디스플레이 패널의 MgO막 부식 특성에 관한 연구)

  • Shin, Jae-Hwa;Jeong, Dong-Hyo
    • Proceedings of the KIEE Conference
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    • 2002.06a
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    • pp.72-74
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    • 2002
  • In this paper, we showed the erosion characteristics of MgO protector layer releated to lifetime of plasma display panel(PDP). We observed MgO erosion characteristic as a functions of deposition conditions. In RIE condition of Xe gas, the lowest erosion rate appears in the conditions of no heating, bias voltage -30V and pressure 5mtorr. In general. as deposition rate increases, erosion rate decreases.

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The Study on Dielectric layer Design and Manufactor for Luminance Improvement of Red Organic Light Emitting Device (적색 유기발광소자의 휘도향상을 위한 Dielectric layer 설계 및 제작에 관한 연구)

  • Ki, Hyun-Chul;Kim, Seon-Hoon;Kim, Doo-Gun;Kim, Sang-Gi;Jeong, Haeng-Yun;Choi, Young-Sung;Hong, Kyung-Jin
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.5
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    • pp.918-921
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    • 2010
  • We have proposed an dielectric layer to improve the luminance of red organic light emitting device. Here, we have calculated refractive index of dielectric layer material that was revised refractive index of organic material, ITO and glass. Refractive index of dielectric layer material was 1.711. The structure of dielectric layer was designed in organic material/ITO/dielectric layer/glass. Dielectric material changed thickness that deposited by ion-assisted deposition system. Transmittances of ITO were 95.66-98.85 [%]. Red OLED was fabricated with the structure of TPD($400[{\AA}]$)/DCMII($20[{\AA}]$), Rubrene($20[{\AA}]$)/Alq3($500[{\AA}]$)/LiF($15[{\AA}]$)/Al($1,000[{\AA}]$). Turn-on voltage and Luminance of Red OLED were 10 [V] and 5,857 cd/m2.

Deposition of Functional Organic and Inorganic Layer on the Cathode for the Improved Electrochemical Performance of Li-S Battery

  • Sohn, Hiesang
    • Korean Chemical Engineering Research
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    • v.55 no.4
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    • pp.483-489
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    • 2017
  • The loss of the sulfur cathode material through dissolution of the polysulfide into electrolyte causes a significant capacity reduction of the lithium-sulfur cell during the charge-discharge reaction, thereby debilitating the electrochemical performance of the cell. We addressed this problem by using a chemical and physical approach called reduction of polysulfide dissolution through direct coating functional inorganic (graphene oxide) or organic layer (polyethylene oxide) on electrode, since the deposition of external functional layer can chemically interact with polysulfide and physically prevent the leakage of lithium polysulfide out of the electrode. Through this approach, we obtained a composite electrode for a lithium-sulfur battery (sulfur: 60%) coated with uniform and thin external functional layers where the thin external layer was coated on the electrode by solution coating and drying by a subsequent heat treatment at low temperature (${\sim}80^{\circ}C$). The external functional layer, such as inorganic or organic layer, not only alleviates the dissolution of the polysulfide electrolyte during the charging/discharging through physical layer formation, but also makes a chemical interaction between the polysulfide and the functional layer. As-formed lithium-sulfur battery exhibits stable cycling electrochemical performance during charging and discharging at a reversible capacity of 700~1187 mAh/g at 0.1 C (1 C = 1675 mA/g) for 30 cycles or more.

Failure and Phase Transformation Mechanism of Multi-Layered Nitride Coating for Liquid Metal Injection Casting Mold

  • Jeon, Changwoo;Lee, Juho;Park, Eun Soo
    • Korean Journal of Materials Research
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    • v.31 no.6
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    • pp.331-338
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    • 2021
  • Ti-Al-Si target and Cr-Si target are sputtered alternately to develop a multi-layered nitride coating on a steel mold to improve die-casting lifetime. Prior to the multi-layer deposition, a CrN layer is developed as a buffer layer on the mold to suppress the diffusion of reactive elements and enhance the cohesive strength of the multi-layer deposition. Approximately 50 nm CrSiN and TiAlSiN layers are deposited layer by layer, and form about three ㎛-thickness of multi-layered coating. From the observation of the uncoated and coated steel molds after the acceleration experiment of liquid metal injection casting, the uncoated mold is severely eroded by the adhesion of molten metallic glass. On the other hand, the multi-layer coating on the mold prevents element diffusion from the metallic glass and mold erosion during the experiment. The multi-layer structure of the coating transforms the nano-composite structured coating during the acceleration test. Since the nano-composite structure disrupts element diffusion to molten metallic glass, despite microstructure changes, the coating is not eroded by the 1,050 ℃ molten metallic glass.