• Title/Summary/Keyword: layer by layer

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A Heating Apparatus for Semiconductor Manufacturing using Direct Heating Method (직접 가열 방식을 이용한 반도체 제조용 히팅 장치)

  • Jung, Soon-Won;Koo, Kyung-Wan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.4
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    • pp.408-411
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    • 2008
  • As to this research is new structure of the semiconductor substrate heating apparatus. The fast thermoresponsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. For this, it adheres closely to the substrate, in which the photosensitive film is coated and the heating plate layer, adhering closely to the floor side of a substrate the mica layer which adheres closely to the floor side of the upper heating plate layer in order to minimize an insulation and heat loss, and the lower part of the mica layer and it is comprised of the floor plate layer. The heating plate layer forms the continued groove portion over the floor side whole. The sheath heater for heating a substrate is inserted with the groove portion and the heating plate layer is comprised. It is confirmed that by using the new substrate heating structure, the temperature change of the heating plate against the time is observed. Then, there is the electric power saving effect of about 40% in comparison with the existing method.

Comparison of Sound Transmission Loss Through Single and Double with Vacuum Layer Polymer Soundproof Panel (단일 구조 및 진공층이 있는 이중 구조 폴리머 방음패널의 음향투과손실 비교)

  • Lee, Ju Haeng;Kim, Ilho;Ahn, Kwang ho
    • International Journal of Highway Engineering
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    • v.15 no.6
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    • pp.11-15
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    • 2013
  • PURPOSES : This study is to compare sound transmission loss(STL) value depending on the four kinds of materials, PC(Polycarbonate), PMMA(Polymethyl mathacrylate), PE(Polyethlyene), PP(Polypropylene), and two types of structure, single layer and double with vacuum layer, of soundproof panel. METHODS : With four sorts of polymer material, the specimens were made as various structures, 4 mm and 8 mm of single soundpoof panel and vacuum layered 4 mm of one. The experimental condition and procedures were complied with authorized process test, KS F 2808. RESULTS : STL of single panel made of PC were the greatest followed by PMMA, PE, PP regardless of the thickness of panel, However, STL of PMMA panel began to decrease around 2500 Hz and reached the lowest value among others in 5000 Hz. Vacuum layer soundproof panel showed good performance in more than 2000 Hz. Only vacuum layer panel made of PC presented resonance frequency at 800 Hz while that of other vacuum ones at 1000 Hz. CONCLUSIONS : According to results of single layer, it was found that single panel functioned as the theorical way we expected in terms of surface density. That trends were blurred as the panel got thicker. And it was suggested also that vacuum layer panel performed well at high frequency, more than 2000 Hz.

Acoustical characteristic predictions of a multi-layer system of a submerged vehicle hull mounted sonar simplified to an infinite planar model

  • Kim, Sung-Hee;Hong, Suk-Yoon;Song, Jee-Hun;Kil, Hyun-Gwon;Jeon, Jae-Jin;Seo, Young-Soo
    • International Journal of Naval Architecture and Ocean Engineering
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    • v.4 no.2
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    • pp.96-111
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    • 2012
  • Hull Mounted Sonar (HMS) is a long range submerged vehicle's hull-mounted passive sonar system which detects low-frequency noise caused by machineries of enemy ships or submerged vehicles. The HMS needs a sound absorption /insulation multi-layer structure to shut out the self-noise from own machineries and to amplify signals from outside. Therefore, acoustic analysis of the multi-layer system should be performed when the HMS is designed. This paper simplified the HMS multi-layer system to be an infinite planar multi-layer model. Also, main excitations that influence the HMS were classified into mechanical, plane wave and turbulent flow excitation, and the investigations for each excitation were performed for various models. Stiffened multi-layer analysis for mechanical excitation and general multi-layer analysis for turbulent flow excitation were developed. The infinite planar multi-layer analysis was expected to be more useful for preliminary design stage of HMS system than the infinite cylindrical model because of short analysis time and easiness of parameter study.

Study on the Water-Vapor Permeation through the Al Layer on Polymer Substrate (폴리머 기판에 형성한 알루미늄 보호막의 수분침투 특성 연구)

  • Choi, Young-Jun;Ha, Sang-Hoon;Park, Ki-Jung;Choe, Youngsun;Cho, Young-Rae
    • Korean Journal of Metals and Materials
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    • v.47 no.12
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    • pp.873-880
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    • 2009
  • Water-vapor permeation through metallic barriers deposited on polymer substrates has been an important technological issue because the performance of the barrier is critical to the reliability of flexible organic devices. For the development of long-lifetime flexible organic devices, two different sets of samples were designed and demonstrated from the viewpoint of the water-vapor transmission rate (WVTR). Aluminum (Al) and polyethylene terephthalate (PET) were chosen for the barrier layer and the polymer substrate, respectively. Two stacking structures, a single-layer (Al/PET) structure and a double-layer (Al/PET/Al) structure, were used for the WVTR measurement. For the single-layer structure, the WVTR decreases as the thickness of the barrier layer increases. Compared to the single-layer sample, the double-layer sample showed superior WVTR performance (by nearly three times) when the total thickness of the Al barrier was greater than 100 nm.

Correlation between optimized thicknesses of capping layer and thin metal electrode for efficient top-emitting blue organic light-emitting diodes

  • Hyunsu Cho;Chul Woong Joo;Byoung-Hwa Kwon;Chan-mo Kang;Sukyung Choi;Jin Wook Sin
    • ETRI Journal
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    • v.45 no.6
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    • pp.1056-1064
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    • 2023
  • The optical properties of the materials composing organic light-emitting diodes (OLEDs) are considered when designing the optical structure of OLEDs. Optical design is related to the optical properties, such as the efficiency, emission spectra, and color coordinates of OLED devices because of the microcavity effect in top-emitting OLEDs. In this study, the properties of top-emitting blue OLEDs were optimized by adjusting the thicknesses of the thin metal layer and capping layer (CPL). Deep blue emission was achieved in an OLED structure with a second cavity length, even when the transmittance of the thin metal layer was high. The thin metal film thickness ranges applicable to OLEDs with a second microcavity structure are wide. Instead, the thickness of the thin metal layer determines the optimized thickness of the CPL for high efficiency. A thinner metal layer means that higher efficiency can be obtained in OLED devices with a second microcavity structure. In addition, OLEDs with a thinner metal layer showed less color change as a function of the viewing angle.

An Efficient Architecture of Inter Layer Up-sampling in Scalable Video Decoder (SVC 복호화기에서 Inter Layer 업-샘플링의 효과적인 구조)

  • Ki, Dae-Wook;Kim, Jae-Ho
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.3
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    • pp.621-627
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    • 2010
  • This paper proposes an efficient architecture of Inter layer up-sampling in decoder for SVC(scalable video coding). A register bank for horizontal and vertical up-sampling and interpolation units are designed, by introducing the proposed architecture, 41% memory bandwidth is reduced compared to JSVM. For real-time operation for HD 6 layer decoder having CIF, SD, HD resolution for CGS layer, the hardware is designed to operate at 127MHz. The gate count is about 3000.

Effect Of The Separating Shear Layer on the Flow Over an Axisymmetric Backward-Facing Step (박리전단층이 축대칭 하향단흐름에 미치는 영향)

  • 부정숙;김경천;양종필
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.19 no.4
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    • pp.1102-1115
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    • 1995
  • An experimental study on the flow over the axisymmetric backward-facing step was carried out. The purpose of the present study is to investigate the effect of the boundary layer thickness at the separation point on the reattachment length and to understand the structure of the recirculating flows. Local mean and fluctuating velocity components were measured in the separating and reattaching axisymmetric turbulent boundary layer over the wall of convex cylinder placed in a water tunnel by using 2-color 4-beam fiber optics laser Doppler velocimetry. The study demonstrated that the reattachment length increases with increasing boundary layer thickness. It was also observed that the reverse flow velocity and turbulent kinetic energy decrease with an increase in the momentum thickness at the separation point. The measured velocity field suggests that the boundary layer thickness at the separation can affect definitely on the formation of corner eddy.

Enhancement of Emission Efficiency of Multilayer White Light Organic Electroluminescent Device (다층구조를 적용한 백색 전계발광소자의 발광효율 향상)

  • Kim, Ju-Seung;Gu, Hal-Bon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.05a
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    • pp.27-31
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    • 2001
  • We fabricated organic electroluminescent(EL) devices with mixed emitting layer of poly(N-vinylcarbazole)(PVK), 2,5-bis(5'-tert-butyl-2-benzoxazoly)thiophene(BBOT), N,N'-diphenyl-N,N'-(3-methyphenyl)-1,1'-biphenyl-4, 4'-diarnine(TPD) and poly(3-hexylthiophene)(P3HT). To improve the external quantum efficiency of EL devices, we added the functional layer to the devices such as LiF insulating layer, carrier confinement layer(BBOT) and hole injection layer(CuPc). In the ITO/emitting layer/Al device, the maximum quantum efficiency at 15V was $1.88{\times}10^{-5}%$. And then, it is increased by a factor of 27 to $5.2{\times}10^{-3}%$ in ITO/CuPc/emitting layer/BBOT/LiF/Al device at 15V.

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Application of Fuzzy Theory and Analytic Hierarchy Process to Evaluate Marketing Strategies

  • Yu, C.S.;Tzeng, G.H.;Li, H. L.
    • Proceedings of the Korean Institute of Intelligent Systems Conference
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    • 1998.06a
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    • pp.352-357
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    • 1998
  • Conventional marketing research generally focuses on a single layer's benefit. A notable example is the consumer layer providing managers with partial market information to evaluate relevant strategies. As generally known, marketing management encounters complex supply and demand behaviors, thereby necessitation that a successful marketing strategy adopt multi-layer considerations, such as the consumer layer, channel-retailer layer, and marketing planner layer. In light of above situation, this study applies fuzzy theory and the analytic hierarchy process(AHP) technique to analyze the performances of marketing strategies under multi-layer benefits, In addition, conventional marketing research has difficulty in efficiently allocating the limited budget so that each desired criterion can be significantly enhanced by a group of events. Therefore, a weighting structure among the goal, layers, criteria, and strategies(i.e. a group of events) is also developed herein to trace the influential process and assist marketing managers in efficiently allocating resources(i.e.budget).

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Fabrications of nano-sized patterns using bi-layer UV Nano imprint Lithography (UV NIL을 이용한 Lift-off가 용이한 패턴 형성 연구)

  • Yang K.Y.;Hong S.H.;Lee H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1489-1492
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    • 2005
  • Compared to other nano-patterning techniques, Nano imprint Lithography (NIL) has some advantages of high throughput and low process cost. To imprint low temperature and pressure, UV Nano imprint Lithography, which using the monomer based UV curable resin is suggested. Because fabrication of high fidelity pattern on topographical substrate is difficult, bi-layer Nano imprint lithography, which are consist of easily removable under-layer and imprinted pattern, is being used. If residual layer is not remained after imprinting, and under-layer is removed by oxygen RIE etching, we might be able to fabricate the bi-layer pattern for easy lift-off process.

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