• 대한전자공학회논문지SD
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• 제45권4호
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• pp.7-12
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• 2008

본 논문에서는 comb drive를 이용하여 수평 방향 저항 접촉 방식의 RF MEMS 스위치 개발을 소개한다. 무선통신 트랜시버에서 사용되는 FEM에서 사용될 수 있는 높은 안전성과 좋은 RF 특성을 가지는 스위치의 개발을 목표로 한다. 따라서 작은 삽입손실 특성을 가지기 위해 comb drive를 이용하여 큰 접촉 힘을 발생시키고, 큰 격리도 특성을 가지기 위해 스위치 off 상태에서 작은 정전용량을 갖도록 한다. 그리고 단결정 실리콘을 스위치의 구조물로 사용함으로써 기계적인 안전성을 갖도록 한다. 개발된 RF MEMS 스위치는 26 V의 동작 전압을 가지며, 2 GHz에서 0.44 dB 이하의 삽입손실과 60 dB 이상의 격리도 특성을 가진다.

• 센서학회지
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• 제20권2호
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• pp.77-81
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• 2011

This paper presents a single-pole eight-throw(SP8T) switch based on proposed a radio-frequency(RF) microelectromechanical systems (MEMS) switches. The proposed switch was driven by a double stop(DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to have tapered signal line and bi-directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. The SP8T switch of 3-stage tree topology was developed based on an arrangement of the proposed RF MEMS switches. The developed SP8T switch had an actuation voltage of 12 V, an insertion loss of 1.3 dB, a return loss of 15.1 dB, and an isolation of 31.4 dB at 6 GHz.

• 대한의용생체공학회:의공학회지
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• 제21권2호
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• pp.213-218
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• 2000

Pressure distributions of the soft tissue are valuable for understanding and diagnosing the disease characteristics due to the mechanical loading. Our system measures dynamic pressure distributions in real-time under the general PC environment, and analyzes various foot disorders. Main features of the developed system are as follows: (1) With the resistive pressure sensor matrix of 40${\times}$40 cells, the data is sent to the PC with the maximum sampling rate of 40 frames/sec. (2) For each frame, contact area, pressure and force are analyzed by graphic forms. Thus, various biomechanical parameters are easily determined at specific areas of interests. (3) A certain stance phase can be chosen for the analysis from the continuous walking, and the detailed biomechanical analysis can be done according to an arbitrary line dividing anterior/posterior or medial/lateral plantar areas. (4) The center of pressure (COP) is calculated and traced from the pressure distribution data, and thus the movement of the COP is monitored in detail. A few experiments revealed that our system successfully measured the dynamic plantar distribution during normal walking.