Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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A Study on RF MEMS Switch with Comb Drive

Comb drive를 이용한 RF MEMS 스위치에 관한 연구

  • Kang, Sung-Chan (School of Electrical Engineering and Computer Science, Seoul National University, Inter-university Semiconductor Research Center) ;
  • Kim, Hyeon-Cheol (School of Electrical Engineering, Ulsan University) ;
  • Chun, Kuk-Jin (School of Electrical Engineering and Computer Science, Seoul National University, Inter-university Semiconductor Research Center)
  • 강성찬 (서울대학교 전기컴퓨터공학부, 반도체공동연구소) ;
  • 김현철 (울산대학교 전기전자정보시스템공학부) ;
  • 전국진 (서울대학교 전기컴퓨터공학부, 반도체공동연구소)
  • Published : 2008.04.25
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Abstract

This paper presents a lateral resistive contact RF MEMS switch using comb drive. Our goal was to fabricate the RF MEMS switch with high reliability and good RF characteristics for front end module in wireless transceiver system. Therefore, comb drive is used for large contact force in order to achieve low insertion loss and small off-state capacitance in order to achieve high isolation. The single crystalline silicon is used for mechanical reliability. As a result, the developed switch showed insertion loss less than 0.44 dB at 2 GHz, isolation greater than 60 dB, and low actuation voltage at 26 V.

본 논문에서는 comb drive를 이용하여 수평 방향 저항 접촉 방식의 RF MEMS 스위치 개발을 소개한다. 무선통신 트랜시버에서 사용되는 FEM에서 사용될 수 있는 높은 안전성과 좋은 RF 특성을 가지는 스위치의 개발을 목표로 한다. 따라서 작은 삽입손실 특성을 가지기 위해 comb drive를 이용하여 큰 접촉 힘을 발생시키고, 큰 격리도 특성을 가지기 위해 스위치 off 상태에서 작은 정전용량을 갖도록 한다. 그리고 단결정 실리콘을 스위치의 구조물로 사용함으로써 기계적인 안전성을 갖도록 한다. 개발된 RF MEMS 스위치는 26 V의 동작 전압을 가지며, 2 GHz에서 0.44 dB 이하의 삽입손실과 60 dB 이상의 격리도 특성을 가진다.

Keywords

References

  1. L. E. Larson, R. H. Hackett, M. A. Melendes, and R. F. Lohr, "Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits", in IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium Digest, pp. 27-30, Boston, MA, USA, June 1991
  2. Hector J. De Los Santos, Georg Fischer, Harrie A.C. Tilmans, Joost T.M. van Beek, "RF MEMS for Ubiquitous Wireless Connectivity", IEEE Microwave Magzine, Vol. 4, no. 5, pp. 36-49, December 2004
  3. Gabriel M. Rebeiz, Jeremy B. Muldavin, "RF MEMS Switches and Switch Circuits", IEEE Mircrowave Magazine, Vol. 2, no. 4, pp. 59-71, December 2001 https://doi.org/10.1109/6668.969936
  4. Linda P. B. Katehi, James F. Harvey, and Elliott Brown, "MEMS and Si Micromachined Circuits for High-Frequency Applications", IEEE Transaction on Microwave Theory and Techniques, Vol. 50, no. 3, pp. 858-866, March 2002 https://doi.org/10.1109/22.989969
  5. Guan-Leng Tan and Gabriel M. Rebeiz, "A DC-Contact MEMS Shunt Switch", IEEE Microwave and Wireless Component Letters, Vol. 12, No. 6, pp. 212-214, June 2002 https://doi.org/10.1109/LMWC.2002.1009998
  6. N. Nishijima., Juo-Jung Hung, G. M. Rebeiz, "A low-voltage high contact force RF-MEMS switch", IEEE Transaction on Microwave Theory and Techniques, Vol. 2, No. 2, pp. 577-580, June 2004
  7. M. Sakata, Y. Komura, T. Seki, K. Kobayashi, K. Sano, S. Horiike, "Micromachined relay which utilized single crystal silicon electrostatic actuator", 12th IEEE International Conference on Micro Electro Mechanical Systmes, (MEMS '99), pp.21-24, Orlando, FL, USA, January 1999
  8. R. E. Mihailovich, M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, and J. F. Denatale, "MEM relay for reconfigurable RF circuits", IEEE Microwave Wireless Component Letters, Vol. 11, no., 2, pp. 53-55, February 2001 https://doi.org/10.1109/7260.914300
  9. Il-Joo Cho, Taeksang Song, Sang-Hyun Baek, Euisik Yoon, "A Low-Voltage and Low-Power RF MEMS Series and Shunt Switches Actuated by Combination of Electromagnetic and Electrostatic Forces", IEEE Transactions on Microwave Theory and Techniques, Vol. 53, no. 7, pp. 2450-2457, July 2005 https://doi.org/10.1109/TMTT.2005.850406
  10. Joachim Schimkat, "Contact Materials for Microrelays", 11th IEEE International Conference on Micro Electro Mechanical Systems, (MEMS '98), pp.190-194, Heidelberg, Germany, January 1998