• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.524-527
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• 2000

In this paper, we have studied minimization of the burr which occurred after $\mu$-BGA(ball grid array) singulation process, singulation of the multilayer with a pulsed Nd:YAG(266, 532 nm) laser is used to cut the metal layer which doesn't well absorb laser beam. Especially, the photoresist and $N_2$blowing is effective to minimize of the surface demage and burr. In this experiment, the $N_2$ blowing reduces a laser energy loss by debris and suppress a surface oxidation. The SEM(scanning electron microscopes) and non-contact 3D inspector are used to measure cutting line-width and surface demage. The $\mu$-BGA singulation threshold energy is 75.0 J/cm$^2$at 30 ${\mu}{\textrm}{m}$/s scan speed.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.154-154
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• 2000

FED(Field emission display)의 FEAs(Field emitter arrays)에 형성되어 있는 micro-tip 은 tip 표면의 오염이나 진공내부의 잔류가스에 대단히 민감하다. 특히, emitter 물질의 일함수 및 겉모양 같은 기하학적 요소에 민감한 전계방출 소자의 특성상 tip 선단이 oxidation 될 경우 일함수가 증가하여 전자방출에 필요한 구동전압이 증가하고 전자 방출의 불균일성이 커지는 문제점이 발생한다. 이에 고진공의 동작 환경 및 FEAs 제작과정이나 공기의 노출에 발생하는 tip 표면의 오염물질 제거가 요구된다. 따라서 본 연구에서는 40$\times$40mm2 FEAs에 laser power, scan speed을 달리하며 laser(cw Nd-YAG, 1064nm)을 조사하였다. laser cleaning 효과를 보기 위해 laser irradiation 전, 후에 진공도 5$\times$10-7torr irradiation 후에 emitter tip의 뚜렷한 기하학적 모양의 변화를 볼 수는 없었지만, I-V 특성이 향상 되는 것을 볼 수 있었다.

• Journal of Advanced Marine Engineering and Technology
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• v.26 no.6
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• pp.661-669
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• 2002

Rapid tooling technique enables us to make dies and molds that produce prototype parts with the correct material at a substantially reduced cost and time. In this study, experiments on selective laser sintering of tungsten carbide-cobalt mixture were carried out to find optimal sintering conditions that will be applied to rapid metal tooling. The experiments were carried out within an air, an argon and a nitrogen atmosphere. Coupons of single layer were sintered at various laser powers, scanning speeds and scan spacings. Very severe oxidation took place within an air atmosphere. The oxidation is reduced significantly within an argon and a nitrogen atmosphere. The thickness of the sintered coupons is increased as the energy density, the laser energy Per unit scanned area, is increased. Several multi-layer sintering experiments were also carried out.

• The Journal of Engineering Geology
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• v.14 no.2
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• pp.147-168
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• 2004

Purpose of this study is to quantitatively characterize the fracture roughness which was measured with a confocal laser scanning microscope. The roughness discrete data measured by confocal laser microscope were analyzed by spectral analysis and fast Fourier transform (FFT).The roughness data by used noise reduction filter were applied for fractal analysis to describe roughness features quantitatively. Artificial fractures created by Brazilian test on granites were used to measure fracture roughness under the confocal laser scanning microscope. Measurements were performed along three scan lines on each fracture surface. 36 scan lines were determined on 12 specimens in total. Features of roughness showed that coarse and medium grained granites tend to more rough features than those of fine grained granites. Continuous analog data of roughness is possible to described as discrete data of measure roughness with a fixed interval under the confocal laser microscope. Results of FFT with the measured data showed the highest values on the second harmonics. Distribution of average amplitude of second harmonics was observed 0.9853 in coarse grained granite, 1.0792 in medium grained granite and 0.6794 in fine grained granite. This indicates that the larger roughness has the higher energy of harmonics as the result of fractal analysis in low frequency zone.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.732-737
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• 2005

Distal 3D Real Object Duplication System(RODS) consists of 3D Scanner and Solid Freeform Fabrication System(SFFS). It is a device to make three-dimensional objects directly from the drawing or the scanning data. In this research, we developed an office type SFFS based on Three Dimensional Printing Process and a industrial SFFS using Dual Laser. An office type SFFS applied sliding mode control with sliding perturbation observer(SMCSPO) algorithm for control of this system. And we measured process variables about droplet diameter measurement and powder bed formation etc. through experiments. Also, in order to develop more elaborate and speedy system for large objects than existing SLS process, this study applies a new Selective Multi-Laser Sintering(SMLS) process and 3-axis dynamic Focusing Scanner for scanning large area instead of the existing $f\theta$ lens. In this process, the temperature has a great influence on sintering of the polymer. Also the laser parameters are considered like that laser beam power, scan speed, scan spacing. Now, this study is in progress to eveluate the effect of experimental parameters on the sintering process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.657-662
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• 2005

In this study, the deposition of micrometer-scale metallic interconnects on LCD glass for the repair of open-circuit type defects is investigated. Although there had been a few studies Since 1980 s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and $W(CO)_6$ was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 nm depending on laser power and scan speed while the width was controlled between $3\~50{\mu}$ using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below 1 $O\cdot{\mu}m$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.8 s.173
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• pp.165-173
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• 2005

This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980's for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)s was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 m depending on laser power and scan speed while the width was controlled between 50um using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below $1{\Omega}{\cdotu}um$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.6 s.312
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• pp.16-26
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• 2006

In this paper, we propose a 3D shape restoration system which measures height and surface shape of transparent ITO glass and delivers errors in focal length and incident angle of laser beam to femto-second laser micromachining. The proposed system is composed of a line scan laser, a high resolution camera, a linear motion guide synchronized to image capturing, and a control station. Also, we define the sensitivity indices that represent a relation between measurement error and a position of a camera and scan laser, and utilize it for optimum design. The results of the proposed system are compared with results of SPM(Scanning Probe Microscope) and prove the usefulness of the system.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.27 no.3
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• pp.347-356
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• 2009

Recently many kind of industry request 3D Modeling and visualize for object. So application of 3D laser scanning system is improved for 3D modeling and survey. But although application of scanner is steady improved, there are variety of caution error is contained in the result. There is request high quality survey for it is restricted by when field. To analysis what is consider major factor of reflect ratio about surface specification as ratio and characteristics accidental error. So this research use 3D laer scanning system what is adopted method of laser measurement for improvement accuracy 3D scan data. As a result we can check reflect volume will be improve as specification of survey object if it has high reflect ratio. It able to improve accuracy how laser scan data is revised by reflect volume.

• Transactions of Materials Processing
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• v.28 no.1
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• pp.21-26
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• 2019

Direct Laser Melting (DLM) of $Ti-xTiH_2$ (mixing ratio x = 2, 5, 10 wt.%) blended powder is characterized by producing porous titanium parts. When a high energy laser is irradiated on a $Ti-TiH_2$ blended powder, hydrogen gas ($H_2$) is produced by the accompanying decomposition of the $TiH_2$ powder, and acts as a pore-forming and activator. The hydrogen gas trapped in a rapidly solidified molten pool, which generates porosity in the deposited layer. In this study, the effects of a $TiH_2$ mixing ratio and the associated processing parameters on the development of a porous titanium were investigated. It was determined that as the content of $TiH_2$ increases, the resulting porosity density also increases, due to the increase of $H_2$ produced by $TiH_2$. Also, porosity increases as the scan speed increases. As fast solidified melting pools do not provide enough time for $H_2$ to escape, the faster the scan speed, the more the resulting $H_2$ is captured by the process. The results of this study show that the mixing ratio (x) and laser machining parameters can be adjusted to actively generate and control the porosity of the DLM parts.