• 제목/요약/키워드: laser confocal system

검색결과 86건 처리시간 0.032초

공초점 정렬을 이용한 자동초점보정 레이저 직접묘화 시스템 (Auto-focusing laser direct writing system using confocal geometry)

  • 김용우;이진석;김경식;한재원
    • 한국레이저가공학회:학술대회논문집
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    • 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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    • pp.123-128
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    • 2006
  • We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.

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파이버 공초점법을 이용한 레이저 빔 자동 초점 제어 장치에 관한 연구 (Study on Auto Focusing System of Laser Beam by Using Fiber Confocal Method)

  • 문성욱;김종배;김선흠;배한성;남기중
    • 한국레이저가공학회지
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    • 제9권3호
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    • pp.7-13
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    • 2006
  • Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber are 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

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파이버 공초점법을 이용한 레이저 빔 자동 초점 제어 장치에 관한 연구 (Study on auto focusing system of laser beam by using fiber confocal method)

  • 문성욱;김선흠;김종배;배한성;남기중
    • 한국레이저가공학회:학술대회논문집
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    • 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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    • pp.41-45
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    • 2006
  • Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

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A New Method for Measuring Refractive Index with a Laser Frequency-shifted Feedback Confocal Microscope

  • Zhou, Borui;Wang, Zihan;Shen, Xueju
    • Current Optics and Photonics
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    • 제4권1호
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    • pp.44-49
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    • 2020
  • In this paper, a new method is presented to measure the refractive index of single plain glass or multilayered materials, based on a laser frequency-shifted confocal feedback microscope. Combining the laser frequency-shifted feedback technique and the confocal effect, the method can attain high axial-positioning accuracy, stability and sensitivity. Measurements of different samples are given, including N-BK7 glass, Silica plain glass, and a microfluidic chip with four layers. The results for N-BK7 glass and Silica plain glass show that the measurement uncertainty in the refractive index is better than 0.001. Meanwhile, the feasibility of this method for multilayered materials is tested. Compared to conventional methods, this system is more compact and has less difficulty in sample processing, and thus is promising for applications in the area of refractive-index measurement.

Digital Imaging Fiber-Optic Trans-Illuminational과 Confocal Laser Scanning Microscope를 이용한 초기 법랑질 우식증 연구 (STUDY OF INCIPIENT ENAMEL CARIES USING A DIGITAL ILLUMINATION FIBER-OPTIC TRANSILLUMINATION AND CONFOCAL LASER SCANNING MICROSCOPE)

  • 김지태;김성오;김종수
    • 대한소아치과학회지
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    • 제33권1호
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    • pp.1-12
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    • 2006
  • 최근 새로 개발된 DIFOTI(Digital Imaging Fiber-Optic Transillumination) 시스템의 초기 법랑질 우식증 진단 능력을 평가하고 임상 적용의 가능성을 타진해 보고자 본 연구를 시행하였다. 임상 연구는 유치 탈락 시기에 근접한 학령기 아동 23명을 대상으로 DIFOTI 이미지 촬영을 시행하고 자연 탈락된 유치 20개를 수거하여 CLSM 촬영 결과를 바탕으로 민감도(sensitivity)와 특이도(specificity)를 산출하였으며 실험실 연구에서는 수거된 40개의 유치를 대상으로 Carbopol 인공 우식 용액으로 1, 2, 4 그리고 8일간 탈회시킨 후 각각 방사선 사진, DIFOTI 이미지 그리고 CLSM와 비교 분석하여 다음과 같은 결론을 얻었다. 1. 구내에서 촬영한 DIFOTI 이미지의 민감도는 0.61이었고, 특이도는 0.63이었다. 2. 실험실에서 인공 탈회시킨 유치의 협설면 초기 우식증에 대한 DIFOTI 이미지의 민감도는 0.71였고, 특이도는 0.75였다.

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공초점 원리를 이용한 표면 현상 측정 (Surface measurement using Confocal principle)

  • 송대호;유원제;강영준;김경석
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 추계학술대회 논문집
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    • pp.51-54
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    • 2000
  • The traditional surface measuring method using confocal principle requires much time to measure an object surface since it is a scanning tool. In this paper, the upgraded confocal microscope is introduced. It is also a scanning tool but it requires 2D-scanning while the traditional one requires 3D-scanning. It means the time for measuring is considerably reduced. In addition, the measuring system is configured to increase the efficiency of beam. He-Ne laser whose frequency is 632.8nm is used for the laser source. An example of measuring result through the upgraded confocal microscope is showed.

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공초점 레이저 주사 현미경을 이용한 혈구 유동가시화 및 세포공핍층 측정에 관한 연구 (Flow Visualization of Blood Cell and Detection of Cell Depleted Layer Using a Confocal Laser Scanning Microscope)

  • 임수희;김위한;이호;이춘영;박철우
    • 한국가시화정보학회지
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    • 제8권1호
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    • pp.46-52
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    • 2010
  • In the present study, we employed the confocal laser scanning microscopy (CLSM) system to visualize the blood flow field with $1{\times}1{\mu}m^2$ spatial resolution. Based on the confocal microscopic image of red blood cells (RBCs), we performed the velocity vector field measurement and evaluated characteristics of cell migration from the cell depleted layer thickness calculation. The rat and mouse's blood were supplied into a micro glass tubes in vitro. The line scanning rate of confocal microscopy was 15 kHz for a $500{\times}500$ pixels image. As a result, the red blood cell itself can be used as a tracer directly without any kind of invasive tracer particle to get the velocity vector field of blood flow by performing particle image velocimetry (PIV) technique.

펄스 레이저와 CFPI를 이용한 이종금속 접촉부의 이물질 측정에 관한 연구 (A Study on the Measurement of Foreign Material in Dissimilar Metal Contact Using Pulse Laser and Confocal Fabry-Perot Interferometer)

  • 홍경민;강영준;박락규
    • 비파괴검사학회지
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    • 제33권2호
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    • pp.160-164
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    • 2013
  • 레이저 초음파검사 장치는 레이저 빔을 이용하여 초음파 신호를 발생시키고 측정하는 비접촉식 결함 검사 장치이다. 이 장치는 펄스 레이저 빔을 이용하여 광대역 주파수 범위를 갖는 초음파 신호를 발생시키고 작은 점으로 집속된 레이저 빔을 이용하여 초음파 신호를 측정하므로 우수한 측정 분해능을 제공한다. 본 연구에서는 이종금속 접촉부식(갈바닉 부식) 현상을 레이저를 이용한 비파괴, 비접촉 방법으로 측정하였다. 부식된 부분에 이물질이 혼합되는 경우를 가정하고, 레이저 초음파 실험을 진행하였다. 시편의 뒷면에서 펄스 레이저로 초음파를 발생시키고, 같은 위치의 앞면에서 CW 레이저와 CFPI를 이용하여 초음파 신호를 획득하였다. 이물질이 존재하는 부분의 초음파 신호 특성을 분석하여 이물질의 위치 및 크기를 측정하였다.

Preliminary Study of the Measurement of Foreign Material in Galvanic Corrosion Using Laser Ultrasonic

  • Hong, Kyung Min;Kang, Young June;Park, Nak Kyu;Choi, In Young
    • Journal of the Optical Society of Korea
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    • 제17권4호
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    • pp.323-327
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    • 2013
  • A laser ultrasonic inspection system has the advantage of nondestructive testing. It is a non-contact mode using a laser interferometer to measure the vertical displacement of the surface of a material caused by the propagation of ultrasonic signals with the remote ultrasonic generated by laser. After raising the ultrasonic signal with a broadband frequency range using a pulsed laser beam, the laser beam is focused to a small point to measure the ultrasonic signal because it provides an excellent measurement resolution. In this paper, foreign materials are measured by a non-destructive and non-contact method using the laser ultrasonic inspection system. Mixed foreign material on the corroded part is assumed and the laser ultrasonic experiment is conducted. An ultrasonic wave is generated by pulse laser from the back of the specimen and an ultrasonic signal is acquired from the same location of the front side using continuous wave laser and Confocal Fabry-Perot Interferometer (CFPI). The characteristic of the ultrasonic signal of existing foreign material is analyzed and the location and size of foreign material is measured.

Fiber Optics for Multilayered Optical Memory

  • Kawata, Yoshimasa;Tsuji, Masatoshi;Inami, Wataru
    • 정보저장시스템학회논문집
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    • 제7권2호
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    • pp.53-59
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    • 2011
  • We have developed a compact and high-power mode-locked fiber laser for multilayered optical memory. Fiber lasers have the potential to be compact and stable light sources that can replace bulk solid-state lasers. To generate high-power pulses, we used stretched-pulse mode locking. The average power and pulse width of the output pulse from the fiber laser that we developed were 109 mW and 2.1 ps, respectively. The dispersion of the output pulse was compensated with an external single-mode fiber of 2.5 m length. The pulse was compressed from 2.1 ps to 93 fs by dispersion compensation. The fiber laser we have developed is possible to use as a light source of multilayered optical memory. We also present a fiber confocal microscope as an alignment-free readout system of multilayered optical memories. The fiber confocal microscope does not require fine pinhole position alignment because the fiber core is used as the point light source and the pinhole, and both of which are always located at the conjugated point. The configuration reduces the required accuracy of pinhole position alignment. With these techniques we can present an all-fiber recording and readout system for multilayered memories.