• 제목/요약/키워드: large diffusion

검색결과 673건 처리시간 0.025초

Thermal Stability of Self-formed Barrier Stability Using Cu-V Thin Films

  • 한동석;문대용;김웅선;박종완
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.188-188
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    • 2011
  • Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

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Radioactive gas diffusion simulation and inhaled effective dose evaluation during nuclear decommissioning

  • Yang, Li-qun;Liu, Yong-kuo;Peng, Min-jun;Ayodeji, Abiodun;Chen, Zhi-tao;Long, Ze-yu
    • Nuclear Engineering and Technology
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    • 제54권1호
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    • pp.293-300
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    • 2022
  • During the decommissioning of the nuclear facilities, the radioactive gases in pressure vessels may leak due to the demolition operations. The decommissioning site has large space, slow air circulation, and many large nuclear facilities, which increase the difficulty of workers' inhalation exposure assessment. In order to dynamically evaluate the activity distribution of radionuclides and the committed effective dose from inhalation in nuclear decommissioning environment, an inhalation exposure assessment method based on the modified eddy-diffusion model and the inhaled dose conversion factor is proposed in this paper. The method takes into account the influence of building, facilities, exhaust ducts, etc. on the distribution of radioactive gases, and can evaluate the influence of radioactive gases diffusion on workers during the decommissioning of nuclear facilities.

Effect of anisotropic diffusion coefficient on the evolution of the interface void in copper metallization for integrated circuit

  • Choy, J.H.
    • 한국결정성장학회지
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    • 제14권2호
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    • pp.58-62
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    • 2004
  • The shape evolution of the interface void of copper metallization for intergrated circuits under electromigration stress is modeled. A 2-dimensional finite-difference numerical method is employed for computing time evolution of the void shape driven by surface diffusion, and the electrostatic problem is solved by boundary element method. When the diffusion coefficient is isotropic, the numerical results agree well with the known case of wedge-shape void evolution. The numerical results for the anisotropic diffusion coefficient show that the initially circular void evolves to become a fatal slitlike shape when the electron wind force is large, while the shape becomes non-fatal and circular as the electron wind force decreases. The results indicate that the open circuit failure caused by slit-like void shape is far less probable to be observed for copper metallization under a normal electromigration stress condition.

발전용 대형 가스터빈 축류압축기 설계 특성 분석 (Analysis of Axial Compressor Design Characteristics in Large Class Gas Turbine for Power Generation)

  • 이성룡;송재욱;김수용
    • 한국유체기계학회 논문집
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    • 제15권1호
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    • pp.64-69
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    • 2012
  • Currently axial flow compressor is used primarily in a large power generation gas turbine. In this paper,the main factors to be considered when designing a axial flow compressor were compared to those of a small power generation gas turbine(DGT-5). The main design parameters was examined in the aspect ratio, solidity, as well as reaction, diffusion factor, incidence angle, etc. The results in case of a small compressor are showed a regular pattern but there were not found any specific design patterns for a large class compressor.

Bass Diffusion 모델을 활용한 스마트폰 시장의 성장 규모 예측: 몽골 사례 (Forecasting the Growth of Smartphone Market in Mongolia Using Bass Diffusion Model)

  • ;신광섭
    • 한국빅데이터학회지
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    • 제7권1호
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    • pp.193-212
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    • 2022
  • 1969년에 처음 고안되어 확산에 대한 마케팅 연구를 이끈 Bass Diffusion Model은 일반적으로 마케팅 연구 및 경영 과학에서 가장 성공적인 모델 중 하나다. 본 연구는 휴대전화 가입 확산을 토대로 Bass 확산 모델의 사용을 설명하며 Bass 확산 모델을 3대 선진국 시장인 한국, 일본, 중국과 신흥시장인 베트남, 태국, 카자흐스탄, 몽골에 적용했다. 실험에서는 비선형 최소자승법을 사용하여 Bass확산 모델의 매개변수를 추정하였고 휴대전화 가입의 확산은 모든 경우에 S 곡선을 따른다. m, p 및 q 매개변수를 획득한 후 국가를 세 그룹으로 그룹화하기 위해 k-평균 클러스터 분석을 사용했으며 국가를 클러스터링함으로써 확산 속도와 패턴이 유사하며 신흥시장이 있는 국가가 선진국의 발자취를 따를 수 있음을 제안한다. 연구의 목적은 시장 성숙도의 시기와 규모를 예측하고 데이터가 Bass 모델의 혁신의 일반적인 확산 곡선을 따르는지 여부를 판단하는 것이다.

Outcomes of Mechanical Thrombectomy in Patients with Large Diffusion-Weighted Imaging Lesions

  • Cho, Yong-Hwan;Choi, Jae Hyung
    • Journal of Korean Neurosurgical Society
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    • 제65권1호
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    • pp.22-29
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    • 2022
  • Objective : Despite many advancements in endovascular treatment, the benefits of mechanical thrombectomy (MT) in patients with large infarctions remain uncertain due to hemorrhagic complications. Therefore, we aimed to investigate the efficacy and safety of recanalization via MT within 6 hours after stroke in patients with large cerebral infarction volumes (>70 mL). Methods : We retrospectively reviewed the medical data of 30 patients with large lesions on initial diffusion-weighted imaging (>70 mL) who underwent MT at our institution within 6 hours after stroke onset. Baseline data, recanalization rate, and 3-month clinical outcomes were analyzed. Successful recanalization was defined as a modified treatment in cerebral ischemia score of 2b or 3. Results : The recanalization rate was 63.3%, and symptomatic intracerebral hemorrhage occurred in six patients (20%). The proportion of patients with modified Rankin Scale (mRS) scores of 0-3 was significantly higher in the recanalization group than in the non-recanalization group (47.4% vs. 9.1%, p=0.049). The mortality rate was higher in the non-recanalization group, this difference was not significant (15.8% vs. 36.4%, p=0.372). In the analysis of 3-month clinical outcomes, only successful recanalization was significantly associated with mRS scores of 0-3 (90% vs. 50%, p=0.049). The odds ratio of recanalization for favorable outcomes (mRS 0-3) was 9.00 (95% confidence interval, 0.95-84.90; p=0.055). Conclusion : Despite the risk of symptomatic intracerebral hemorrhage, successful recanalization via MT 6 hours after stroke may improve clinical outcomes in patients with large vessel occlusion.

Prediction of chloride diffusion coefficient of concrete under flexural cyclic load

  • Tran, Van Mien;Stitmannaithum, Boonchai;Nawa, Toyoharu
    • Computers and Concrete
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    • 제8권3호
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    • pp.343-355
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    • 2011
  • This paper presented the model to predict the chloride diffusion coefficient in tension zone of plain concrete under flexural cyclic load. The fictitious crack based analytical model was used together with the stress degradation law in cracked zone to predict crack growth of plain concrete beams under flexural cyclic load. Then, under cyclic load, the chloride diffusion, in the steady state and one dimensional regime, through the tension zone of the plain concrete beam, in which microcracks were formed by a large number of cycles, was simulated with assumptions of continuously straight crack and uniform-size crack. The numerical analysis in terms of the chloride diffusion coefficient, $D_{tot}$, normalized $D_{tot}$, crack width and crack length was issued as a function of the load cycle, N, and load level, SR. The nonlinear model as regarding with the chloride diffusion coefficient in tension zone and the load level was proposed. According to this model, the chloride diffusion increases with increasing load level. The predictions using model fit well with experimental data when we adopted suitable crack density and tortuosity parameter.

향상된 성능을 갖는 Directed Diffusion 알고리즘의 개발 (Development of Directed Diffusion Algorithm with Enhanced Performance)

  • 김성호;김시환
    • 한국지능시스템학회논문지
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    • 제15권7호
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    • pp.858-863
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    • 2005
  • 센서 네트워크는 다수의 센서 노드들이 싱크노드와 데이터 중심(Data centric) 기반으로 통신을 하게 되며 이때 사용되는 라우팅 알고리즘 중 하나가 Directed Diffusion 알고리즘이다. Directed Diffusion은 싱크노드의 named data 질의에 기반을 둔 라우팅 프로토콜로 다수의 소스 노드와 다수의 싱크 노드의 상황에서도 효율적으로 동작한다는 점과 각각의 질의에 의한 라우팅 경로 상에서 데이터 융합(aggregation) 과 caching을 수행할 수 있다는 장점을 갖는다. 그러나 강화된 gradient 경로를 얻기 위해 요구되는 부담이 크다는 단점을 갖는다. 따라서 본 연구에서는 interest 패킷에 hop-count를 도입함으로써 gradient가 과다하게 설정되는 것을 제한함으로써 에너지 사용 효율을 높일 수 있는 개선된 Directed Diffusion 알고리즘을 제시한다. 또한 시뮬레이션을 통해 제안된 알고리즘의 유용성을 확인하고자 한다.

Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization(II); Effect of deposition conditions on diffusion barrier behavior of molybdenum nitride

  • Lee, Jeong-Joub;Lee, You-Kee;Jeon, Seok-Ryong;Kim, dong-Joon
    • Journal of Korean Vacuum Science & Technology
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    • 제1권1호
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    • pp.30-37
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    • 1997
  • Interactions of Cu films with Si substrates separated by thin layers of molybdenum and molybdenum nitride were investigated in the viewpoint of diffusion barrier to copper. the diffusion barrier behavior of the layers was studied as functions of deposition and annealing conditions by cross-sectional transmission electron microscopy and Nomarski microscopy. the layers deposited at $N_2$ gas ratios of 0.4 and 0.5 exhibited good diffusion barrier behaviors up to $700^{\circ}C$, mainly due to the phase transformation of molybdenum to $\gamma$-Mo$_2$N phase. The increase in the N gas ratio in deposition elevates the lower limit of barrier failure temperature. Futhermore, amorphous molybdenum nitride films deposited at 20$0^{\circ}C$ and 30$0^{\circ}C$ did not fail, while the crystalline $\gamma$-Mo$_2$N films deposited at 40$0^{\circ}C$ and 50$0^{\circ}C$ showed signs of interlayer interactions between Cu and Si after annealing at 75$0^{\circ}C$ for 30 minutes. Therefore, the amorphous nature of the molybdenum nitride layer enhanced its ability to reduce Cu diffusion and its stability as a diffusion barrier at elevated temperatures.