• 제목/요약/키워드: junction processes

검색결과 96건 처리시간 0.031초

이온주입 공정을 이용한 4H-SiC p-n diode에 관한 시뮬레이션 연구 (Simulation study of ion-implanted 4H-SiC p-n diodes)

  • 이재상;방욱;김상철;김남균;구상모
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.131-131
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    • 2008
  • Silicon carbide (SiC) has attracted significant attention for high frequency, high temperature and high power devices due to its superior properties such as the large band gap, high breakdown electric field, high saturation velocity and high thermal conductivity. We performed Al ion implantation processes on n-type 4H-SiC substrate using a SILVACO ATHENA numerical simulator. The ion implantation model used a Monte-Carlo method. We studied the effect of channeling by Al implantation simulation in both 0 off-axis and 8 off-axis n-type 4H-SiC substrate. We have investigated the Al distribution in 4H-SiC through the variation of the implantation energies and the corresponding ratio of the doses. The implantation energies controlled 40, 60, 80, 100 and 120 keV and the implantation doses varied from $2\times10^{14}$ to $1\times10^{15}cm^{-2}$. In the simulation results, the Al ion distribution was deeper as increasing implantation energy and the doping level increased as increasing implantation doses. After the post-implantation annealing, the electrical properties of Al-implanted p-n junction diode were investigated by SILV ACO ATLAS numerical simulator.

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Implant Anneal Process for Activating Ion Implanted Regions in SiC Epitaxial Layers

  • Saddow, S.E.;Kumer, V.;Isaacs-Smith, T.;Williams, J.;Hsieh, A.J.;Graves, M.;Wolan, J.T.
    • Transactions on Electrical and Electronic Materials
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    • 제1권4호
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    • pp.1-6
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    • 2000
  • The mechanical strength of silicon carbide dose nor permit the use of diffusion as a means to achieve selective doping as required by most electronic devices. While epitaxial layers may be doped during growth, ion implantation is needed to define such regions as drain and source wells, junction isolation regions, and so on. Ion activation without an annealing cap results in serious crystal damage as these activation processes must be carried out at temperatures on the order of 1600$^{\circ}C$. Ion implanted silicon carbide that is annealed in either a vacuum or argon environment usually results in a surface morphology that is highly irregular due to the out diffusion of Si atoms. We have developed and report a successful process of using silicon overpressure, provided by silane in a CAD reactor during the anneal, to prevent the destruction of the silicon carbide surface, This process has proved to be robust and has resulted in ion activation at a annealing temperature of 1600$^{\circ}C$ without degradation of the crystal surface as determined by AFM and RBS. In addition XPS was used to look at the surface and near surface chemical states for annealing temperatures of up to 1700$^{\circ}C$. The surface and near surface regions to approximately 6 nm in depth was observed to contain no free silicon or other impurities thus indicating that the process developed results in an atomically clean SiC surface and near surface region within the detection limits of the instrument(${\pm}$1 at %).

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Microarray Analysis of Oxygen-Glucose-Deprivation Induced Gene Expression in Cultured Astrocytes

  • Joo, Dae-Hyun;Han, Hyung-Soo;Park, Jae-Sik
    • The Korean Journal of Physiology and Pharmacology
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    • 제10권5호
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    • pp.263-271
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    • 2006
  • Since astrocytes were shown to play a central role in maintaining neuronal viability both under normal conditions and during stress such as ischemia, studies of the astrocytic response to stress are essential to understand many types of brain pathology. The micro array system permitted screening of large numbers of genes in biological or pathological processes. Therefore, the gene expression patterns in the in vitro model of astrocytes following exposure to oxygen-glucose deprivation (OGD) were evaluated by using the micro array analysis. Primary astrocytic cultures were prepared from postnatal Swiss Webster mice. The cells were exposed to OGD for 4 hrs at $37^{\circ}C$ prior to cell harvesting. From the cultured cells, we isolated mRNA, synthesized cDNA, converted to biotinylated cRNA and then reacted with GeneChips. The data were normalized and analyzed using dChip and GenMAPP tools. After 4 hrs exposure to OGD, 4 genes were increased more than 2 folds and 51 genes were decreased more than 2 folds compared with the control condition. The data suggest that the OGD has general suppressive effect on the gene expression with the exception of some genes which are related with ischemic cell death directly or indirectly. These genes are mainly involved in apoptotic and protein translation pathways and gap junction component. These results suggest that microarray analysis of gene expression may be useful for screening novel molecular mediators of astrocyte response to ischemic injury and making profound understanding of the cellular mechanisms as a whole. Such a screening technique should provide insights into the molecular basis of brain disorders and help to identify potential targets for therapy.

전기방사법과 이원화 열처리 공정을 통한 은 나노섬유의 합성 및 투명전극으로의 응용 (Synthesis of Silver Nanofibers Via an Electrospinning Process and Two-Step Sequential Thermal Treatment and Their Application to Transparent Conductive Electrodes)

  • 이영인;좌용호
    • 한국재료학회지
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    • 제22권10호
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    • pp.562-568
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    • 2012
  • Metal nanowires can be coated on various substrates to create transparent conducting films that can potentially replace the dominant transparent conductor, indium tin oxide, in displays, solar cells, organic light-emitting diodes, and electrochromic windows. One issue with these metal nanowire based transparent conductive films is that the resistance between the nanowires is still high because of their low aspect ratio. Here, we demonstrate high-performance transparent conductive films with silver nanofiber networks synthesized by a low-cost and scalable electrospinning process followed by two-step sequential thermal treatments. First, the PVP/$AgNO_3$ precursor nanofibers, which have an average diameter of 208 nm and are several thousands of micrometers in length, were synthesized by the electrospinning process. The thermal behavior and the phase and morphology evolution in the thermal treatment processes were systematically investigated to determine the thermal treatment atmosphere and temperature. PVP/$AgNO_3$ nanofibers were transformed stepwise into PVP/Ag and Ag nanofibers by two-step sequential thermal treatments (i.e., $150^{\circ}C$ in $H_2$ for 0.5 h and $300^{\circ}C$ in Ar for 3 h); however, the fibrous shape was perfectly maintained. The silver nanofibers have ultrahigh aspect ratios of up to 10000 and a small average diameter of 142 nm; they also have fused crossing points with ultra-low junction resistances, which result in high transmittance at low sheet resistance.

운전 중 고전력 케이블의 절연저항 데이터의 취득과 통계적 처리 방법 (Data Acquisition and Statistical Processing of Insulation Resistance for High-Power Cables in Operation)

  • 박성희;엄기홍
    • 한국인터넷방송통신학회논문지
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    • 제18권6호
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    • pp.181-186
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    • 2018
  • 산업화의 추세에 따라 수요가 급증하고 있는 고전력을 생산하기 위하여 시설장비 및 부하의 대용량화가 수반되고 있다. 전기설비의 규모는 점차 복잡해 지고, 대규모화 됨으로써 고도 정보화 사회로의 발전에 크게 기여하고 있다. 그러나, 발전 설비에서 불의의 사고가 발생하여 전기의 생산이 중단된다면, 전기에 의존하여 작동 중인 수 많은 장비가 지장을 받게되고, 산업사회에 막대한 경제적 손실 및 장애를 초래하게 된다. 사고가 발생한 발전설비를 복구하기 위해서는 많은 시간과 비용이 소요되어 국가 산업 활동에 막대한 경제적 피해를 끼치게 된다. 사고를 미연에 방지하기 위하여 케이블의 동작 상태를 정기적으로 감시 확인하여야 한다. 우리는 사고가 가장 빈번하게 발생하는 접속부에 대해 안정적인 사용을 위한 진단의 정확성과 신뢰성을 향상시키기 위한 연구를 하였다. 이 논문에서 데이터 취득을 하고, 통계적 처리를 하기 위한 방법을 제시한다.

규조류 Skeletonema pseudocostatum Medlin (Thalassiosirales, Bacillariohyta)의 형태적 특징과 분자계통학적 위치 (Morpho-molecular characterization of diatom Skeletonema pseudocostatum(Thalassiosirales, Bacillariophyta) from the Korean coast)

  • 한경하;이준;박준상;윤주연;김현정;곽경윤;오석진;신현호
    • 환경생물
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    • 제38권1호
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    • pp.21-29
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    • 2020
  • Skeletonema pseudocostatum의 세포는 규산질 성분의 돌기에 의한 사슬 형태로, 길이는 6~17.3 ㎛였고, 엽록체는 세포 당 1~2개를 포함하고 있었다. 주사전자현미경 관찰결과 Skeletonema 종을 구분할 수 있는 가장자리 받침돌기끝(terminal fultoportula process)은 끝이 갈라지거나, 갈고리 모양이었고, 길이가 1.67±0.5 ㎛이고, 개각의 가장자리에 위치해 있으며, 개수는 8.10±1.1개로 개각의 크기에 따라 다양하게 나타났다. 말단세포 입술돌기(terminal rimoportula process)는 두꺼운 원통형의 나팔관 모양으로, 개각의 중앙 근처에 위치하였고, 길이는 1.1±0.6 ㎛였으며, 개수는 1개였다. 연결세포 받침돌기(intercalary fultoportula process)는 대부분 1 : 1 결합으로 서로 맞물려 있는 형태였고, 1 : 2 결합도 종종 발견되었다. 계통분석 결과는 형태적 특징이 유사한 종 간의 유전학적 거리가 가깝다는 것을 나타냈고, 지리적 기원이 다른 동일 종의 경우, 유전적 차이를 보이지 않았다. 이는 S. pseudocostatum은 지리적 위치와 상관없이 유전적 차이가 나타나지 않는 단일계통(monophyly)이라는 것을 의미한다.

Molecular Conductance Switching Processes through Single Ruthenium Complex Molecules in Self-Assembled Monolayers

  • 서소현;이정현;방경숙;이효영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.27-27
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    • 2011
  • For the design of real applicable molecular devices, current-voltage properties through molecular nanostructures such as metal-molecule-metal junctions (molecular junctions) have been studied extensively. In thiolate monolayers on the gold electrode, the chemical bonding of sulfur to gold and the van der Waals interactions between the alkyl chains of neighboring molecules are important factors in the formation of well-defined monolayers and in the control of the electron transport rate. Charge transport through the molecular junctions depends significantly on the energy levels of molecules relative to the Fermi levels of the contacts and the electronic structure of the molecule. It is important to understand the interfacial electron transport in accordance with the increased film thickness of alkyl chains that are known as an insulating layer, but are required for molecular device fabrication. Thiol-tethered RuII terpyridine complexes were synthesized for a voltage-driven molecular switch and used to understand the switch-on mechanism of the molecular switches of single metal complexes in the solid-state molecular junction in a vacuum. Electrochemical voltammetry and current-voltage (I-V) characteristics are measured to elucidate electron transport processes in the bistable conducting states of single molecular junctions of a molecular switch, Ru(II) terpyridine complexes. (1) On the basis of the Ru-centered electrochemical reaction data, the electron transport rate increases in the mixed self-assembled monolayer (SAM) of Ru(II) terpyridine complexes, indicating strong electronic coupling between the redox center and the substrate, along the molecules. (2) In a low-conducting state before switch-on, I-V characteristics are fitted to a direct tunneling model, and the estimated tunneling decay constant across the Ru(II) terpyridine complex is found to be smaller than that of alkanethiol. (3) The threshold voltages for the switch-on from low- to high-conducting states are identical, corresponding to the electron affinity of the molecules. (4) A high-conducting state after switch-on remains in the reverse voltage sweep, and a linear relationship of the current to the voltage is obtained. These results reveal electron transport paths via the redox centers of the Ru(II) terpyridine complexes, a molecular switch.

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흰쥐 수지동맥의 미세구조에 관한 연구 (Eine Structure of Digital Arteries in Rat)

  • 김백윤;신근남
    • Applied Microscopy
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    • 제29권1호
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    • pp.83-94
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    • 1999
  • 미세혈관 수술의 발달로 수지동맥의 재접합술이 성행함에 따라 혈관벽의 구조에 관한 연구들이 활발하지만 수지의 미세동맥과 모세혈관에 관한 연구는 드물다. 이에 저자는 흰쥐 수지의 충양근 안에 있는 미세동맥과 모세혈관의 구조를 전자현미경으로 관찰하여 보고하고자 한다. 1. 흰쥐 충양근 내의 미세동맥 (small arterioles)은 그 직경이 $12\sim20{\mu}m$로 중막이 한 층의 평활근세포로 구성된 종말소동맥 (terminal arteriole) 형태였는데 인체의 종말소동맥$(30\sim35{\mu}m)$에 비해 직경이 작았으며, 모세혈관은 직경이 $5\sim8{\mu}m$로 비슷하였다. 2. 모든 미세동맥 및 모세혈관의 내막을 구성하는 내피세포는 연속형 (continuous type)이었고, 따라서 전체 세포질내에 포음소포(pinocytic vesicles)가 많이 관찰되었다. 3. 모세혈관 주위에서 자주 혈관주위세포(pericytes)가 관찰되었는데 철관주위세포의 긴 들기가 내피세포의 일부를 싸는 경우도 많았으며 이들은 기저판에 의해 둘러싸여 있었다. 4. 내피세포들 사이에는 여러 가지 형태의 접촉이 있었으나 특히 폐쇄띠 (tight junction)를 가장 많이 관찰할 수 있었다. 미세동맥의 내피하층은 기저판 아래에서 매우 불규칙한 양상으로 나타났는데 곳곳에 내피세포와 중막을 구성하는 평활근세포의 막이 꽉 붙어 관찰되었다. 5. 미세동맥의 중막을 구성하는 한 층의 평활근세포의 세포질은 많은 filaments가 있어 균질성으로 보이는 균질성 영역 (homogeneous area)과 mitochondria, 조면내형질망, 골지복합체, polyribosome 등이 관찰되는 핵 주위의 비균질성 영역 (non-homogeneous area)으로 구분되었다. 6. 미세동맥의 외막은 섬유모세포의 아주 가느다란 돌기들로 형성되어 있었으며 군데군데 교원섬유들이 관찰되었다.

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고전압 전력반도체 소자 개발을 위한 단위공정에서 식각공정과 이온주입공정의 영향 분석 (Analysis of the Effect of the Etching Process and Ion Injection Process in the Unit Process for the Development of High Voltage Power Semiconductor Devices)

  • 최규철;김경범;김봉환;김종민;장상목
    • 청정기술
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    • 제29권4호
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    • pp.255-261
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    • 2023
  • 파워반도체는 전력의 변환, 변압, 분배 및 전력제어 등을 감당하는데 사용되는 반도체이다. 최근 세계적으로 고전압 파워반도체의 수요는 다양한 산업분야에 걸쳐 증가하고 있는 추세이며 해당 산업에서는 고전압 IGBT 부품의 최적화 연구가 절실한 상황이다. 고전압 IGBT개발을 위해서 wafer의 저항값 설정과 주요 단위공정의 최적화가 완성칩의 전기적특성에 큰 변수가 되며 높은 항복전압(breakdown voltage) 지지를 위한 공정 및 최적화 기술 확보가 중요하다. 식각공정은 포토리소그래피공정에서 마스크회로의 패턴을 wafer에 옮기고, 감광막의 하부에 있는 불필요한부분을 제거하는 공정이고, 이온주입공정은 반도체의 제조공정 중 열확산기술과 더불어 웨이퍼 기판내부로 불순물을 주입하여 일정한 전도성을 갖게 하는 과정이다. 본 연구에서는 IGBT의 3.3 kV 항복전압을 지지하는 ring 구조형성의 중요한 공정인 field ring 식각실험에서 건식식각과 습식식각을 조절해 4가지 조건으로 나누어 분석하고 항복전압확보를 위한 안정적인 바디junction 깊이형성을 최적화하기 위하여 TEG 설계를 기초로 field ring 이온주입공정을 4가지 조건으로 나누어 분석한 결과 식각공정에서 습식 식각 1스텝 방식이 공정 및 작업 효율성 측면에서 유리하며 링패턴 이온주입조건은 도핑농도 9.0E13과 에너지 120 keV로, p-이온주입 조건은 도핑농도 6.5E13과 에너지 80 keV로, p+ 이온주입 조건은 도핑농도 3.0E15와 에너지 160 keV로 최적화할 수 있었다.

5637 인체 방광암세포의 이동성과 침윤성에 미치는 황흑산(黃黑散)의 영향 (Inhibition of Migration and Invasion of Human Bladder Cancer 5637 cells by Hwangheuk-san)

  • 심원석;김민서;박상은;최영현;홍상훈
    • 대한한방내과학회지
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    • 제37권1호
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    • pp.65-76
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    • 2016
  • Objectives: The purpose of this study was to identify the inhibitory effects of Hwangheuk-san (HHS), a Korean multi-herb formula comprising four medicinal herbs, on cell migration and invasion, two critical cellular processes that are often deregulated during metastasis, using the human bladder cancer 5637 cell line.Methods: Cell viability, motility, and invasion were assessed by 3-(4,5-dimethyl-2 thiazolyl)-2,5-diphnyl-2H-tetrazolium bromide (MTT), wound healing migration, and Transwell assays, respectively. Gene expression was detected by Western blot analysis. In addition, the activities of matrix metalloproteinases (MMPs) and the values for transepithelial electrical resistance (TER) were analyzed using a Gelatinase Activity Assay Kit and an Epithelial Tissue Voltohmmeter, respectively.Results: Our data indicated that within the concentration range that was not cytotoxic, HHS effectively inhibited the cell motility and invasiveness of 5637 cells. HHS markedly decreased the expression and activity of MMP-2 and MMP-9, which was associated with unregulation of tissue inhibitors of metalloproteinase (TIMP)-1 and TIMP-2. Further investigation revealed that phosphorylation of phosphatidylinositol 3-kinase (PI3K) and AKT was decreased in HHS-treated 5637 cells, and a PI3K/AKT inhibitor synergistically reduced the inhibition of migration and invasion and also inactivated MMP-2 and MMP-9. Moreover, HHS increased the tightening of tight junctions (TJs), which was demonstrated by an increase in the TER, and reduced the expression the levels of claudin family members (claudin-3 and -4), which are major components involved in the tightening of TJs.Conclusions: The present findings demonstrated that HHS attenuated the migration and invasion of bladder cancer 5637 cells by modulating the activity of the PI3K/Akt signaling pathway and also through TJ tightening.