Etch Mechanism of $Y_2O_3$ Thin Films in High Density Plasma
(고밀도 플라즈마에 의한 $Y_2O_3$ 박막의 식각 메커니즘 연구)
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- Proceedings of the Korean Institute of Navigation and Port Research Conference
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- 2000.11a
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- pp.25.1-28
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- 2000