• 공업화학
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• 제24권5호
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• pp.443-455
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• 2013

혼합되지 않는 두 용액 사이의 계면(interface between two immiscible electrolyte solutions, ITIES)에서의 전하 이동 반응에 대한 전기화학적 연구는 이온 검출용 센서, 바이오센서, 생체막 모델링, 약물 전달 반응, 상전이 촉매반응, 연료 생성, 태양에너지 전환 등을 포함한 다양한 연구 분야에 적용이 가능하기 때문에 크게 주목받고 있다. 특히 ITIES에서의 이온 전이 반응을 이용하여 이온물질 및 생물질 등을 검출할 수 있는 센서로 개발하기 위해 불안정한 ITIES의 한 쪽 액체층을 젤(gel)화하여 안정화하고, 마이크로 계면 형성을 통해 전압강하를 최소화 시키는 등의 연구가 활발하게 이루어졌다. 본 총설에서는 ITIES 계면에서의 이온 전이 반응을 이용하여 개발된 다양한 센서의 원리와 응용 및 발전 가능성에 대해 다루고자 한다. ITIES 계면을 (i) 보편적인 액체/액체 계면형, (ii) 마이크로피펫 팁형, (iii) 고분자 박막에 형성된 단일 마이크로홀 또는 마이크로홀 어래이형 및 (iv) 실리콘 기판에 제작된 마이크로홀 어래이형으로 분류하고, 이들 계면에서의 직접적인 이온 전이 반응과 보조 이온 전이 반응을 활용하여 수질 환경 오염의 원인이 되는 이온 및 농약 성분을 선택적으로 검출할 수 있는 이온 선택성 센서와 생물질을 분석할 수 있는 바이오센서 개발 연구에 대해 초점을 두고 소개하려 한다.

• 한국표면공학회지
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• 제34권5호
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• pp.516-521
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• 2001

Dry etching of Si wafer and $SiO_2$ layers was performed using He/Cl$_2$ mixture plasma by diode-type reactive ion etcher (RIE) system. For Si etching, the Cl molecules react with the Si molecules on the surface and become chemically stable, indicating that the reactants need energetic ion bombardment. During the ion assisted desorption, energetic ions would damage the photoresist (PR) and produce the bad etch Si-profile. Moreover, we have examined the characteristics of the Cl-Si reaction system, and developed the new fabrication procedures with a $Cl_2$/He mixture for Si and $SiO_2$-etching. The developed novel fabrication procedure allows the RIE to be unexpensive and useful a Si deep etching system. Since the etch rate was proved to increase linearly with fHe and the selectivity of Si to $SiO_2$ etch rate was observed to be inversely proportional to fHe.

• Transactions on Electrical and Electronic Materials
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• 제11권3호
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• pp.116-119
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• 2010

The etching characteristics of zinc oxide (ZnO) were investigated, including the etch rate and the selectivity of ZnO in a $Cl_2/BCl_3$/Ar plasma. It was found that the ZnO etch rate, the RF power, and the gas pressure showed non-monotonic behaviors with an increasing Cl2 fraction in the $Cl_2/BCl_3$/Ar plasma, a gas mixture of $Cl_2$(3 sccm)/$BCl_3$(16 sccm)/Ar (4 sccm) resulted in a maximum ZnO etch rate of 53 nm/min and a maximum etch selectivity of 0.89 for ZnO/$SiO_2$. We used atomic force microscopy to determine the roughness of the surface. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the plasmas. Due to the relatively low volatility of the by-products formed during etching with $Cl_2/BCl_3$/Ar plasma, ion bombardment and physical sputtering were required to obtain the high ZnO etch rate. The chemical states of the etched surfaces were investigated using X-ray photoelectron spectroscopy (XPS). This data suggested that the ZnO etch mechanism was due to ion enhanced chemical etching.

• Macromolecular Research
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• 제16권2호
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• pp.108-112
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• 2008

Matrix-assisted laser desorption/ionization mass spectrometry (MALDI-MS) analysis of nonpolar polymeric materials is affected by the sample preparation as well as the matrix and cationizing agent. This study examined the influence of silver salt types on the MALDI analysis of polybutadiene (PB). Silver trifluoroacetate (AgTFA), silver benzoate (AgBz), silver nitrate ($AgNO_3$), and silver p-toluenesulfonate (AgTS) were used as the silver salts to compare the MALDI mass spectra of PB. The mixture solution of PB and 2,5-dihydroxybenzoic acid (DHB), as a matrix dissolved in THF, was spotted on the sample plate and dried. A droplet of the aqueous silver salt solution was placed onto the mixture. The mass spectrum with AgBz showed the clear $[M+Ag]^+$ ion distribution of PB while the mass spectrum with AgTFA did not show $[M+Ag]^+$ ions but only silver cluster ions. The mass spectra with $AgNO_3$ and AgTS did not show a clear $[M+Ag]^+$ ion distribution. The difference in the formation of $[M+Ag]^+$ ions of PB depending on the silver salts was attributed to the silver cation transfer reaction between the silver salt and the matrix (DHB). The mass spectrum showed a clear $[M+Ag]^+$ ion distribution of PB when the conjugate acid of the silver salt was less acidic than the matrix.

• 대한화학회지
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• 제29권6호
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• pp.623-628
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• 1985

산성용매에서 몰리브덴-옥살산 결합의 고리열림이 일어난 다음 티오시안산과 반응하는 속도를 460nm에서 분광학적으로 측정하였다. 산성용매에서 몰리브덴-옥살산의 해리와 이 해리된 착물과 티오시안산의 반응속도를 티오시안산 및 수소이온농도에 따라 연구하였다. 몰티브덴에 결합된 옥살산리간드에 양성자첨가가 되고 이 양성자 첨가된 착물은 티오시안산이온과 반응을 빠르게 한다. 이들 결과에서부터 산성용매에서 옥살산리간드의 치환은 몰리브덴닐산소의 트란스에 결합된 산소의 결합이 끊어지는 과정과 관련되는 해리메카니즘에 의해서 설명할 수 있다.

• Progress in Superconductivity
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• 제8권2호
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• pp.175-180
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• 2007

High temperature superconductor $YBa_2Cu_3O_{7-x}$ (YBCO) films have been grown by in-situ electron beam evaporation on artificial metal tapes such as ion-beam assisted deposition (IBAD) and rolling assisted biaxially textured substrates (RABiTS). Deposition rate of the YBCO films is $10{\sim}100{\AA}/sec$. X-ray diffraction shows that the films are grown epitaxially but have inter-diffusion phases, like as $BaZrO_3\;or\;BaCeO_3$, at their interfaces between YBCO and yttrium-stabilized zirconia (YSZ) or $CeO_2$, respectively. Secondary ion mass spectroscopy depth profile of the films confirms diffused region between YBCO and the buffer layers, indicating that the growth temperature ($850{\sim}900^{\circ}C$) is high enough to cause diffusion of Zr and Ba. The films on both the substrates show four-fold symmetry of in-plane alignment but their width in the -scan is around $12{\sim}15^{\circ}$. Transmission electron microscopy shows an interesting interface layer of epitaxial CuO between YBCO and YSZ, of which growth origin may be related to liquid flukes of Ba-Cu-O. Resistivity vs temperature curves of the films on both substrates were measured. Resistivity at room temperature is between 300 and 500 cm, the extrapolated value of resistivity at 0 K is nearly zero, and superconducting transition temperature is $85{\sim}90K$. However, critical current density of the films is very low, ${\sim}10^3A/cm^2$. Cracking of the grains and high-growth-temperature induced reaction between YBCO and buffer layers are possible reasons for this low critical current density.

• 대한환경공학회지
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• 제37권1호
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• pp.60-68
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• 2015

폐활성슬러지의 감량화 및 혐기성소화 효율 향상을 위한 가용화 기술로 microwave (MW)에 대한 연구가 활발히 진행되고 있다. MW에 의한 가용화는 유전가열에 의해 가열적, 비가열적 효과 및 이온성 전도를 유도하여 매우 짧은 시간에 반응이 일어나므로 폐활성슬러지의 가용화에 효과적으로 적용될 수 있다. 본 연구에서는 폐활성슬러지 가용화에 대해 전도 가열대비 MW의 우수성을 평가하였고, 고출력 조건에서 수행된 기존 연구들과 달리 저출력 조건에서 MW의 효율 향상을 위해 강산인 $H_2SO_4$ 및 이온성 물질인 $CaCl_2$, NaCl을 촉매로 이용하였다. 전도 가열 대비 MW를 이용한 폐활성슬러지의 가용화 효율은 $50^{\circ}C$ 조건에서 6.2배, $100^{\circ}C$ 조건에서 1.4배 높게 나타났으며, 본 연구의 MW 저출력 조건에서 최대 COD 가용화율은 10.0%로 나타났다. 동일한 MW 출력 및 반응시간 조건에서 촉매물질인 $H_2SO_4$ 및 NaCl의 첨가를 통해 폐활성슬러지의 COD 가용화율이 18.1%, 12.7%로 증가하였으며, $CaCl_2$를 첨가하였을 경우에는 COD 가용화율이 10.7%로 MW의 효율에 향상에 효과가 없는 것으로 나타났다. 이는 가용화 효율을 향상시킬 것으로 예상된 $Ca^{2+}$가 슬러지 가용화에 따라 발생하는 ${PO_4}^{3-}$와 반응하여 침전물 형성에 소모되었기 때문으로 판단된다. 본 연구에서 MW 효율 향상을 위한 가장 적합한 촉매물질은 $H_2SO_4$인 것으로 나타났으며, 0.2 M의 $H_2SO_4$를 첨가한 MW 조건이 폐활성슬러지의 가용화에 가장 효과적인 것으로 나타났다.

• 한국항해항만학회:학술대회논문집
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• 한국항해항만학회 2000년도 추계학술대회논문집
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• pp.25.1-28
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• 2000

In this study, $Y_2O_3$ thin films were etched with inductively coupled plasma (ICP). The etch rate of $Y_2O_3$ , and the selectivity of $Y_2O_3$ to YMnO$_3$were investigated by varying $Cl_2$/($Cl_2$+Ar) gas mixing ratio. The maximum etch rate of $Y_2O_3$ , and the selectivity of $Y_2O_3$ to YMnO$_3$ were 302/min, and 2.4 at $Cl_2$/($Cl_2$+Ar) gas mixing ratio of 0.2 repetitively. In x-ray photoelectron spectroscopy (XPS) analysis, $Y_2O_3$ thin film was dominantly etched by Ar ion bombardment, and was assisted by chemical reaction of Cl radical. These results were confirmed by secondary ion mass spectroscopy(SIMS) analysis. YCl, and $YC_3$ existed at 126.03 a.m.u, and 192.3 a.m.u, respectively.

• 한국재료학회지
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• 제27권3호
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• pp.161-165
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• 2017

In this paper, synthesis of terephthalate intercalated Zn-Al: Layered double hydroxides (LDHs) was studied. We designed freestanding Zn-Al: carbonate LDH nanosheets for a facile exchange technique. The as-prepared Zn-Al carbonate LDHs were converted to terephthalate intercalated Zn-Al:LDHs by ion exchange method. Initially, Al-doped ZnO (AZO) thin films were deposited on p-Si (001) by facing target sputtering. For synthesis of free standing carbonate Zn-Al:LDH, we dipped the AZO thin film in naturally carbonated water for 3 hours. Further, Zn-Al: carbonate LDH nanosheets were immersed in terepthalic acid (TA) solution. The ion exchange phenomena in the terephthalate assisted Zn-Al:LDH were confirmed using FT-IR analysis. The crystal structure of terephthalate intercalated Zn-Al:LDH was investigated by XRD pattern analysis with different mole concentrations of TA solution and reaction times. The optimal conditions for intercalation of terephthalate from carbonated Zn-Al LDH were established using 0.3 M aqueous solution of TA for 24 hours.

• Journal of Electrochemical Science and Technology
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• 제2권3호
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• pp.157-162
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• 2011

We report a simple route for synthesizing multi-dimensional structured silicon anode materials from commercially available bulk silicon powders via metal-assisted chemical etching process. In the first step, silver catalyst was deposited onto the surface of bulk silicon via a galvanic displacement reaction. Next, the silver-decorated silicon particles were chemically etched in a mixture of hydrofluoric acid and hydrogen peroxide to make multi-dimensional silicon consisting of one-dimensional silicon nanowires and micro-scale silicon cores. As-synthesized silicon particles were coated with a carbon via thermal decomposition of acetylene gas. The carbon-coated multi-dimensional silicon anodes exhibited excellent electrochemical properties, including a high specific capacity (1800 mAh/g), a stable cycling retention (cycling retention of 89% after 20 cycles), and a high rate capability (71% at 3 C rate, compared to 0.1 C rate). This process is a simple and mass-productive (yield of 40-50%), thus opens up an effective route to make a high-performance silicon anode materials for lithiumion batteries.