• Title/Summary/Keyword: interferometer

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Design of PLC Triplexer Using Three Waveguide Interferometer

  • Choi, Jun-Seok;Oh, Jin-Kyong;Lee, Dong-Hwan;Lee, Hyung-Jong;Kim, Sang-Duk
    • Journal of the Optical Society of Korea
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    • v.12 no.3
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    • pp.162-165
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    • 2008
  • A novel planar lightwave circuit(PLC) triplexer using a three-waveguide interferometer(TWI) is proposed and examined using the transfer matrix and the beam propagation methods. The proposed triplexer consists of two three-waveguide couplers and three waveguides connecting the couplers. Simulation for the TWI triplexer shows the excess losses of 0.03 dB and 0.94 dB with the crosstalks of -22.3 dB and -14.5 dB in reception, respectively, for the wavelength of 1490- and 1550-nm, while showing the excess loss of 1.75 dB in transmission for the wavelength of 1310 nm. The proposed design shows compact feature as short as 11.5 mm for the refractive-index contrast of 0.45%.

Error Compensation in Heterodyne Laser Interferometer using Data Fusion Method (데이터 퓨전 기법을 이용한 헤테로다인 레이저 간섭계의 오차보정)

  • Heo, Gun-Haeng;Sung, Wook-Jin;Lee, Woo-Ram;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • 2007.10a
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    • pp.225-226
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    • 2007
  • In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted environmental error which is caused from refraction in the air. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on Data Fusion method which reduces the environmental error in the heterodyne laser interferometer. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

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Nonlinearity Error Compensation in Heterodyne Laser Interferometer using WLS Method (WLS를 이용한 헤테로다인 레이저 간섭계에서의 비선형 오차 보정)

  • Cha, Hyung-Seok;Lee, Woo-Ram;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • 2007.10a
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    • pp.271-272
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    • 2007
  • In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, called cross talks. This fact limits the usefulness of an laser interferometer. To compensate the error, we propose a WLS(weighted least square) algorithm, which will reduce nonlinearity error and make a better optimization in heterodyne laser interferometer.

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Wireless Optical Fiber Interferometer Arterial Pulse Wave Sensor System (무선 기반의 광섬유 간섭계형 맥파센서 시스템)

  • Park, Jaehee;Shin, Jong-Dug
    • Journal of Sensor Science and Technology
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    • v.22 no.6
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    • pp.439-443
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    • 2013
  • A wireless optical fiber interferometer arterial pulse wave sensor system is developed for remote sensing. The wireless optical fiber sensor system consists of Zigbee communication modules and an optical fiber interferometer arterial pulse wave sensor. The optical fiber arterial pulse wave sensor is an in-line Michelson interferometer enclosed with steel reinforcement in a heat-shrinkable tube. The Zigbee communication modules are composed of an ATmega128L microprocessor and a CC2420 Zigbee chip. The arterial pulse waves detected by the optical fiber sensor were transmitted and received via the Zigbee communication modules. The experimental results show that the wireless optical fiber sensor system can be used for monitoring the arterial pulse waves remotely.

Nano-scale high-accuracy displacement measurement using the Michelson laser interferometer controlled with a feedback circuit (되먹임 회로로 제어하는 Michelson 레이저 간섭계를 이용한 Nano-scale 미세변위 측정)

  • Ahn, Seong-Joon;Oh, Tae-Sik;Ahn, Seung-Joon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.8 no.5
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    • pp.1007-1012
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    • 2007
  • A novel Michelson interferometer controlled with a feedback circuit(MIFC) has been developed and its performance has been evaluated. This new interferometer can measure the displacement of the sample by directly reading the feedback bias applied to the PZT whose piezoelectric characteristic is known. The experimental result showed that the step height the silicon membrane measured by using MIFC was actually same with the value measured by SEM, which confirms that MICS is an easy and accurate method for the nano-scale displacement measurement.

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Optical coherence tomography topology design for SNR improvment (SNR 향상을 위한 OCT topology의 설계)

  • Park, Yang-Ha;Jung, Tae-Ho;Oh, Sang-Gi;Kim, Yoo-Hee
    • Proceedings of the KIEE Conference
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    • 2002.11a
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    • pp.212-214
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    • 2002
  • Basically, OCT use the interference effect of Michelson interferometer. The receiver noise of interferometer is a important fact to improve the system performance. To improve the system performance for high resolution image processing, we design a interferometer topology adding the attenuator to the reference arm. In this paper, we design the receiver noise parameter and computer simulation. In this results, SNR of the new topology system is improved 5dB compare to standard interferometer.

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Exciting Frequency Detection of Latticed fence Structure Using Fiber Optic Interferometer Sensor (간섭계형 광섬유 센서를 이용한 격자형 구조물의 외부 가진 진동수 탐지)

  • 이종길
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.5
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    • pp.142-148
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    • 2004
  • In this paper, to detect exciting frequency on the latticed fence structure, fiber optic sensor using Sagnac interferometer was fabricated and tested. The latticed structure fabricated with dimension of 180 cm wide and 180 cm high, the optical fiber, 50 m in length, distributed and fixed on the latticed structure. Single mode fiber, a laser with 1,550 m wavelength, and $3{\times}3$ coupler were used. Excited vibration signal applied to the latticed structure from 200 Hz to 1 KHz. The detected optical signals were compared to the detected acceleration signals and analyzed on the time and frequency domain. Based on the experimental results, fiber optic sensor using Sagnac interferometer detected exciting frequency, effectively. This system can be applied to the structural health monitoring system.

AFM modulation algorithm for the high speed measurement using a heterodyne laser interferometer (헤테로다인 레이저 간섭계에서 고속 측정을 위한 주파수 변조 알고리즘)

  • Choi H.S.;Yoon H.S.;Park K.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.922-925
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    • 2005
  • This article describes a FM modulation algorithm to increase the measurement speed by increasing the beat frequency of the laser without acousto-optic modulator(AOM) in the heterodyne laser interferometer. The proposed algorithm can increase the beat frequency of the heterodyne laser which limit the measurement speed by adjusting a carrier frequency through electronic circuit, while AOM is used to shift the frequency of the heterodyne laser in conventional method. Electronic circuit is constructed to modulate the signals from a laser interferometer and a waveform generator. The brier analysis, the measurement scheme of the system, and the experimental results using a Zeeman-stabilized He-Ne laser are presented. They demonstrate that the proposed algorithm is proven to enhance the measurement speed limit by increasing the beat frequency of the heterodyne laser.

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Error analysis and Performance test of the Volumetric interferometer for Absolute distance measurement (삼차원 좌표 측정을 위한 부피 간섭계의 오차분석 및 성능평가)

  • Rhee, H.G.;Chu, J.Y.;Kim, S.W.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.387-390
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    • 2002
  • In this paper, we accomplish uncertainty evaluation and performance test of the volumetric interferometer using two spherical wavefronts emitted from the ends of two single mode fibers. We verify that the volumetric interferometer has the volume uncertainty of 690nm through the error analysis and it has the resolution of 0.1 0.1$\mu\textrm{m}$ for x axis which is the same order of repeatability for x axis. Also, we obtain the systematic error of $1\mu\textrm{m}$ for $60\times 60\times 20 mm^3$ working volume using self-calibration with an artifact plate.

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