Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.10a
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- Pages.922-925
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- 2005
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- 2005-8446(pISSN)
AFM modulation algorithm for the high speed measurement using a heterodyne laser interferometer
헤테로다인 레이저 간섭계에서 고속 측정을 위한 주파수 변조 알고리즘
Abstract
This article describes a FM modulation algorithm to increase the measurement speed by increasing the beat frequency of the laser without acousto-optic modulator(AOM) in the heterodyne laser interferometer. The proposed algorithm can increase the beat frequency of the heterodyne laser which limit the measurement speed by adjusting a carrier frequency through electronic circuit, while AOM is used to shift the frequency of the heterodyne laser in conventional method. Electronic circuit is constructed to modulate the signals from a laser interferometer and a waveform generator. The brier analysis, the measurement scheme of the system, and the experimental results using a Zeeman-stabilized He-Ne laser are presented. They demonstrate that the proposed algorithm is proven to enhance the measurement speed limit by increasing the beat frequency of the heterodyne laser.
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