Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Nonlinearity Error Compensation in Heterodyne Laser Interferometer using WLS Method

WLS를 이용한 헤테로다인 레이저 간섭계에서의 비선형 오차 보정

  • Cha, Hyung-Seok (Sungkyunkwan University, School of Information and Communication Engineering) ;
  • Lee, Woo-Ram (Sungkyunkwan University, School of Information and Communication Engineering) ;
  • You, Kwan-Ho (Sungkyunkwan University, School of Information and Communication Engineering)
  • 차형석 (성균관대학교, 정보통신공학부) ;
  • 이우람 (성균관대학교, 정보통신공학부) ;
  • 유관호 (성균관대학교, 정보통신공학부)
  • Published : 2007.10.26
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Abstract

In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, called cross talks. This fact limits the usefulness of an laser interferometer. To compensate the error, we propose a WLS(weighted least square) algorithm, which will reduce nonlinearity error and make a better optimization in heterodyne laser interferometer.

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