Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Error Compensation in Heterodyne Laser Interferometer using Data Fusion Method

데이터 퓨전 기법을 이용한 헤테로다인 레이저 간섭계의 오차보정

  • Heo, Gun-Haeng (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Sung, Wook-Jin (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • Lee, Woo-Ram (School of Information and Communication Engineering, Sungkyunkwan University) ;
  • You, Kwan-Ho (School of Information and Communication Engineering, Sungkyunkwan University)
  • 허건행 (성균관대학교, 정보통신공학부) ;
  • 성욱진 (성균관대학교, 정보통신공학부) ;
  • 이우람 (성균관대학교, 정보통신공학부) ;
  • 유관호 (성균관대학교, 정보통신공학부)
  • Published : 2007.10.26
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Abstract

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted environmental error which is caused from refraction in the air. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on Data Fusion method which reduces the environmental error in the heterodyne laser interferometer. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

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