• Title/Summary/Keyword: interferometer

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A Study on Laser Interferometer Development for Micro Displacement Measurement in Micro Former (마이크로 성형기에서 미세 변위 측정을 위한 레이저 간섭계 개발에 관한 연구)

  • 최재원;김대현;최경현;이석희;김승수;나경환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1195-1198
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    • 2003
  • Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

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The performance improvement of the volumetric interferometer with multi-CCDs (다중 CCD를 이용한 부피 간섭계의 성능 개선)

  • 주지영;이혁교;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.268-271
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    • 2003
  • The Volumetric Interferometer using two spherical wavefronts emitted from the ends of two single mode fibers has been suggested to measure 3-dimensional absolute coordinates. In this paper, we try to improve the performance of the volumetric interferometer using multi-CCDs. We get coordinates matching matrixes between CCDs and can obtain more information in the space with multi-CCDs. Also we find out the best arrangement of multi-CCDs by computer simulations. In the simulation we can know that it will be better to increase the distance between CCDs to improve performance. For the performance test, we do a repeatability test, a comparison test with 2-D stage and the self-calibration using artifact.

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A Study on Curvature Radius Measurement Using Laser Interferometer (레이저 간섭계를 이용한 곡률반경 측정에 관한 연구)

  • Lee Ji Yong;Kim Min Ju;Lee Seung Soo;Jeon Eon Chan
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.13 no.6
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    • pp.34-40
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    • 2004
  • This paper presents studies on curvature radius measurement using the laser interferometer. It is a general practice to measure to $10^{-10}$m in length with the recent improvement and innovations in measurement technology and the processor used. The measurement methods can generally be categorized as these two: the contactual method and non-contactual method; and in this study, we will find ways to lower the cost for a CMM, or a coordinate measurement machine, and try to find an alternative. Furthermore, we will discuss some of the ways to improve the non-contactual measurement methods-optical interferometer method and the optical triangulation method. We will measure an object using a laser distance measuring device and Set the Point-contact result with the ball-bearing type and line-contact result with the bearing type, to decide on which probe type will be used.

Angular Dispersion-type Nonscanning Fabry-Perot Interferometer Applied to Ethanol-water Mixture

  • Ko, Jae-Hyeon;Kojima, Seiji
    • Journal of the Optical Society of Korea
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    • v.13 no.2
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    • pp.261-266
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    • 2009
  • The angular dispersion-type non-scanning Fabry-Perot was applied to an ethanol-water mixture in order to investigate its acoustic properties such as the sound velocity and the absorption coefficient. The scattered light from the mixture was analyzed by using the charge-coupled-device area detector, which made the measurement time much shorter than that obtained by using the conventional scanning tandem multi-pass Fabry-Perot interferometer. The sound velocity showed a deviation from ultrasonic sound velocities at low temperatures accompanied by the increase in the absorption coefficient, indicating acoustic dispersion due to the coupling between the acoustic waves and some relaxation process. Based on a simplified viscoelastic theory, the temperature dependence of the relaxation time was obtained. The addition of water molecules to ethanol reduced the relaxation time, consistent with dielectric measurements. The present study showed that the angular dispersion-type Fabry-Perot interferometer combined with an area detector could be a very powerful tool in the real-time monitoring of the acoustic properties of condensed matter.

Chromatic dispersion measurement method with spectral interferometer (Spectral interferometer를 이용한 색분산 측정방법)

  • Lee, Ji-Yong;Lee, Seung-Rak;Kim, Deok-Yeong
    • Proceedings of the Optical Society of Korea Conference
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    • 2007.07a
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    • pp.307-308
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    • 2007
  • We present a novel chromatic dispersion measurement method using a spectral domain interferometer for single mode optical fiber over a wide spectral range (200 nm). This technique is based on the Mach-Zehnder interferometer using a white light source and spectrometer. A phase was directly retrieved from a measured spectral interferogram to obtain relative group velocity, chromatic dispersion and dispersion slope. The measured results with the proposed method were compared with those obtained using a conventional measurement method. Those results have good agreement with each other. Our proposed method can simply, accurately, and quickly (< 500 ms) measure chromatic information for a short length of optical fiber as well as optical device.

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Analysis of sampling noise effect of Interferometer on FTIR Spectrometer (FTIR 분광용 간섭계의 샘플링 잡음 영향 분석)

  • Bae, Hyo-Wook;Park, Do-Hyun;Ra, Sung-Woong;Choi, Seung-Ki
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.4
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    • pp.10-17
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    • 2007
  • FTIR(Fourier Transform Infrared) spectrometry is a useful method to obtain infrared spectra of materials in gas phase by registering the interferogram of a target material using an interferometer, and then performing a Fourier transform on the interferogram to obtain the spectrum. In this paper, sampling noise effect on signal processing of the rapid scan interferometer was studied with relation to sampling the interferogram points at the improper location and empirically verified.

Error Correction of Laser Interferometer Using Capacitive Sensor (정전용량센서를 이용한 레이저 간섭계 오차보정)

  • Kim, Jae-Cheon;Seo, Suk-Hyun;Jeon, Jae-Wook;Park, Ki-Heon;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • 2006.04a
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    • pp.342-344
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    • 2006
  • During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under $100{\mu}m$, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.

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Development of a Fizeau Interferometer System for Measuring the Profile of Large Optical Lens (대구경 렌즈의 형상 측정을 위한 Fizeau 간섭계 시스템 개발)

  • Bae, Kwang-Hwan;Lee, Eung-Suk;Lee, Ki-Am;Kim, Ok-Hyun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.12 s.255
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    • pp.1649-1657
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    • 2006
  • Fizeau interferometer is well known optical instrument for measuring the lens profile accurately. The object of this study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for astronomical purpose. Measuring of large optical lens, the object could not be moved as small one but the measuring instrument must be moved for the alignment, because of the geometric conditions and the accuracy of the stage. Therefore, a five axis stage is designed to align the Interferometer instead of the measuring object. This instrument will be used for an on machine measuring system in polishing machine for large optical lens.

A Study on Determination of Quantitative Aberration Using Lateral-Shearing Interferometer (층밀리기 간섭계에 의한 정량적 수차산출에 관한 연구)

  • 김승우;김병창;조우종
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1996.11a
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    • pp.459-463
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    • 1996
  • The lateral-shearing interferometer specially devised for production line inspection lenses is presented. The interferometer is composed with immersion oil and four prisms whose relative sliding motion provide lateral-shearing and phase-shifting. A special phase-measuring algorithm of a-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil Three different algorithm for determinating quantitative aberration of aspherical lenses are presented and compared with one another.

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Multiphase Homodyne Laser Interferometer with Four Bucket (Four-bucket 알고리즘을 이용한 레이저 간섭계)

  • Park, Yoon-Chang;Jeong, Kyung-Min
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.10
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    • pp.203-208
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    • 1999
  • By tilting the reference mirror of Twynman-Green interferometer having a reference mirror and a moving mirror, firinge pattern composed of bright and dark parallel lines can be obtained and the fringe pattern is shifted according to the displacement of the mowing mirror. Several studies are executed for displacement measurement by detecting the intensity of the fringe with photo-diodes having small detecting area. In this study, to improve the sensitivity and robustness, the intensity of fringe is detected by using a large-area quadratic photo-diode masked with a grating panel having four kinds of binary grating having phase-difference of 0, {\pi}$/4, {\pi}$/2, 3 {\pi}$/4. The phase of the fringe is calculated with a simple 4-buckets algorithm. A experimental result shows that standard deviation of 5.653 nm is obtained comparing with a capacitive type gap sensor having nearly 1 nm accuracy.

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