Thermal Stable Ni-silicide Utilizing Pd Stacked Layer for nano-scale CMOSFETs (나노급 CMOSFET을 위한 Pd 적층구조를 갖는 열안정 높은 Ni-silicide)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.11a
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- pp.10-10
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- 2008