Design and fabrication of film Bulk Acoustic Resonator for flexible Microsystems (Flexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.16 no.12S
- /
- pp.1224-1231
- /
- 2003