Design and fabrication of film Bulk Acoustic Resonator for flexible Microsystems |
강유리
(한국과학기술연구원 마이크로시스템연구센터)
김용국 (한국과학기술연구원 마이크로시스템연구센터) 김수원 (고려대학교 전자컴퓨터공학과) 주병권 (한국과학기술연구원 마이크로시스템연구센터) |
1 |
High-Q microwave acoustic resonators and filters
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DOI ScienceOn |
2 |
Thin film bulk acoustic wave filter
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DOI ScienceOn |
3 |
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4 |
Film bulk acoustic wave resonator and filter technology
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5 |
Thin film bulk acoustic resonator and filter technology
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6 |
Analysis of piezoelectric thin film resonators with acoustic quarter-wave multilayers
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DOI |
7 |
Modified Butterworth-Vam Dyke circuit for FBAR resonators and automated measurement system
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8 |
Thin film bulk acoustic resonators(FBAR) for wireless applications
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9 |
센서 기능성 박막 : SOI 웨이퍼를 이용한 압전박막공진기 제작
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과학기술학회마을 |
10 |
Ultra-miniature high-Q filters and duplexers using FBAR technology
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11 |
A sealed cavity thin-film acoustic resonator process for RF bandpass filters
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