• Title/Summary/Keyword: indentation

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A Study on the Fracture behavior in Silicon Wafer using the Ultra-Precision Micro Positioning System (초미세 위치결정시스템을 이용한 실리콘 웨이퍼의 파괴거동에 관한 연구)

  • 이병룡
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.1
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    • pp.38-44
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    • 2000
  • The background of this study lies in he investigation of the formation mechanism of ductile mode(nkanometer-size) chips of brittle materials such as fine ceramics glass and silicon. As the first step to achieve this purpose this paper intends to observe the micro-deformation behavior of these materials in sub${\mu}{\textrm}{m}$ depth indentation tests using a diamond indentor. In this study it was developed Ultra-Micro Indentation. Device using the PZT actuator. Experimentally by using the Ultra-Micro Indentation device the micro fracture behavior of the silicon wafer was investigated. It was possible that ductile-brittle transition point in ultimate surface of brittle material can be detected by adding an acoustic emission sensor system to the Ultra-Micro Indentation appartus.

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The Study on Properties of AAO(Anodic Aluminum Oxide) Structures with Hole Effect (Hole effect를 고려한 AAO(Anodic Aluminum Oxide) 구조물의 물성치에 대한 연구)

  • 고성현;이대웅;지상은;박현철;이건홍;황운봉
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.4
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    • pp.186-193
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    • 2004
  • Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

Determination of the mechanical properties of the coated layer in the sheet metal using load-displacement curve by nanoindentation technique (나노 인덴테이션의 하중-변위 곡선을 이용한 표면처리강판 코팅층의 기계적 특성 결정)

  • Ko Y. H.;Lee J. M.;Kim B. M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.05a
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    • pp.148-151
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    • 2004
  • Mechanical properties such as Young's modulus and hardness of thin film in coated steel are difficult to determine by nano-indentation from the conventional analysis using the load-displacement curve. Therefore, an analysis of the nano-indentation loading curve was used to determine the Young's modulus, hardness and strain hardening exponent. A new method is recently being developed for plasticity properties of materials from nano-indentation. Elastic modulus of the thin films shows relatively small influence whereas yield strength and strain hardening are found to have significant effect on measured data. The load-displacement behavior of material tested with a Berkovich indenter and nano-indentation continuous stiffness method is used to measure the modulus and hardness through thin films.

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Enhanced Spherical Indentation Techniques for Rubber Property Evaluation (향상된 구형압입 고무 물성평가법)

  • Hwang, Kyu-Min;Oh, Jopng-Soo;Lee, Hyung-Yil
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.12
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    • pp.1357-1365
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    • 2009
  • In this study, we enhance the numerical approach of Lee et al.$^{(1)}$ to spherical indentation technique for property evaluation of hyper-elastic rubber. We first determine the friction coefficient between rubber and indenter in a practical viewpoint. We perform finite element numerical simulations for deeper indentation depth. An optimal data acquisition spot is selected, which features sufficiently large strain energy density and negligible frictional effect. We then improve two normalized functions mapping an indentation load vs. deflection curve into a strain energy density vs. first invariant curve, the latter of which in turn gives the Yeoh-model constants. The enhanced spherical indentation approach produces the rubber material properties with an average error of less than 3%.

Evaluation of the Residual Stress on the Multi-layer Thin Film made of Different Materials (이종재료를 사용한 다층 박막에서의 잔류응력 평가)

  • 심재준;한근조;김태형;안성찬;한동섭;이성욱
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.9
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    • pp.135-141
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    • 2003
  • MEMS structures generally have been fabricated using surface-machining method, but the interface failure between silicon substrate and evaporated thin film frequently takes place due to the residual stress inducing by the applied the various loads. And the very important physical property in the heated environment is the linear coefficient of thermal expansion. Therefore this paper studied the residual stress caused the thermal loads in the thin film and introduced the simple method to measure the trend of the residual stress by the indentation. Specimens were made of materials such as Al, Au and Cu and thermal load was applied repeatedly. The residual stress was measured by nano-indentation using AFM and FEA. The existence of the residual stress due to thermal load was verified by the experimental results. The indentation length of the thermal loaded specimens increased minimum 11.8% comparing with the virgin thin film caused by tensile residual stress. The finite element analysis results are similar to indentation test.

Analysis of the Extension Effects of Fatigue Life by Pre-Indentation in Aluminum Alloy Plates (알루미늄 합금 판재에서 예비압입에 의한 피로수명의 연장효과 분석)

  • Cho, Hwankee;Hwang, Jungsun
    • Journal of Aerospace System Engineering
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    • v.1 no.1
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    • pp.45-52
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    • 2007
  • This paper analyzed the extension effects of fatigue life and the application of pre-indentation in aircraft structural material such as aluminum alloys. The test specimen used the thin sheet of aluminum alloy with a single-edged notch. The experiments were conducted after making the pre-crack under a constant amplitude loading. As the fatigue life extension technique, the pre-indentation making an indent on the predicted path of crack propagation was applied. The work presented here discussed about a proper mathematical relation between crack growth rate and the range of stress intensity factor and about the generalization of crack growth mechanism with large retardation effect. A technique to enhance the applicability of pre-indentation if also mentioned.

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Evaluation of Residual Stress on Welded Joint in API X65 Pipe Line through Nondestructive Instrumented Indentation Technique (비파괴 계장화 압입시험기법을 통한 API X65 배관 용접부 잔류응력 평가)

  • 지원재;이윤희;김우식;김철만;권동일
    • Journal of Welding and Joining
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    • v.21 no.5
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    • pp.547-554
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    • 2003
  • Apparent mechanical properties in structural components can be different from the initially designed values due to the formation of the residual stress in metal forming and welding. Therefore, the evaluation of residual stress has great importance in the reliability diagnosis of structural components. A nondestructive instrumented indentation technique has been proposed to evaluate various strength concerning mechanical properties from the analysis of load-depth curve. In this study, quantitative residual stress estimation on API X65 welded joints for natural gas pipeline was performed by analyzing the variation of indentation loading curve by residual stress through a new proposed theoretical model. The residual stress from the indentation method was compared with that from the saw-cutting method.

A Numerical Approach to Indentation Techniques for Thin-film Property Evaluation (박막 물성평가 압입시험의 수치접근법)

  • Lee, Jin-Haeng;Yu, Han-Suk;Lee, Hyung-Yil
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.3 s.258
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    • pp.313-321
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    • 2007
  • In this work, the prior indentation theory for a bulk material is extended to an indentation theory for evaluation of thin-film material properties. We first select the optimal data acquisition location, where the strain gradient is the least and the effect of friction is negligible. A new numerical approach to the thin-film indentation technique is then proposed by examining the finite element solutions at the optimal point. With this new approach, from the load-depth curve, we obtain the values of Young's modulus, yield strength, strain-hardening exponent. The average errors of those values are less than 3, 5, 8% respectively.

A Berkovich Indentation Technique Based on 3D FEA solutions for Material Property Evaluation (3차원 유한요소해에 기초한 Berkovich 압입 물성평가법)

  • Kim, Min-Soo;Hyun, Hong-Chul;Lee, Kyoung-Yoon;Lee, Hyung-Yil
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1-6
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    • 2008
  • Due to the self-similarity of Berkovich and conical indenters, different materials may show the same loaddepth curve for single indentation. In this study, we first compare the load-depth characteristics of conical and Berkovich indenters via finite element method. We also analyze the variation of load-depth curves with angle of Berkovich indenter, indentation parameters, and material properties. With numerical regressions of obtained data, we then propose dual-Berkovich indentation formulae for material property evaluation. The proposed approach provides the values of elastic modulus, yield strength and strain-hardening exponent and corresponding stress-strain curve with an average error of less than 3%. The method is valid for any elastic indenters made of tungsten carbide and diamond for instance.

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Evaluation of Material Characteristics by Micro/Nano Indentation Tests (마이크로/나노 압입시험에 의한 재료특성평가)

  • Lee, Hyung-Yil;Lee, Jin-Haeng
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.10
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    • pp.805-816
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    • 2008
  • The present work reviews the methods to evaluate elastic-plastic material characteristics by indentation tests. Especially the representative stress and strain values used in some papers are critically analyzed. The values should not only represent the load-depth curve, but also represent the whole of deformed material around the impression. We briefly introduce other indentation techniques to evaluate residual stresses, creep properties, and fracture toughness. We also review some technical problems that are related to the accuracy issues in indentation tests.