• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.6
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• pp.459-466
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• 2000

For the applications in the ultra-large-scale-integration (ULSI) metallization processing copper thin films have been prepared by metal organic chemical vapor deposition (MOCVD) technology on TiN/Si substrates. The films have been deposited with varying the experimental conditions of substrate temperatures and copper source vapor pressures. The films were then annealed in a vacuum condition after the deposition and the annealing effect to the electrical conductivity of the films was measured. The grain size and the crystallinity of the films were observed to be increased by the post annealing and the electrical conductivity was also increased. The best electrical property of the copper film was obtained by in-situ annealing treatment at above 40$0^{\circ}C$ for the sample prepared at 18$0^{\circ}C$ of the substrate temperature.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.135-137
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• 2006

To improve device yield and throughput, faults in plasma processing equipment should be quickly and accurately diagnosed. Despite many useful information of ex-situ sensor measurements, their applications to recognize plasma faultshave not been investigated. In this study, a new technique to identify fault causes by recognizing X-ray photoelectron spectroscopy (XPS) using neural network and continuous wavelet transformation (CWT). The presented technique was evaluated with the plasma etch data. A totalof 17 experiments were conducted for model construction. Model performance was investigated from the perspectives of training error, testing error, and recognition accuracy with respect to various thresholds. CWT-based BPNN models demonstrated a higher prediction accuracy of about 26%. Their advantages over pure XPS-based models were conspicuous in all three measures at small networks.

• Applied Chemistry for Engineering
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• v.8 no.1
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• pp.76-83
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• 1997

Blends of thermotropic liquid crystalline polymer(TLCP) with poly(ethylene terephthalate) (PET) were prepared by the coprecipitation from a common solvent. The blends were processed through a capillary die at $287^{\circ}C$ to produce a monofilament. Morphology and mechanical, thermal properties of blends and composites were examined by differential scanning calorimetry(DSC), tensile test, optical microscopy and scanning electron microscopy. Crystallization kinetics of the blends were investigated by the isothermal DSC method. The Avrami analyses were applied to obtain the information on the crystal growth geometry and factors controlling the rate of crystallization. In the blends, liquid crystalline phase did not reveal any significant macrophase separation and thermal degradation at the processing temperature. From scanning electron micrographs of cryogenic fracture surfaces of extruded fibers, the TLCP domains were found to be more or less finely dispersed with $0.1{\mu}m$ to $0.2{\mu}m$ in size. Interfacial adhesion between the TLCP and matrix polymer was excellent. Tensile strength and modulus of TLCP/PET in-situ fiber composites were enhanced with increasing draw ratio and LCP content.

• Tunnel and Underground Space
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• v.33 no.5
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• pp.373-387
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• 2023

Scientific exploration of extraterrestrial planets has gripped human imagination since the advent of space travel. Human missions to Mars could produce insight into the essential questions of how, when and where life began on Earth. Such missions would only be feasible using local space resources materials, a concept called in situ-resource utilization (ISRU). The purpose of this paper is to provide a thorough review of the currently available Mars soil simulants and to determine those with geotechnical properties most appropriate for vehicle mobility studies. Sourcing and processing are considered since full-scale studies require bulk quantities of material on the order of tens of tons. This review identifies the simulants with the highest fidelity to Mars wind drift soils. In addition, recommendation guide for mars soil simulant development made.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.654-659
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• 2001

A new non-contact method of the frost thickness measurement has been developed. The method is based on the digital image processing technique to identify the reflection edge of the image captured by a CCD camera under laser sheet light illumination. To insure the accuracy of frost layer thickness, an in-situ calibration procedure is carried out with a calibration target with 0.5mm holes. Using the mapping function obtained by the calibration procedure, the contour of frost surface can be estimated with sub-pixel resolutions. The developed method is applied to study the effect of cooling plate temperature on the frost thickness in a small low speed wind tunnel.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.54-55
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• 2003

지금까지 반도체 장비 부품 세정을 위한 기존의 세정 방법중 가장 널리 사용되는 화학적 세정 방법은 다량의 유해 화학물질의 발생 및 후처리 문제, 비용문제, 열악한 작업 환경등과 같은 많은 문제를 노출시키고 있다. 이에 최근의 기술은 습식 세정에서 건식세정 방식으로의 기술 전이가 빠르게 이루어지고 있으며, 특히 레이저 광에 의한 건식 세정 기술은 다양한 오염 물질을 하나의 레이저 광원으로 제거할수 있으며, 기존의 습식 방법과 비교해 환경 친화적 청정 기술이고, 다른 건식 세정 기술인 드라이 아이스 및 플라즈마 세정 방법과 비교해 이동용으로 제작이 가능해 반도체 및 평판 디스플레이 생산공정에서 부품을 분리하지 않고 쉽게 세정을 하기 때문에 반도체 생산 현장에서 in-situ 세정으로 시간적, 경제적 이점이 대단히 크다. (중략)

• Korean Journal of Materials Research
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• v.9 no.3
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• pp.307-314
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• 1999

The effect of manufacturing variables, such as reactant powder$(TiB_2, B_4C)$, sintering temperature, and sintering time has been investigated on the microstructure and the mechanical properties of in-situ processed Ti/TiB composites. The mechanical properties were evaluated by measuring the compressive yield strength. The compressive yield strength of the in-situ processed composites was higher than that of the Ti-6AI-4V. The compressive yield strength of the composite made with TiE, reactant powder was higher than that of $B_4C$, mixed at the same volume fraction of reinforcement. It is because bonding nature between the matrix and the $TiB_2$, reactant powder was more strong than that of the other materials. It was proven by the examining the crack propagation path.

• Composites Research
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• v.33 no.2
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• pp.39-43
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• 2020

Recently, fabrication process of thermoplastic polyamide-based composites with recyclability as well as impact, chemical, and abrasion resistance have been widely studied. In particular, thermoplastic reactive resin transfer molding (TRTM) in which monomer with low viscosity is injected and in-situ polymerized inside mold has received a great attention, because thermoplastic melts are hard to impregnate fiber preform due to their very high viscosity. However, it is difficult to optimize the processing conditions because of high reactivity and sensitivity to external environments of the used monomer, ε-caprolactam. In this study, viscosity as an important process parameter in TRTM was measured during in-situ anionic polymerization of ε-caprolactam and the solutions for problems caused by high polymerization rate and sensitivity to moisture and oxygen were suggested. Reliability of the improved measurement technique was verified by comparing the viscosity behavior at various environmental conditions including humidity and atmosphere, and it is expected to be helpful for optimization of TRTM process.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.283-288
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• 2004

The measurement of ultra low aspect ratio fluid film thickness is very crucial technique both for the verification of lubrication media characteristics and for the clearance design in many precision components such as MEMS, precision bearings and other slideways. Many technologies are applied to the measurement of ultra low aspect ratio fluid film thickness (i.e. elastohydrodynamic lubrication film thickness). In particular, in-situ optical interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. This measurement method also does the monitoring of the surface defects and fractures happening during the contact behavior, which are delicately influenced by the surface conditions such as load, velocity, lubricant media as well as surface roughness. Careful selection of incident lights greatly enhances the fringe resolutions up to $\~1.0$ nanometer scale with digital image processing technology. In this work, it is found that coaxial aligning trichromatic incident light filtering system developed by the author can provide much finer resolution of ultra low aspect ratio fluid film thickness than monochromatic or dichromatic incident lights, because it has much more spectrums of color components to be discriminated according the variations of film thickness. For the measured interferometric images of ultra low aspect ratio fluid film thickness it is shown how the film thickness is finely digitalized and measured in nanometer scale with digital image processing technology and space layer method. The developed measurement system can make it possible to visualize the contact deformations and possible fractures of contacting surface under the repeated loading condition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.05a
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• pp.26-30
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• 1995

We describe the preparation and characterization of epitaxial thin films made with high temperature superconductor, $YBa_2Cu_3O_{7-\delta}$. The influence of processing parameters for YBCO thin films on MgO substrates in-situ grown by the pulsed laser deposition, including parameters of a laser beam energy, oxygen pressure, substrate temperature, target-substrate dis-tance is discussed. The characteristics of YBCO thin films were analyzed by using XRD, R-T measurement, AFM, crosssectional TEM, and RBS. For examples of microwave device applications, The fabrication and characterization of the microstrip lowpass filter and bandpass filter are also presented.