• Transactions on Electrical and Electronic Materials
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• 제13권3호
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• pp.139-143
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• 2012

Optical emission spectroscopy (OES) is often used for real-time analysis of the plasma processes. OES has been suggested as a primary plasma process monitoring tool. It has the advantage of non-invasive in-situ monitoring capability but selecting the proper wavelengths for the analysis of OES data generally relies on empirically established methods. In this paper, we propose a practical method for the selection of OES wavelength peaks for the analysis of plasma etch process and this is done by investigating reactants and by-product gas species that reside in the plasma etch chamber. Wavelength selection criteria are based on the standard deviation and correlation coefficients. Moreover, chemical actinometry is employed for the normalization of the selected wavelengths. We also present the importance of chemical actinometry of OES data for quantitative analysis of plasma. Then, the suggested OES peak selection method is employed.. This method is used to find out the reason behind abnormal etching of PR erosion during a series of $SiO_2$ etch processes using the same recipe. From the experimental verification, we convinced that OES is not only capable for real-time detection of abnormal plasma process but it is also useful for the analysis of suspicious plasma behavior.

• 한국터널지하공간학회 논문집
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• 제26권2호
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• pp.153-167
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• 2024

최근 도심지에 개발이 이루어지면서 지반침하가 증가하고 있으며, 그에 대한 원인 중 하나는 지하수위의 변화이다. 본 연구에서는 굴착깊이가 깊은 수직구 굴착공사의 한 예로 ｢◯◯◯◯ 복선전철 민간투자사업｣의 작업구를 대상으로 지하수위 저하량에 대한 현장계측 결과와 수치해석 결과를 비교 분석하였다. 이를 통하여 지하수위 저하에 대한 검토를 실시할 경우, 현장조건들이 충분히 반영될 수 있도록 지반조건을 분석하여 적용하여야 하며, 지하수위는 측정시기를 확인하여 적절한 수위를 적용하여야 시공 시 지하수위의 저하량과 유사한 예측 값을 도출해 낼 수 있음을 확인하였다.

• 비파괴검사학회지
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• 제23권5호
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• pp.409-417
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• 2003

열경화성 수지 복합재료의 제조과정에서 제품의 품질과 생산성 향상에 필수적인 경화 모니터링 기술을 개발하였다 경화도를 분석하기 위해, 동일한 경화조건에서 유전기법에 의한 소산계수 측정결과와 시차 주사 열분석 방법에 의한 발열량 계측 결과를 비교하였으며, 계측 감도의 향상을 위해 센서부분과 계측선의 영향을 적절히 분리하는 방법을 사용하였다. 유리섬유/폴리에스터 복합재료와 유리섬유/에폭시 복합재료에 대하여 경화과정에서의 경화도 분석을 위한 새로운 경화 모니터링 방법으로 소산계수와 온도를 동시에 고려하였다. 이 때, 소산계수의 변화 경향은 수지 점도의 변화 양상과 비교하여 분석하였다 개발된 경화 모니터링 방법은 다양한 종류의 열경화성 복합재료 경화 모니터링에 사용될 수 있다.

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.96-99
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• 2019

Atomic layer etching (ALE) is one of the most promising techniques in the semiconductor industry. Since ALE has to be precisely controlled on the angstrom scale to achieve ideal results, an in-situ analysis of the processes is highly required. In this regard, we found during ALE experiments with in-situ monitoring with an ellipsometer that changes in the substrate temperature affected the refractive index of a material, leading to changes in measured film thickness. In addition, more ideal ALE results could be achieved by keeping the substrate temperature constant.

• Corrosion Science and Technology
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• 제15권6호
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• pp.271-280
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• 2016

An approach to achieving the ambitious goal of cost effectively extending the safe operation life of energy pipeline to 100 years is the application of health monitoring and life prediction tools that are able to provide both long-term remnant pipeline life prediction and in-situ pipeline condition monitoring. A critical step is the enhancement of technological capabilities that are required for understanding and quantifying the effects of key factors influencing buried steel pipeline corrosion and environmentally assisted materials degradation, and the development of condition monitoring technologies that are able to provide in-situ monitoring and site-specific warning of pipeline damage. This paper provides an overview of our current research aimed at developing new sensors and electrochemical cells for monitoring, categorising and quantifying the level and nature of external pipeline and coating damages under the combined effects of various inter-related variables and processes such as localised corrosion, coating cracking and disbondment, cathodic shielding, transit loss of cathodic protection.

• Smart Structures and Systems
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• 제13권1호
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• pp.155-171
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• 2014

Various monitoring techniques are now available for structural health monitoring and Acoustic Emission (AE) is one of them. One of the major advantages of the AE technique is its capability to locate active cracks in structural members. AE crack locating approaches are affected by the signal attenuation and dispersion of elastic waves due to inhomogeneity and geometry of reinforced concrete (RC) members. In this paper, a novel technique is described based on signal processing and sensor arrangement to process multisensory AE data generated by the onset and propagation of cracks and is validated with experimental results from an in-situ load test. Considering the sources of uncertainty in the AE crack location process, a methodology is proposed to capture and locate events generated by cracks. In particular, the relationship between AE events and load is analyzed, and the feasibility of using the AE technique to evaluate the cracking behavior of two RC slab strips during loading to failure is studied.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.87-91
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• 2021

Various Cu ions are discharged into water from various industries, which results in a severe trouble for groundwater, soil, air, and eventually animals and humans. In this work, graphene oxide (GO) is introduced as a Cu removal absorber and the real-time monitoring method is demonstrated. The results show that GO is a very effective material to absorb Cu ions in the solution. In addition, the residual Cu ions in the solution is monitored via optical transmittance method, which well match with Inductively Coupled Plasma Mass Spectrometer (ICP-MS) analysis.

• Nuclear Engineering and Technology
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• 제54권1호
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• pp.186-192
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• 2022

Flow accelerated corrosion (FAC) is a type of pipe corrosion in which the pipe thickness decreases depending on the fluid flow conditions. In nuclear power plants, FAC mainly occurs in the carbon steel pipes of a secondary system. However, because the temperature of a secondary system pipe is over 150 ℃, in situ monitoring using a conventional ultrasonic non-destructive testing method is difficult. In our previous study, we developed a waveguide ultrasonic thickness measurement system. In this study, we applied a waveguide ultrasonic thickness measurement system to monitor the thinning of the pipe according to the change in pH. The Korea Atomic Energy Research Institute installed FAC-proof facilities, enabling the monitoring of internal fluid flow conditions, which were fixed for ~1000 h to analyze the effect of the pH. The measurement system operated without failure for ~3000 h and the pipe thickness was found to be reduced by ~10% at pH 9 compared to that at pH 7. The thickness of the pipe was measured using a microscope after the experiment, and the reliability of the system was confirmed with less than 1% error. This technology is expected to also be applicable to the thickness-reduction monitoring of other high-temperature materials.

• 한국환경독성학회:학술대회논문집
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• 한국환경독성학회 2004년도 춘계학술대회
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• pp.47-60
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• 2004

Higher plants can be valuable genetic assay systems for monitoring environmental pollutants and evaluating their biological toxicity. Two assays are considered ideal for in situ monitoring and testing of soil, airborne and aqueous mutagenic agents; the Tradescantia stamen hair assay for somatic cell mutations and the Tradescantia micronucleus assay for chromosome aberrations. Both assays can be used for in vivo and in vitro testing of mutagens. Since higher plant systems are now recognized as excellent indicators and have unique advantages over in situ monitoring and screening, higher plant systems could be accepted by regulatory authorities as an alternative first-tier assay system for the detection of possible genetic damages resulting from the pollutants or chemicals used and produced by industrial sectors. It has been concluded that potential mutagen and carcinogen such as the heavy metals among indoor air particulates, volatile compounds in the working places, soil, and water pollutants contribute to the overall health risk. This contribution can be considerable under certain circumstances. It is therefore important to identify the level of genotoxic activity in the environment and to relate it to the biomarkers of a health risk in humans. The results from the higher plant bioassays could make a significant contribution to assessing the risks of pollutants and protecting the public from agents that can cause mutation and/or cancer. The plant bioassays, which are relatively inexpensive and easy to handle, are recommended for the scientists who are interested in monitoring pollutants and evaluating their environmental toxicity to living organisms.

• 한국환경생물학회:학술대회논문집
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• 한국환경생물학회 2004년도 학술대회
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• pp.1-15
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• 2004

Higher plants can be valuable genetic assay systems for monitoring environmental pollutants and evaluating their biological toxicity. Two assays are considered ideal for in situ monitoring and testing of soil, airborne and aqueous mutagenic agents; the Tradescantia stamen hair assay for somatic cell mutations and the Tradescantia micronucleus assay for chromosome aberrations. Both assays can be used for in vivo and in vitro testing of mutagens. Since higher plant systems are now recognized as excellent indicators and have unique advantages over in situ monitoring and screening, higher plant systems could be accepted by regulatory authorities as an alternative first-tier assay system for the detection of possible genetic damages resulting from the pollutants or chemicals used and produced by industrial sectors. It has been concluded that potential mutagen and carcinogen such as the heavy metals among indoor air particulates, volatile compounds in the working places, soil, and water pollutants contribute to the overall health risk. This contribution can be considerable under certain circumstances. It is therefore important to identify the level of genotoxic activity in the environment and to relate it to the biomarkers of a health risk in humans. The results from the higher plant bioassays could make a significant contribution to assessing the risks of pollutants and protecting the public firom agents that can cause mutation anuor cancer. The plant bioassays, which are relatively inexpensive and easy to handle, are recommended for the scientists who are interested in monitoring pollutants and evaluating their environmental toxicity to living organisms.