Effect of the Substrate Temperature on Monitoring of Atomic Layer Etching Rate via an In-situ Ellipsometer |
Lee, Young Seok
(Department of Physics, Chungnam National University)
Lee, Jang Jae (Department of Physics, Chungnam National University) Lee, Sang Ho (Department of Physics, Chungnam National University) Seong, In Ho (Department of Physics, Chungnam National University) Cho, Chul Hee (Department of Physics, Chungnam National University) Kim, Si Jun (Nanotech) You, Shin Jae (Department of Physics, Chungnam National University) |
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