• Title/Summary/Keyword: in situ temperature

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Effect of the Substrate Temperature on Monitoring of Atomic Layer Etching Rate via an In-situ Ellipsometer (타원계측장치를 이용한 실시간 원자층 식각률 모니터링에서 기판 온도의 영향)

  • Lee, Young Seok;Lee, Jang Jae;Lee, Sang Ho;Seong, In Ho;Cho, Chul Hee;Kim, Si Jun;You, Shin Jae
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.4
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    • pp.96-99
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    • 2019
  • Atomic layer etching (ALE) is one of the most promising techniques in the semiconductor industry. Since ALE has to be precisely controlled on the angstrom scale to achieve ideal results, an in-situ analysis of the processes is highly required. In this regard, we found during ALE experiments with in-situ monitoring with an ellipsometer that changes in the substrate temperature affected the refractive index of a material, leading to changes in measured film thickness. In addition, more ideal ALE results could be achieved by keeping the substrate temperature constant.

Correcting the Sound Velocity of the Sediments in the Southwestern Part of the East Sea, Korea (동해 남서해역 퇴적물의 음파전달속도 보정)

  • Kim, Sora;Kim, Daechoul;Lee, Gwang-Soo
    • Journal of the Korean earth science society
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    • v.37 no.7
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    • pp.408-419
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    • 2016
  • To investigate the in-situ sound velocity of sediment in the southwestern part of the East Sea, the laboratory sound velocity was measured using the pulse transmission technique. The sediment sound velocity measured in laboratory was corrected to in-situ sound velocity based on the seafloor temperature, seawater sound velocity, Kim et al. (2004) model, and Hamilton (1980) model. The distribution of the corrected in-situ sound velocity applying Kim et al. (2004) and Hamilton (1980) models reflects the characteristics of sediments of the study area and shows a similar distribution pattern. The correction for in-situ sound velocity was mostly influenced by seafloor temperature. Then, correction of sound velocity using seafloor sediment temperature data should be accomplished for conversion of laboratory data to in-situ sound velocity.

High-Quality Epitaxial Low Temperature Growth of In Situ Phosphorus-Doped Si Films by Promotion Dispersion of Native Oxides (자연 산화물 분산 촉진에 의한 실 시간 인 도핑 실리콘의 고품질 에피택셜 저온 성장)

  • 김홍승;심규환;이승윤;이정용;강진영
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.2
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    • pp.125-130
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    • 2000
  • Two step growth of reduced pressure chemical vapor eposition has been successfully developed to achieve in-situ phosphorus-doped silicon epilayers, and the characteristic evolution on their microstructures has been investigated using scanning electron microscopy, transmission electron microscopy, and secondary ion mass spectroscopy. The two step growth, which employs heavily in-situ P doped silicon buffer layer grown at low temperature, proposes crucial advantages in manipulating crystal structures of in-situ phosphorus doped silicon. In particular, our experimental results showed that with annealing of the heavily P doped silicon buffer layers, high-quality epitaxial silicon layers grew on it. the heavily doped phosphorus in buffer layers introduces into native oxide and plays an important role in promoting the dispersion of native oxides. Furthermore, the phosphorus doping concentration remains uniform depth distribution in high quality single crystalline Si films obtained by the two step growth.

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Laboratory/In situ Sound Velocities of Shelf Sediments in the South Sea of Korea

  • Kim, Dae-Choul;Kim, Gil-Young;Jung, Ja-Hun;Seo, Young-Kyo;Wilkens, Roy H.;Yoo, Dong-Geun;Lee, Gwang-Hoon;Kim, Jeong-Chang;Yi, Hi-Il;Cifci, Gunay
    • Fisheries and Aquatic Sciences
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    • v.11 no.2
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    • pp.103-112
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    • 2008
  • Compressional sound velocities of shelf sediments in the South Sea of Korea, were measured in situ and in the laboratory for six cores. In situ sound velocity was measured using the Acoustic Lance (frequency of 7.5-15 kHz), while laboratory velocity was measured by the pulse transmission technique (frequency of 1MHz). Physical properties were relatively uniform with sediment depth, suggesting little effect of sediment compaction and/or consolidation. Average in situ velocity at each core site ranged from 1,457 to 1,488 m/s, which was less than the laboratory velocity of 1,503 and 1,604m/s. In muddy sediments the laboratory velocity was 39-47 m/s higher than in situ velocity. In sandy sediments, the difference was greater by an average of 116 m/s. Although the velocity data were corrected by the velocity ratio method based on bottom water temperature, the laboratory velocity was still higher than the in situ velocity (11-21 m/s in muddy sediments and 91 m/s in sandy sediments). This discrepancy may be caused by sediment disturbance during core collection and/or by the pressure of Acoustic Lance insertion, but it was most likely due to the frequency difference between in situ and laboratory measurement systems. Thus, when correcting laboratory velocity to in situ velocity, it is important to consider both temperature and frequency.

A study of in situ immobilization of lipase by using an LC column with aldehyde-silica stationary phase

  • Seo, U-Yong;Hong, Seon-Hui;Lee, Gi-Se
    • 한국생물공학회:학술대회논문집
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    • 2001.11a
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    • pp.633-634
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    • 2001
  • The in situ immobilization of lipase in an LC column with aldehyde-silica stationary phase was optimized. The effects of feed composition, temperature, mobile phase pH and now rate on immobilization efficiency were investigated. Lipase activity after in situ immobilization was compared with free enzyme and batch immobilized enzyme.

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Structural and Morphological Changes of Co Nanoparticles and Au-10at.%Pd Thin Film Studied by in Situ Heating in a Transmission Electron Microscope

  • Ji, Yoon-Beom;Park, Hyun Soon
    • Applied Microscopy
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    • v.47 no.3
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    • pp.208-213
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    • 2017
  • The microstructural changes in Co nanoparticles and an Au-10at.%Pd thin film have been investigated using an in situ heating holder with a micro-electro-mechanical system (MEMS). In Co nanoparticles, two phases (face-centered cubic and hexagonal close-packed crystal structures) were found to coexist at room temperature and microstructures at temperatures, higher than $1,000^{\circ}C$, were observed with a quick response time and significant stability. The actual temperature of each specimen was directly estimated from the changes in the lattice spacing (Bragg-peak separation). For the Au-10at.%Pd thin film, at a set temperature of $680^{\circ}C$, the actual temperature of the sample was estimated to be $1,020^{\circ}C{\pm}123^{\circ}C$. Note that the specimen temperature should be carefully evaluated because of the undesired effects, i.e., the temperature non-uniformity due to the sample design of the MEMS chip, and distortion due to thermal expansion.

Comparison of Strength-Maturity Models Accounting for Hydration Heat in Massive Walls

  • Yang, Keun-Hyeok;Mun, Jae-Sung;Kim, Do-Gyeum;Cho, Myung-Sug
    • International Journal of Concrete Structures and Materials
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    • v.10 no.1
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    • pp.47-60
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    • 2016
  • The objective of this study was to evaluate the capability of different strength-maturity models to account for the effect of the hydration heat on the in-place strength development of high-strength concrete specifically developed for nuclear facility structures under various ambient curing temperatures. To simulate the primary containment-vessel of a nuclear reactor, three 1200-mm-thick wall specimens were prepared and stored under isothermal conditions of approximately $5^{\circ}C$ (cold temperature), $20^{\circ}C$ (reference temperature), and $35^{\circ}C$ (hot temperature). The in situ compressive strengths of the mock-up walls were measured using cores drilled from the walls and compared with strengths estimated from various strength-maturity models considering the internal temperature rise owing to the hydration heat. The test results showed the initial apparent activation energies at the hardening phase were approximately 2 times higher than the apparent activation energies until the final setting. The differences between core strengths and field-cured cylinder strengths became more notable at early ages and with the decrease in the ambient curing temperature. The strength-maturity model proposed by Yang provides better reliability in estimating in situ strength of concrete than that of Kim et al. and Pinto and Schindler.

Study on the Strength Development of Fly ash Replace Concrete by a In-situ Temperature System (온도추종 양생 장치에 의한 플라이애쉬 치환 콘크리트의 강도 발현 성상)

  • Lee, Gun-Cheol;Yoon, seung-joe;Lee, Gun-Young;Choi, Jung-Gu;Kim, Kyoung-Min
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2014.05a
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    • pp.126-127
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    • 2014
  • At construction sites, due to the reason of inconvenience and difficulties of producing and using curing equipment and when it comes to measuring compression strength of the actual structure, strength of structure concrete according to general standards which are suggested in concrete standard specification are assessed. However, this method does not consider various variables of the sites such as kinds concretes and sizes of frame works so that it is not easy to measure proper curing period and strength. Thus, this study reviews description of strength development according to In-situ temperature system and analyzes and compares properties of strength development of the existing curing methods such as sealing curing so that it provides basic materials for period of removal of molds.

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An In sight into Novel Drug Delivery System: In Situ Gels

  • Bashir, Rabiah;Maqbool, Mudasir;Ara, Irfat;Zehravi, Mehrukh
    • CELLMED
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    • v.11 no.1
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    • pp.6.1-6.7
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    • 2021
  • In situ gelling devices, as they enter the body, are dosage forms in the shape of the sol but turn into gel types under physiological circumstances. Transition from sol to gel is contingent on one or a mixture of diverse stimuli, such as transition of pH control of temperature, irradiation by UV, by the occurrence of certain ions or molecules. Such characteristic features may be commonly employed in drug delivery systems for the production of bioactive molecules for continuous delivery vehicles. The technique of in situ gelling has been shown to be impactful in enhancing the potency of local or systemic drugs supplied by non-parenteral pathways, increasing their period of residence at the absorption site. Formulation efficacy is further improved with the use of mucoadhesive agents or the use of polymers with both in situ gelling properties and the ability to bind with the mucosa/mucus. The most popular and common approach in recent years has provided by the use of polymers with different in situ gelation mechanisms for synergistic action between polymers in the same formulation. In situ gelling medicine systems in recent decades have received considerable interest. Until administration, it is in a sol-zone and is able to form gels in response to various endogenous factors, for e.g elevated temperature, pH changes and ions. Such systems can be used in various ways for local or systemic supply of drugs and successfully also as vehicles for drug-induced nano- and micro-particles. In this review we will discuss about various aspects about use of these in situ gels as novel drug delivery systems.

Development of in-situ Passivation System for High Efficiency and Long Lifetime of Flexible OLED Display (고효율 장수명의 Flexible OLED 디스플레이를 위한 in-situ Passivation System 개발)

  • Kim, Kwan-Do
    • Journal of IKEEE
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    • v.21 no.1
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    • pp.85-88
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    • 2017
  • This study focused on the development of in-situ passivation system and characterization of OLED display. The thin film passivation process with thin film layers was investigated using in-situ passivation technique in the cluster system. Thin films of $SiO_2$, SiNx passivation were manufactured using PECVD, which enables the deposition process at room temperature. The cluster system was created to develop in-situ passivation process, which OLED and thin film were fabricated in the cluster system without exposing to the atmospheric environment. It is expected that the in-situ passivation system of OLED with organic and inorganic layer provides the leading technique to develop flexible OLED.