• Tribology and Lubricants
• /
• 제31권6호
• /
• pp.239-244
• /
• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• 전기전자학회논문지
• /
• 제21권1호
• /
• pp.85-88
• /
• 2017

본 연구에서는 OLED 소자 및 패시베이션 박막을 하나의 시스템에서 동시에 제작하여 진행할 수 있는 in-situ passivation 클러스터 시스템을 개발하고 이러한 시스템을 이용하여 OLED 디스플레이 제작 및 특성을 연구함으로써 플렉시블 디스플레이에 적용할 수 있는 기술을 구현하였다. In-situ passivation을 이용한 OLED의 제작 및 특성 분석에 관하여 연구하여 다음과 같은 결과를 얻었다. 첫째, In-situ 시스템으로 OLED 소자 제작 및 박막 패시베이션 가능한 시스템을 자체적으로 구축하였으며, 패시베이션 박막을 제작하여 그 특성을 평가한 결과 본 시스템의 응용 가능성을 제시할 수 있었다. 둘째, $SiO_2$, SiNx 무기 박막을 PECVD 방법으로 제작하여 OLED 패시베이션 박막으로 적용 가능성을 확인하였다. 본 연구결과, in-situ passivation 시스템의 적용 가능성을 확인할 수 있었고, 플렉시블 디스플레이에 적합한 패시베이션 방법으로서의 구현 가능성을 제시하였다.

• 대한금속재료학회지
• /
• 제48권7호
• /
• pp.683-689
• /
• 2010

In this study, FeAl based intermetallic matrix composites reinforced with in-situ synthesized TiC particles were fabricated by an in-situ liquid mixing process. The microstructures, mechanical properties and fracture behaviors of the in-situ liquid mixing processed composite were investigated and compared with the vacuum suction casting processed composite. The results showed that the in-situ formed TiC particles exhibited fine and uniform dispersion in the liquid mixing processed composite, while significant grain boundary clustering and coarsening of TiC particles were obtained by the vacuum suction process. It was also shown in both types of composites that the hardness and bending strength were increased with the increase of the TiC volume fractions. Through the study of fractography in the bending test, it was considered that the TiC particles prohibited brittle intergranular fracture of FeAl intermetallic matrix by crack deflections. Because of the uniformly distributed fine TiC particles, the bending strength of the liquid mixing processed composite was superior to that of the casting processed composite.

• 대한기계학회논문집B
• /
• 제29권12호
• /
• pp.1307-1312
• /
• 2005

Turbulent in-situ mixing process is a new material process technology to get dispersed phase in nanometer size by controlling reaction of liquid/liquid, liquid/solid and liquid/gas, flow and solidification speed simultaneously. In this study mixing, the key technology to this synthesis method will be studied by computational fluid dynamics. For the simulation of mixing of liquid metal, static mixers will be investigated. Two inlets for different liquid metal meet and merge like 'Y' shape tube. The tube has various shapes such as straight and curved. Also, the radius of curve will be varied. The performance of mixer will be evaluated with quantitative analysis with coefficient of variance of mass fraction. Also, detailed plots of intersection will be presented to understand effect of mixer shape on mixing.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1994년도 추계학술대회 논문집
• /
• pp.54-58
• /
• 1994

H$_2$ bake and GeH$_4$ clean are used as a in-situ pre-clean method in low temperature Si based epitaxial growth technology using rapid thermal processing chemical vapor deposition (RTPCVD). In this paper, the H$_2$ bake and GeH$_4$ clean processes are optimized for low surface defect density using Taguchi method. In H$_2$ bake process, the epitaxial growth temperature affects dominantly on the surface defect density, and the next affecting factors are H$_2$ bake temperature and rinse time in de-ionised water. In GeH$_4$ clean process, GeH$_4$ clean temperature affects most strongly on the surface defect density, and the minor factor is GeH$_4$flow rate. The optimum process conditions predicted fly Taguchi method agree well with tile experimental data in both in-situ clean processes.

• 한국초전도학회:학술대회논문집
• /
• 한국초전도학회 2009년도 Korea Superconductivity Society Meeting 2009
• /
• pp.93-93
• /
• 2009

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2008년도 춘계학술대회 논문집
• /
• pp.434-435
• /
• 2008

An in-situ monitoring technique for deposition process of CdS buffer layer was developed in this work. A quartz crystal microbalance (QCM) was used to measure the frequency change during the CdS deposition process and the relation ship between frequency change and film thickness and optical transmittance was investigated. The film thickness shows a linear relationship with frequency change, demonstrating that frequency change measured by QCM can be used a in-situ monitoring tool for CdS deposition process.

• 한국세라믹학회지
• /
• 제51권2호
• /
• pp.97-102
• /
• 2014

In order to improve the refresh rate of old newspaper(ONP), PCC shape-controlling experiments were carried out. The effect of a PCC polymorph on improving the quality of old newspaper was studied for a transformation from waste paper to eco-friendly paper. The synthesis of PCC consists of an in-situ process and a loading process to enhance the refresh rate of old newspaper. The characteristics between the in-situ process and the loading process could be analysed by SEM analyses of coated fiber surfaces. The retention rate ranges from 65 to 67% after the application of the in-situ process, and that after the loading process ranges from 55 to 58%. The retention rates thus show a difference of about 7-10%. In addition, the whiteness and ERIC characteristics of the in-situ process gave more efficient results than those of the loading process.

• 한국전기전자재료학회논문지
• /
• 제21권3호
• /
• pp.208-212
• /
• 2008

This paper reports physical properties of in situ boron doped silicon films made from boron source gas and silane ($SiH_4$) gas in a conventional low-pressure chemical vapor deposition vertical furnace. If the p-type polysilicon is formed by boron implantation into undoped polysilicon, the plasma nitridation (PN) process is added on the oxide in order to suppress boron penetration that can be caused during the thermal treatments used in fabrication. In-situ boron doped polysilicon deposition can complete p-type polysilicon film with only one deposition process and need not the PN process, because there is not interdiffusion of dopant at the intermediate temperatures of the subsequent steps. Since in-situ boron doped polysilicon films have higher work function than that of n-type polysilicon and they are compatible with the underlying oxide, they may be promising materials for improving memory cell characteristics if we make its profit of these physical properties.

• 펄프종이기술
• /
• 제44권4호
• /
• pp.8-15
• /
• 2012

Optical property improvements for ONP (old newspaper) and OMG (old magazine) were attempted by application of in-situ $CaCO_3$ formation process on recycled fiber surfaces. Washing treatment of ONP and OMG resulted in 35~40% yield loss for around 6% brightness improvement. Washing plus bleaching process with $H_2O_2$ and FAS (formamidine sulfinic acid) improved brightness and ERIC values a little more with the same amount of yield loss as washing treatment. In-situ $CaCO_3$ formation method improved those optical properties much better than the washing plus bleaching method without loss of yield, and better than the case of adding high brightness PCC up to the same ash level. It can be said that the in-situ $CaCO_3$ formation method may be used as an effective alternative for upgrading optical properties of recycled fibers.