• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
• /
• pp.257-257
• /
• 2012

Fault detection was carried out in a etcher of capacitive coupled plasma with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and Fluorocarbon plasma with variable change such as pressure and addition of N2 and O2 to assume atmospheric leak, RF power and pressure that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by VI probe was analyzed by statistical method including PCA to determine healthy of process. The main goal of this study is to find feasibility and limitation of OES and Impedances for fault detection by shift of plasma characteristics and to enhance capability of fault detection using PCA.

• 전기학회논문지
• /
• 제56권6호
• /
• pp.1170-1176
• /
• 2007

The conventional urodynamic monitoring is fulfilled by artificially filling a bladder with saline. Generally. it is difficult to evaluate the physiological functions of the storage and voiding of a bladder. With this aim, we constructed an ambulatory urodynamic monitoring (AUM) system and proposed a novel method estimating abdominal pressure by measuring bio-impedance variations. Our system was clinically evaluated for 10 patients. It turned out to be that as the intensity of the abdomen contraction increased, the amplitude of bio-impedance signal and the RMS value of EMG increased more as compared to those who observed during the rest mode. Also, we determined the optimum electrode pair for estimating the abdominal pressure using bio-impedance method and consequently compared with the conventional methods. Because impedance changes differ from a weight, a height, contractile force, volume of muscle and blood other or whatever of individuals, it was quantified in terms of impedance change, correlation coefficient and SNR Our results showed the optimum electrode pair (1,9) which could detect impedance changes due to the increase of the intensity in the abdominal pressure. The correlation coefficient and quadratic function between the RMS values of EMG and the impedance changes were 0.87 and $y=0.0014x^2+0.0620x+0.6958$, respectively. Thus, our system demonstrated that the abdominal pressure could be measured noninvasively and conveniently by simply estimating bio-impedance values. We propose that this optimum electrode configuration would be useful for the future studies involving the handy measurements of abdominal pressure with our suggested ambulatory urodynamics monitoring system.

• 대한의용생체공학회:의공학회지
• /
• 제5권1호
• /
• pp.15-18
• /
• 1984

In this paper we developed a respiration monitor by an impedane pneumography. This technique, measuring the electrical impedance change of the lungs due to breath, provides the accurate data for the respiration trend and rates. To measure the small impedance difference we designed a special current source which was considered the electrical safety and the interference with the ECG signal.

• Journal of Radiation Protection and Research
• /
• 제38권4호
• /
• pp.202-207
• /
• 2013

생체 조직의 전기 신호는 살아 있는 조직과 관련된 많은 정보를 포함하고 있으며, 생체 조직에 생물학적 변화가 있으면 고유의 전기적 특성이 변화한다. Impedance/Gain-phase analyzer로 1 KHz에서 1 KHz까지 주파수 대역을 설정한 다음 교류 주파수를 인가하며 돼지안심 조직의 임피던스 특성을 방사선 피폭선량에 따라 변화가 있는지 알아보고자 하였다. 임피던스 크기는 주파수에 비례하여 감소하였으며, 상관계수(r)가 -0.96으로 높은 음의 상관관계를 보였다. 위상차 변화는 거의 없었으며 조직은 저항성을 나타내었다. 측정값은 변동계수가 ${\pm}5$%이내로 재현성이 있음을 알 수 있었고, 측정 시간 경과에 따른 임피던스 크기와 위상차 변화는 유의적인 차이가 없었다.(p>0.05) 방사선 피폭 시 임피던스 변화는 대조군과 비교했을 때 1 Gy, 2 Gy, 4 Gy 피폭 선량에서는 임피던스 크기는 감소하였으나, 유의적인 차이는 없었다.(p>0.05) 그러나 10 Gy 피폭 선량에서는 임피던스 크기 감소가 유의적으로 나타났다.(p<0.05) 방사선 피폭선량이 증가하여도 위상차 변화는 거의 없었으며, 대조군과 비교했을 때 1 Gy, 2 Gy, 4 Gy, 10 Gy 모두 유의적인 차이가 없었다.(p>0.05) 본 연구를 통해 생체 조직의 전기적 특성을 이해 할 수 있었고, 방사선 피폭선량에 따른 임피던스 변화를 측정하여 방사선이 인체에 미치는 영향을 직접 평가 할 수 있는 가능성을 확인 할 수 있었다.

• Smart Structures and Systems
• /
• 제5권1호
• /
• pp.81-94
• /
• 2009

A vibration-impedance-based monitoring method is proposed to predict the loss of prestress forces in prestressed concrete (PSC) girder bridges. Firstly, a global damage alarming algorithm using the change in frequency responses is formulated to detect the occurrence of damage in PSC girders. Secondly, a local damage detection algorithm using the change in electro-mechanical impedance features is selected to identify the prestress-loss in tendon and anchoring members. Thirdly, a prestress-loss prediction algorithm using the change in natural frequencies is selected to estimate the extent of prestress-loss in PSC girders. Finally, the feasibility of the proposed method is experimentally evaluated on a scaled PSC girder model for which acceleration responses and electro-mechanical impedances were measured for several damage scenarios of prestress-loss.

• 한국지진공학회논문집
• /
• 제10권6호
• /
• pp.57-65
• /
• 2006

본 논문에서는 구조물의 전역적인 손상도 평가와 국부 구조 연결부의 손상 검색을 동시에 수행할 수 있는 하이브리드 구조 손상 모니터링 체계가 제시되었다. 하이브리드 손상 모니터링 체계는 진동기반 기법과 전기/역학적 임피던스 기법으로 구성되었다. 진동기반 기법은 구조물의 모드특징의 변화를 사용하여 구조물의 전역적 특성의 변화를 감지하고, 전기/역학적 임피던스 기법은 PZT 센서의 저항 변화를 사용하여 국부 구조 연결부의 손상 여부를 검출한다. 제안된 하이브리드 모니터링 체계를 검증하기 위해 구조 연결부의 볼트 풀림 상황을 손상 시나리오로 선택하였으며, 가속도 응답과 임피던스 응답 신호가 계측되었다. 실험 결과, 제안된 하이브리드 모니터링 체계를 통해 구조물의 전역적 손상 상태와 국부 구조 연결부의 손상을 정확하게 모니터링 할 수 있었다.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2003년도 하계종합학술대회 논문집 V
• /
• pp.2891-2894
• /
• 2003

This paper describes the possibility of analyzing gait pattern from the variation of the lower leg electrical impedance. This impedance is measured by the four-electrode method. Two current electrodes are applied to the thigh and foot., and two potential electrodes are applied to the lateral aspect. medial aspect, and posterior position of lower leg. We found the optimal electrode position for knee and ankle joint movements based on high correlation coefficient, least Interference, and maximum magnitude of impedance change. From such features of the lower leg impedance, it has been made clear that different movement patterns exhibit different impedance patterns and impedance level.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2005년도 춘계학술대회논문집
• /
• pp.184-187
• /
• 2005

Physical changes in a structural system may cause changes in mechanical impedance of the system. Due to the electro-mechanical coupling effect in piezoelectric materials, this change can be monitoring by the electrical impedance of the piezoelectric sensor. In this paper, the variability of electro-mechanical impedance caused by temperature effect is assessed to adjust impedance data used for EMI based damage detection in beams. First experiments on beams are described. Next, experiments were performed under the temperature varying condition, in the range of $3^{\circ}C\;to\;23^{\circ}C$. Finally, the relationship between temperatures and impedance signatures is analyzed empirically temperature-frequency patten for the test structure.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2002년도 합동 추계학술대회 논문집 정보 및 제어부문
• /
• pp.414-417
• /
• 2002

This paper describes the possibility of analyzing gait pattern from the variation of the lower leg electrical impedance. This impedance is measured by the four-electrode method. Two current electrodes are applied to the thigh and foot., and two potential electrodes are applied to the lateral aspect, medial aspect, and posterior position of lower leg. We found the optimal electrode position for knee and ankle joint movements based on high correlation coefficient, least interference, and maximum magnitude of impedance change. From such features of the lower leg impedance, it has been made clear that different movement patterns exhibit different impedance patterns and impedance level.

• Smart Structures and Systems
• /
• 제30권5호
• /
• pp.463-477
• /
• 2022

In this paper, a hybrid vibration-impedance-based damage monitoring approach is experimentally evaluated for prestressed concrete (PSC) structures with local strand breakage. Firstly, the hybrid monitoring scheme is designed to alert damage occurrence from changes in vibration characteristics and to localize strand breakage from changes in impedance signatures. Secondly, a full-scale PSC anchorage is experimented to measure global vibration responses and local impedance responses under a sequence of simulated strand-breakage events. Finally, the measured data are analyzed using the hybrid monitoring framework. The change of structural condition (i.e., damage extent) induced by the local strand breakage is estimated by changes in a few natural frequencies obtained from a few accelerometers in the structure. The damaged strand is locally identified by tomography analysis of impedance features measured via an array of PZT (lead-zirconate-titanate) sensors mounted on the anchorage. Experimental results demonstrate that the strand breakage in the PSC structure can be accurately assessed by using the combined vibration and impedance features.