• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.05c
• /
• pp.45-48
• /
• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Investigative Magnetic Resonance Imaging
• /
• v.10 no.2
• /
• pp.89-97
• /
• 2006

Purpose : To evaluate MR image qualities we developed a new MRI phantom with the fixation structures necessary to position it into coil firmly. Materials and methods : We designed MRI phantom for eight evaluation items such as slice thickness accuracy, high contrast spatial resolution, low contrast object detectability, geometry accuracy, slice position accuracy, image intensity uniformity, percent signal ghosting and signal to noise ratio. For the positioning of phantom at coils, the fixation structures were set up on the surface of phantom. Six different MRI units were used for test the possibility for the clinical application and their image qualities were evaluated. Results : We acquired appropriate MR image qualities enough for the evaluation on all used MR units and confirmed that their evaluations were within reliable values compared to real ones for some items. The positioning of our phantom into head coils with fixation structures worked well for proper imaging. Conclusion : We found that our prototype of MRI phantom had the possibility of clinical application for MR image quality assessment.

• The Korean Journal of Nuclear Medicine Technology
• /
• v.16 no.1
• /
• pp.70-75
• /
• 2012

Purpose: It is important to acquire accurate data because the SPECT scan affected by various physical factors. The aim of this study was to compare the uniformity when both centers were matched or mismatched differed from position of heart in COR. Materials and methods: The images were acquired with cylindrical uniform phantom (6.7 cm diameter, 9 cm length) and heart insert phantom using Cardio MD SPECT system (Philips, USA). The phantoms were positioned on COR as well as four different points which were 10 cm above, below, left and right side from the COR. The counts from the both edge of cylindrical uniform phantom and those from the both wall of heart insert phantom were compared by using vertical and horizontal line profile. In addition, the qualitative evaluation was performed with heart insert phantom images and volunteer test. Results: In heart insert phantom study, the differences of counts between COR and 10 cm above, below, left and right point of COR were 1.1, 4.1, 4.9, 2.2 and 0.9% using T-A curve for horizontal view. In case of vertical view of COR 3.9, 21.9, 3.5, 23.9, 14.0% were shown. In cylindrical phantom study, the differences of counts between COR and 10 cm above, below, left and right point of COR were 4.3, 0.3, 3.3, 2.6 and 0.7% using T-A curve for horizontal view. In case of vertical view of COR 2.7, 3.0, 1.0, 0.3, 3.4% were shown. For qualitative evaluation, the images at COR were the most uniform for both of heart insert phantom and volunteer test, whereas other four positions showed somewhat distorted images. Conclusion: It showed the most uniform images when COR is matched with the heart. Therefore, we can expect that distortion which increased or decreased of myocardial perfusion will be prevented by matching the heart and COR when positioning. Furthermore, the accuracy of diagnosis will be improved as well.

• Journal of the Microelectronics and Packaging Society
• /
• v.7 no.4
• /
• pp.23-29
• /
• 2000

We demonstrate the fabrication method of high-density and high-quality solder bump solving a copper (Cu) cross-contamination in Si-LSI laboratory. The Cu cross-contamination is solved by separating solder-bump process by two steps. Former is via-formation process excluding Cu/Ti under ball metallurgy (UBM) layer sputtering in Si-LSI laboratory. Latter is electroplating process including Ti-adhesion and Cu-seed layers sputtering out of Si-LSI laboratory. Thick photoresist (PR) is achieved by a multiple coating method. After TiW/Al-electrode sputtering for electroplating and via formation in Si-LSI laboratory, Cu/Ti UBM layer is sputtered on sample. The Cu-seed layer on the PR is etched during Cu-electroplating with low-electroplating rate due to a difference in resistance of UBM layer between via bottom and PR. Therefore Cu-buffer layer can be electroplated selectively at the via bottom. After etching the Ti-adhesion layer on the PR, Sn/Pb solder layer with a composition of 60/40 is electroplated using a tin-lead electroplating bath with a metal stoichiometry of 60/40 (weight percent ratio). Scanning electron microscope image shows that the fabricated solder bump is high-uniformity and high-quality as well as symmetric mushroom shape. The solder bumps with even 40/60 $\mu\textrm{m}$ in diameter/pitch do not touch during electroplating and reflow procedures. The solder-bump process of high-uniformity and high-density with the Cu cross-contamination free in Si-LSI laboratory will be effective for electronic microwave application.

• Elastomers and Composites
• /
• v.48 no.4
• /
• pp.282-287
• /
• 2013

Slot coating has been widely spread in photo resist coating on glass for flat display monitor. High quality of coating is required as high quality of image in display is needed. Coating quality in the slot coating is divided into nozzle direction quality and machine direction quality. Nozzle direction quality is related to flow uniformity inside the die whereas machine direction quality is related to die lip design and operational conditions. In this study coating uniformity in the machine direction of slot coating has been investigated through computer simulation. Die lip angle and die lip length were considered as outside die geometry and coating speed was considered as operational condition. Coating behavior has been analyzed and coating quality has been evaluated through computer simulation. Coating thickness decreased and coating uniformity increased as coating speed increased. However, the stability of meniscus formation was reduced and subsequently coating stability was reduced as coating speed increased. Coating thickness deviation decreased as die lip angle increased in down stream die. Coating thickness decreased and time to reaching steady state increased as increased die lip length in down stream die.

• Journal of Aerospace System Engineering
• /
• v.14 no.3
• /
• pp.42-50
• /
• 2020

For calibration of the non-uniformity characteristics of the space-borne infrared (IR) sensor, a black body system shall provide estimated representative surface temperature at various reference temperatures by using the limited number of temperature sensors. The black body system proposed in this study has an I/F flange integrated on the rear side of the black body for installation of the heat pipe to transfer the residual heat after the black body heat-up. This design allows for obtaining a circular symmetric thermal contour of black body with low surface temperature gradient, leading to much easier representative temperature estimation. Additionally, this provides mechanically stable thermal I/F under launch and on-orbit environmental loads, as well as allowing a fail safe design by using the two heat pipes. Also, a highly accurate temperature estimation is possible even if the temperature sensors are attached on the surface on the rear side of the black body. The effectiveness of the thermal design of the proposed black body has been verified through the on-orbit thermal analysis. Based on the results, the representative surface temperature was estimated according to the number and position of the temperature sensors.

• Journal of the Korea Institute of Information Security & Cryptology
• /
• v.25 no.5
• /
• pp.1257-1268
• /
• 2015

Multi-functional devices was originally an equipment performing image processing, but function transmitting image data digitized by combining fax function and function of network are added and it was rapidly developed. Also, functions of internet application, application expansion, remote sharing and image treatment were added to multi-functional devices. But, multi-functional devices can cause security vulnerability such as data exposure, eavesdropping, etc. because of the threatening by network connection. Therefore, common criteria of multi-functional devices are necessary, but there is no protection profile for multi-functional devices now. Therefore, concrete standards of evaluation are not applied to evaluate secure for products, so it was difficult to maintain uniformity of evaluation quality. Therefore, this paper developed protection profile for multi-functional devices based on common criteria of evaluation so as to analyze threats of multi-functional devices and use secure multi-functional devices.

• The Korean Journal of Community Living Science
• /
• v.24 no.2
• /
• pp.251-258
• /
• 2013

Korean oil and honey Yukwa has been paid attention as formal cake for traditional national seasons' holiday and religious service. Quality of Yukwa, however, has been maintained arbitrarily by each Yukwa manufacturer. Since even same Yukwa had severe differences in size, weight, and pattern, it has given the negative effect to the consumer. Yukwa industries need to setup the quantitative quality specifications instead of qualitative ones to maintain the uniformity of Yukwa quality. Efficient and economical inspection and process control system should be developed. In developing quality standards of Yukwa, features which can measure quality quantitatively in real time should be properly chosen. Existing quality features such as acidity, oxidization, hardness, viscosity, and texture were measured by the chemical or physical base destructive methods. Many research and developments have been performed in investigating and analyzing chemical transition states of those quality features as environment or storage condition changes. Most methods, however, require either off-line or complex treatment or time consuming process of analysis in evaluating quality features. Consumer, however, selects products mostly based on the external features such as shape, size, and color. Therefore, critical visual quality features should be chosen and the efficient real time measurement system must be developed. In this paper, computer image acquisition and processing system were developed and software modules were developed to extract the quantitative data of those features in real-time. Computer image processing system will promote in maintaining uniform quality of Yukwa and establishing quality standards of Yukwa.

• Proceedings of the KOSOMBE Conference
• /
• v.1997 no.11
• /
• pp.365-368
• /
• 1997

We are developing a small gamma camera or imaging malignant breast tumors. The small scintillation camera system consists of NaI(Tl) crystal ($60\;{\times}\;60\;{\times}\;6\;mm^3$) coupled to position sensitive photomultiplier tube (PSPMT), nuclear instrument module (NIM), analog to digital converter (ADC), and personal computer. High quality flood source image and hole mask image were obtained using the gamma camera developed in this study. Breast phantom containing $2{\sim}7\;mm$ diameter spheres was successfully imaged with parallel hole collimator. The obtained image displayed accurate activity distribution over the imaging field of view. Linearity and uniformity correction algorithms are being developed. It is believed that the developed small gamma camera could be useful or detection of malignant breast cancer.

• Journal of Biomedical Engineering Research
• /
• v.19 no.4
• /
• pp.351-360
• /
• 1998

Digital gamma camera has many advantages over analog gamma camera. These include convenient quality control, easy calibration and operation, and possible image quantitation which results in improving diagnostic accuracies. The digital data can also be utilized for telemedicine and picture archiving and communication system. However, many hospitals still operate analog cameras and have difficult situation to replace them with digital cameras. We have studied a feasibility of digitalizing an analog gamma camera into a digital camera using Gamma-PF interface board. The physical characteristics that we have measured are spatial resolution, sensitivity, uniformity, and image contrast. The patient's data obtained for both analog and digital camera showed very similar image quality. The results suggest that it may be feasible to upgrade an analog camera into a digital gamma camera in clinical environments.