• 한국정밀공학회지
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• 제19권6호
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• pp.62-69
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• 2002

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, corrective machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysis method proposed in the previous paper. These processes can be iterated until the analized motion errors are satisfied with target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail, after corrective machining, are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm is effective to acquire the corrective machining information to improve the accuracy of hydrostatic table.

• 한국정밀공학회지
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• 제19권5호
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• pp.56-63
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• 2002

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction farce is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geomatric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method(TFM). Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• International Journal of Precision Engineering and Manufacturing
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• 제4권2호
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• pp.64-70
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• 2003

A new method using a transfer function is introduced in the present paper for analyzing the motion errors of hydrostatic bearing tables. The relationship between film reaction force in a single-side hydrostatic pad and the form error of guide rail is derived at various spatial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called 'the averaging effect of an oil film' quantitively. It is found that the amplitude of film force is reduced as the spatial frequency increases or the relative width of the pocket is reduced. The motion errors of a multi pad type table are estimated using a transfer function, the form errors of a guide rail and the geometric relationship between the pads. The method is named as the Transfer Function Method (TFM). The motion errors calculated by the TFM show good agreement with the motion errors calculated by the Multi Pad Method considering the entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 한국정밀공학회지
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• 제27권7호
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• pp.94-100
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• 2010

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design, following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 $N/{\mu}m$ and 97.6 $N/{\mu}m$ for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 ${\mu}m$ radial direction and 0.05 ${\mu}m$ axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and $0.5/10000^{\circ}$ of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the $\pm0.39$ arcsec accuracy and $\pm0.16$ arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

• 한국정밀공학회지
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• 제14권8호
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• pp.130-136
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• 1997

For compensating the error motion of hydrostatic guideways, we introduce a way that the clearance of table is actively controlled corresponding to the amount of error with the variable capillary. The structure and the theoretical design method of active controlled capillary using piezo actuator, named ACC, are proposed in this paper. Basic characteristics such as the maximum controllable range, micro step response and available dynamic bandwidth are tested for confirmation of structural suitability of ACC, and these characteristics are also tested on the table mounted with ACC for verifying the availability. The experimental result showed that by the use of ACC, the error motion within 2.7 .mu. m of a hydrostatic guideway can be compensated with the resolution of 2.7nm, 1/100 contollable range, and the frequency bandwidth of 5.5 Hz. From these results, it is confirmed that the ACC is very effective to improve the motion accuracy of high or ultra precision hydrostatic guideways.

• 대한기계학회논문집A
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• 제30권12호
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• pp.1634-1641
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• 2006

High-precision centerless grinding machines are emerging as a means of finishing the outer diameter grinding process required for ferrules, which are widely used as fiber optic connectors. In this study, a sensitivity analysis for structural and thermal characteristics was carried out using a virtual prototype of a centerless grinding machine to realize systematic design technology and performance improvements required to manufacture ferrules. The prototype consisted of a concrete-filled bed, hydrostatic grinding wheel (GW) and regulating wheel (RW) spindle systems, a hydrostatic RW table feed mechanism, a RW swivel mechanism, and on-machine GW and RW dressers. The results of the structural sensitivity analysis illustrated that the vertical stiffness of hydrostatic guideway for the RW table feed system greatly influenced the horizontal loop stiffness, and the results of the thermal sensitivity analysis illustrated that the heat generation rates at hydrostatic bearings and belt pulley greatly influenced the temperature rise of hydrostatic bearings and the deviation of thermal displacement between GW and RW.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.531-532
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• 2011