• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.137-144
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically. Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.380-384
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• 1997

For improving the motion accuracy of hydrostatic table, corrective machining algorithm is proposed in this paper. The algorithm consists of three main processes. Reverse analysis is performed firstly to estimate rail profile from measured linear and angular motion error, in the algorithm. For the next step, correctwe machining information is decided as referring to the estimating rail profile. Finally, motion errors on correctively machined rail are analized by using motion error analysls method proposed in the previous paper. These processes can be rtcrated if the analized motion errors are worse than target accuracy. In order to verify the validity of the algorithm theoretically, motion errors by the estimated rail after corrective machining are compared with motion errors by true rail assumed as the measured value. Estimated motion errors show good agreement with assumed values, and it is confirmed that the algorithm IS effective to acquire the corrective machming information to improve the accuracy of hydrostatic table.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.1
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• pp.94-100
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• 1998

Microstep characteristics largely depends on the variation of friction force induced by the geometric accuracy of ballscrew, guide rail and the control characteristics of servo unit. In this paper, for improving the microstep characteristics of hydrostatic table with ballscrew, microstep resolution according to the control mode of servo amplifier and response characteristic by the variation of integral gain are tested and compared. Relationship between micro motion behavior of hydrostatic table and the output torque is also tested for acquiring the effective variables on control characteristics. From the results. it is confirmed that the torque control mode has a advantage in microstep resolution, and more stable than velocity control mode in low feed rate, and by the increase of integral gain in the elastic motion realm, response characteristics can be improved.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.70-76
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• 2002

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective machina work practically to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13$\mu$m of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07$\mu$m of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by an unskilled person after he experienced a little of preliminary machining training. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.6
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• pp.571-576
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• 2015

Temperature characteristics of supply oil in an ultra-precision hydrostatic table are largely influenced by parameter setting in an oil cooler such as the location of reference sensor and cooling temperature. In this paper, influences of the parameter setting on the temperature variation in the hydrostatic table are experimentally analyzed to suggest the guidelines for practical application. In case of using temperature of inlet oil as a reference sensor in the oil cooler, temperature rise of the supply oil is smaller and thermal settling time is faster than that of using temperature of outlet oil as a reference sensor. The experimental results also show that temperatures of table, rail and return oil can be made almost same, and thermal settling time can be decreased by setting cooling temperature in the oil cooler to be lower than atmospheric temperature.

• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.773-776
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• 2005

In this paper, For improving the positioning accuracy of hydrostatic table, relationship between temperature of atmosphere and thermal characteristics of hydrostatic table is analyzed, and influence of thermal characteristics on positioning accuracy is also analyzed experimentally. From the experimental results, it is confirmed that positioning error and repeatability is $0.21{\mu}m\;and\;0.18{\mu}m$ when the laser scale which has $0.01{\mu}m$ of resolution is used as feed-back unit. and also confirmed that thermal deformation of scale and supporter, which occurs by the temperature variation of atmosphere, works as limit of repeatability in long time operation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.643-647
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• 1996

The dynamic behavior of hydrostatic table is represented as the theoretical model, 1-dof, 2-dof rigid body spring-damper system, and finite element model. By the experimental and theoretical methods, the validity of these models and some other dynamic behaviors, such as the effects of unbalanced load and three dimensional motion, are investigated. To make easier to consider the dynamic behavior of hydrostatic table in design process, the stiffness and damping coefficients are calculated using the simple approximation method delived from the mass flow continuity condition, and compared with experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.595-596
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• 2012