• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.91-91
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• 2009

In the past decade, Pd based thin films have been studied far hydrogen gas sensors due to their high possibility for energy industry and environmental applications. In this work, we report a navel method to fabricate highly sensitive hydrogen gas sensors based on PdO thin films. The films were deposited on Si substrates in Ar and $O_2$ ambient using reactive sputtering system. A semiconductor process has been utilized to fabricate PdO films with t=40nm. We observed the resistance changes of the PdO films with various $H_2$ concentrations. It was found that the electrical properties of the thin films depend on the composition of oxygen. The sensitivity is defined as $S\;=\;(R_0-R)/R{\times}100%$, where R and $R_0$ are the resistances in the presence of exposing the hydrogen gas and air, respectively. The sensitivity of the thin films was found to be as high as about 95%. After exposing to hydrogen gas, we discovered that the nano-sized cracks formed on the surface of the PdO thin films. The nano-cracks formed in deoxidized PdO thin films were known by playing a key role to reduce more than 4 times the response time of absorption. Our results illustrate that the deoxidized PdO thin films can be used as hydrogen sensors.

• 센서학회지
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• 제19권2호
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• pp.87-91
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• 2010

Hydrogen gas sensors were fabricated using $PdO_x$ loaded with SWNTs. The nanoparticle powders of $SWNT_s-PdO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : $PdO_x$ = 98 : 2 in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.

• 한국수소및신에너지학회논문집
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• 제16권2호
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• pp.136-141
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• 2005

Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

• 센서학회지
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• 제32권3호
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• pp.194-198
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• 2023

With the recent development of industrial technology, the problem of odor due to leakage of toxic gas discharged from industrial complexes is gradually increasing. Among them, hydrogen sulfide is a colorless representative odorous substance that can cause pain through irritation of the mucous membranes of the eyes and respiratory tract, and is a gas that can cause central nervous system paralysis and suffocation when exposed to high concentrations. Therefore, in order to improve the odor problem, research on a gas sensor capable of quickly and reliably detecting a leak of hydrogen sulfide is being actively conducted. A lot of research has been done on the existing metal oxide-based hydrogen sulfide gas sensor, but it has the disadvantage of requiring low selectivity and high temperature operating conditions. Therefore, in this study, a Pt/CNT-based electrochemical hydrogen sulfide gas sensor capable of detecting at low temperatures with high selectivity for hydrogen sulfide was developed. A working electrode capable of selectively detecting only hydrogen sulfide was fabricated by synthesizing Pt nanoparticles as a catalyst on functionalized CNT and applied to an electrochemical hydrogen sulfide gas sensor. It was confirmed that the manufactured Pt/CNT-based electrochemical hydrogen sulfide gas sensor has a current change of up to 100uA for hydrogen sulfide, and the both response time and recovery time were within 15 seconds.

• 센서학회지
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• 제29권6호
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• pp.374-381
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• 2020

Hydrogen gas has attracted considerable attention as a promising candidate for future energy resources because of its eco-friendly characteristics; however, its highly combustible characteristics should be thoroughly examined to preclude potential disasters. In this regard, a highly sensitive method for the selective detection of H₂ is extremely important. To achieve excellent H₂ selectivity, the utilization of a metal-organic framework (MOF) membrane can physically screen interfering gas molecules by restricting the size of kinetic diameters that can penetrate its nanopores. This paper summarizes the various endeavors of researchers to utilize the MOF molecular sieving layer for the development of highly selective H₂ sensors. Further, the review affords useful insights into the development of highly reliable H₂ sensors.

• 한국수소및신에너지학회논문집
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• 제3권2호
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• pp.17-24
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• 1992

Hydrogen gas sensors were fabricated after the form of metal/insulator/semiconductor(MIS) structure on a p-type silicon wafer and a insulating layer (silicon dioxide) thickness was changed from $500{\AA}$ to $5000{\AA}$. Their electrical properties were investigated with the variation of the hydrogen gas concentration at room temperature. At the applied forward bias of lV to both ends of Pd-MIS sensors the current was decreased logarithmically with the increase of hydrogen concentration in air. In the case of a thin $SiO_2$ layered ($500{\AA}$) sensor the current ratio was decreased to 25 % at 1 % of hydrogen concentration in air and 50% for a thick $SiO_2$ layered ($5000{\AA}$) sensor. And the response time of the thick insulating layered sensor to 1% hydrogen containing air was about 50 seconds and regeneration time was 2.5 minutes. When a 0.5mA current was appied to the thick insulating layered sensor the maximun voltage shift was calculated to 0.8V in the case of ${\theta}$ = 1 and the Pd surface coverage of hydrogen was increased logarithmically with hydrogen partial pressure.

• 한국수소및신에너지학회논문집
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• 제34권2호
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• pp.205-211
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• 2023

Hydrogen gas is light and diffuses very quickly. Therefore, when a leakage accident occurs, the damage is great, so a technology that can quickly measure the leakage in the air at a long distance is needed. In order to develop hydrogen gas leaked in the atmosphere in a non-contact manner, an experiment was performed to measure hydrogen gas using a lidar technology using the Raman effect. Hydrogen Raman signals were detected using a UV LED light source, which is a Raman light source, and a spectrometer in the ultraviolet region including an optical filter in the 400-430 nm band. To develop this, a Raman lidar optical structure was designed to measure the hydrogen Raman signal at a certain distance, and the hydrogen Raman spectrum was confirmed using a standard gas to evaluate the performance of this optical structure. The linearity was found to be 0.99 using hydrogen standard gas (10, 50, 100, 500, 1,000 ppm). Accordingly, a Raman lidar capable of measuring hydrogen gas rapidly diffusing in the air in an open state was developed to improve the limitations of existing hydrogen sensors.

• 센서학회지
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• 제29권6호
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• pp.399-406
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• 2020

Pd nanogap hydrogen sensors were developed using an elastomeric substrate and operated through an on-off mechanism. A 10 nm thick Pd thin film was formed on a polydimethylsiloxane (PDMS) substrate, and 50% of the physical strain was applied in the longitudinal direction to fabricated uniform nanogaps. The initial concentration of the hydrogen gas for the PDMS/Pd films was controlled, and subsequently, the on-off switching response was measured. We found that the average nanogap was less than 50 nm, and the Pd nanogap hydrogen sensors operated over a wide range of temperatures. In particular, the sensors work properly even at a very low temperature of -40℃ with a fast response time of 2 s. In addition, we have investigated the relative humidity and annealing effects.

• 센서학회지
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• 제18권3호
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• pp.202-206
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• 2009

Flat type catalytic combustible hydrogen sensors were fabricated using platinum micro-heaters and sensing material pastes. The platinum micro-heater was formed on an alumina substrate by sputtering method. The paste for the sensing materials was prepared using ${\gamma}-Al_2O_3$ 30 wt%, $SnO_2$ 35 wt%, and Pd/Pt 30 wt% and coated on the platinum micro-heater. The sensing performances were tested for the prepared sensors with different substrate sizes. The micro catalytic combustible hydrogen sensors showed quick response time, high reliability, and good selectivity against various gases(CO, $C_3H_8,\;CH_4$) at low operating temperature of $156^{\circ}\C$.

• 센서학회지
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• 제30권6호
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• pp.376-380
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• 2021

The accurate detection of hydrogen gas molecules is considered to be important for industrial safety. However, the selective detection of the gas using semiconductive metal oxides (SMOs)-based sensors is challenging. Here, we describe the fabrication of H₂ sensors in which a nanocellulose/graphene oxide (GO) hybrid membrane is attached to SnO₂ nanosheets (NSs). One-dimensional (1D) nanocellulose fibrils are attached to the surface of GO NSs (GONC membrane) by mixing GO and nanocellulose in a solution. The as-prepared GONC membrane is employed as a sacrificial template for SnO₂ NSs as well as a molecular sieving membrane for selective H₂ filtration. The combination of GONC membrane and SnO₂ NSs showed substantial selectivity to hydrogen gas (R_air / R_gas > 10 @ 0.8 % H₂, 100 ℃) with noise level responses to interfering gases (H₂S, CO, CH₃COCH₃, C₂H₅OH, and NO₂). These remarkable sensing results are attributed mainly to the molecular sieving effect of the GONC membrane. These results can facilitate the development of a highly selective H₂ detector using SMO sensors.