Browse > Article
http://dx.doi.org/10.5369/JSST.2010.19.2.087

Hydrogen sensor of SWNT-PdOx system using the vacuum filtering deposition method  

Kim, Il-Jin (Department of Special Weapons, Daeduk University)
Park, Kee-Bae (KIER)
Publication Information
Journal of Sensor Science and Technology / v.19, no.2, 2010 , pp. 87-91 More about this Journal
Abstract
Hydrogen gas sensors were fabricated using $PdO_x$ loaded with SWNTs. The nanoparticle powders of $SWNT_s-PdO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against hydrogen gas. The composition ratio that exhibited the highest response to hydrogen gases was SWNTs : $PdO_x$ = 98 : 2 in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times were shorter than 1.0 min. in presence of 1000 ppm hydrogen.
Keywords
hydrogen sensor; vacuum filtering deposition; SWNTs;
Citations & Related Records
Times Cited By KSCI : 9  (Citation Analysis)
연도 인용수 순위
1 김민주, 윤광현, 허증수, "단층 탄소나노튜브의 일산화질소 가스에 대한 감응특성과 열처리 효과", J. Kor. Sensors Soc., vol. 13, no. 4, pp. 292-297, 2004.   DOI   ScienceOn
2 조우성, 문승일, 백경갑, 박정호, "주병권패턴이 형성된 탄소나노튜브 매트의 이산화질소 감응 특성", J. Kor. Sensors Soc., vol. 15, no. 3, pp. 199-204, 2006.   DOI   ScienceOn
3 Junya Suehiro1, Guangbin Zhou, and Masanori Hara, "Fabrication of a carbon nanotube-based gas sensor using dielectrophoresis and its application for ammonia detection by impedance spectroscopy", J. Phys. D: Appl. Phys. vol. 36, pp. 109-114, 2003.   DOI   ScienceOn
4 W-S Cho, S-I Moon, Y-D Lee, Y-H Lee, J-H Park, and B K J, "Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure", Electron Device Letters, vol. 26, pp. 498-500, 2005.   DOI   ScienceOn
5 S. Iijima, "Helical microtubules of graphitic carbon", Nature, vol. 354, pp. 56-58, 1991.   DOI
6 Ray H. Baughman, Anvar A. Zakhidov, and Walt A. de Heer, "Carbon nanotubes-the route toward applications", Science, vol. 297, pp. 787-792, 2002.   DOI   ScienceOn
7 김일진, 전영집, 최창규, 이영욱, 최시영, 한창수, 한상도, "진공여과증착법을 이용한 SWNT-PtOx계 마이크로 톨루엔 가스센서", J. Kor. Sensors Soc., vol. 18, No. 2 pp. 179-183, 2009.   DOI   ScienceOn
8 Y. Makita, S. Suzuki, H. Kataura, and Y. Achiba, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Eur. Phys. J. D, vol. 34, pp. 287-289, 2005.   DOI
9 H-H Kim and H-J Kim, "Synthesis of single wall carbon nanotubes by using arc discharge technique in nitrogen atmosphere", Japanese J. Applied Physics, vol. 46, pp. 1818-1820, 2007.   DOI
10 A.Katsuki and K.Fukui, "$H_2$ Selective gas sensor based on $SnO_2$", Sens. Actuators B, vol. 78, pp. 83-88, 2001.   DOI   ScienceOn
11 T. Sasahara, A. Kido, H. Ishihara, T. Sunayama, and M. Egashira, "Highly sensitive detection of volatile organic compounds by an adsorption/combustion-type sensor based on mesoporous silica", Sens. Actuators B, vol. 108, pp. 478-483, 2005.   DOI   ScienceOn
12 Chi-Hwan Han, Sang-Do Han, Ishwar Singh, and Thierry Toupance, "Micro-bead of nano-crystalline F-doped $SnO_2$ as a sensitive hydrogen gas sensor", Sens. Actuators B, vol. 109, pp. 264-269, 2005.   DOI   ScienceOn
13 홍대웅, 한치환, 김일진, 천성식, 한상도, 이상렬, "$Pd/ TiO_2$, $Pt/TiO_2$ 촉매를 이용한 접촉연소식 수소센서", 한국센서학회 종합학술대회 논문집, pp. 260-263, 2006.
14 김찬우, 곽지혜, 전일수, 한상도, 최시영, "평판형 접촉연소식 마이크로 수소센서의 감지특성 향상", J. Kor. Sensors Soc., vol. 18, no. 3, pp. 202-206, 2009.   DOI   ScienceOn
15 홍대웅, 한치환, 한상도, 곽지혜, 이상렬, "광촉매와 UV LED를 이용한 접촉연소식 수소센서", J. Kor. Sensors Soc., vol. 16, no. 1, pp. 7-10, 2007.   과학기술학회마을   DOI
16 조우성, 문승일, 김영조, 박정호, 주병권, "다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성", J. Kor. Sensors Soc., vol. 15, no. 1, pp. 13-19, 2006.   DOI   ScienceOn
17 정귀상, 안정학, "Pd/다결정 3C-SiC 쇼트키 다이오드형 수소센서의 제작과 그 특성", J. Kor. Sensors Soc., vol. 18, no. 3, pp. 222-225, 2009.   DOI   ScienceOn
18 김광호, 최광표, 권용, 박진성, "수소 센서용 Pd 첨가한 박막의 특성", J. Kor. Sensors Soc., vol. 15, no. 2, pp. 120-126, 2006.   DOI   ScienceOn
19 강기호, 조용수, 한상도, 최시영, "Pd-black 촉매금속 이용한 고성능 MISFET 형 수소센서", J. Kor. Sensors Soc., vol. 15, no. 2, pp. 90-96, 2006.   DOI   ScienceOn
20 A. Fujiwara, K. Ishii, and H. Suematsu, "Gas adsorption in the inside and outside of single-walled carbon nanotubes", Chemical Physics Letters, vol. 336, no. 3-4, pp. 205-211, 2001.   DOI   ScienceOn
21 C. Cantalini, W. Wlodarski, and Y. Li, "Investigation on the $O_3$ sensitivity properties of $WO_3$ thin films prepared by sol-gel, thermal evaporation and r.f. sputtering techniques", Sensors and Actuators B, vol. 64, no. 1-3, pp. 182-188, 2000.   DOI   ScienceOn