• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.246-246
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• 2010

As the trench width in the interconnect technology decreases down to nano-scale below 50 nm, superconformal gap-filling process of Cu becomes very critical for Cu interconnect. Obtaining superconfomral gap-filling of Cu in the nano-scale trench or via hole using MOCVD is essential to control nucleation and growth of Cu. Therefore, nucleation of Cu must be suppressed near the entrance surface of the trench while Cu layer nucleates and grows at the bottom of the trench. In this study, suppression of Cu nucleation was achieved by treating the Ru barrier metal surface with capacitively coupled hydrogen plasma. Effect of hydrogen plasma pretreatment on Cu nucleation was investigated during MOCVD on atomic-layer deposited (ALD)-Ru barrier surface. It was found that the nucleation and growth of Cu was affected by hydrogen plasma treatment condition. In particular, as the plasma pretreatment time and electrode power increased, Cu nucleation was inhibited. Experimental data suggests that hydrogen atoms from the plasma was implanted onto the Ru surface, which resulted in suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. Due to the hydrogen plasma treatment of the trench on Ru barrier surface, the suppression of Cu nucleation near the entrance of the trenches was achieved and then led to the superconformal gap filling of the nano-scale trenches. In the case for without hydrogen plasma treatments, however, over-grown Cu covered the whole entrance of nano-scale trenches. Detailed mechanism of nucleation suppression and resulting in nano-scale superconformal gap-filling of Cu will be discussed in detail.

• 한국수소및신에너지학회논문집
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• 제32권3호
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• pp.156-162
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• 2021

Mg hydride has a relatively high hydrogen storage amount of 7.6wt%, and inexpensive due to abundant resources, but has high reaction temperature and long reaction time because of treble oxidation reactivity and upper activation energy. Their range of applications could be further extended if their hydrogenation kinetics and degradation behavior could be improved. Therefore, the effect of CaO has improved the hydrogenation kinetics and slowed down the degradation. This study focused on investigating whether to improve the hydrogenation kinetics by synthesizing Mg₂NiH_x-5wt% CaO composites. The Mg₂NiH_x-5wt% CaO composites have been synthesized by hydrogen induced mechanical alloying. The synthesized composites were characterized by performing X-ray diffraction, Scanning Electron Microscopy, Brunauer-Emmett-Teller, Thermogravimetric, and Sivert's type automatic pressure-composition-temperature analysis. Hydriding kinetics were performed using an automatic PCT measurement system and evaluated over the temperature range of 423 K, 523 K, and 623 K. As a result of calculating the hydrogen adsorption amount through the hydrogenation kinetics curve, it was calculated as about 0.42wt%, 0.91wt%, and 1.15wt%, the highest at 623 K and the lowest at 423 K.

• Korean Chemical Engineering Research
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• 제45권2호
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• pp.143-148
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• 2007

도시가스를 원료로 수소를 제조하여 연료전지에 활용할 경우에 도시가스에 포함된 황화합물이 개질기의 촉매와 연료전지의 전극에 독으로 작용하므로 금속이온이 담지 된 $\beta$-제올라이트(BEA)로 황화합물 흡착 제거를 수행하였다. 담지 된 금속염의 농도, 종류에 따라 파과흡착량이 달라졌으며, $AgNO_3$이 담지 된 흡착제가 실험에 사용된 흡착제 중 가장 높은 파과흡착량을 나타내었다(41.1 mg/g). 그러나 $Ni(NO_3)_2$, $Fe(NO_3)_3$, $Co(NO_3)_2$와 같은 금속염이 담지 된 BEA도 $AgNO_3/BEA$와 비교할 수준의 황화합물 흡착량을 나타냈다. $AgNO_3/BEA$ 흡착제 특성 분석과 온도 영향성 실험 및 X선 광전자 분광기(x-ray photoelectron spectroscopy, XPS) 분석을 통하여 흡착제와 황화합물 사이에 작용하는 힘은 금속이온과 황화합물간의 화학적 상호작용보다 물리적 상호작용이 우세한 것으로 나타났다.

• 품질경영학회지
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• 제43권3호
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• pp.359-372
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• 2015

Purpose: Through studying the expert's and non-experts panel responses to the questions regarding the attributes of chemical-biological protection cloth quality in terms of the levels of customer demand and technical factors has been studied. We are applied to a QFD matrix with find out the relationship between the selective removal efficiency of chemical-biological cloth and the guidelines of technical approach. Methods: We fabricated several composite of ion-exchange resins with selectively permeable performance designed to facilities water vapor transport and selective adsorption of the harmful gases. With these materials, we characterized on the selectively permeable performance to identify ion-exchange resin with chemical-biological protective cloth. Results: Results showed that ion exchange materials possessed performance with selectively efficiencies as NH3, SOx, NOx and HCl gas. The selective adsorption amount of ammonia and hydrogen gases were $90-80{\mu}g/g$ with TRILITE SCR-BH sulfonated ion exchange resin. The PP non-woven/ion exchange resin adsorbent materials possessed performance with water vapor permeability were 1,100-1,350 g/m2/day, it's was two times high value compare with activated carbon. With these materials, we characterized selectively removal efficiency to identify new ion-exchange material with chemical-biological protective capability. Conclusion: This study shows that a QFD aids in deciding with of the adsorption parameters to optimized with chemical-biological protection cloth manufacturing.

• 공업화학
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• 제34권2호
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• pp.153-160
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• 2023

본 논문에서는 미이용 바이오매스로부터 바이오차를 생산하고 메틸렌블루 흡착 특성을 평가하였다. 바이오매스는 주로 셀룰로오스, 헤미셀룰로오스, 리그닌으로 구성되어 있으며 회분의 함량은 벌채부산물에서 가장 높았다. 탄화 온도가 증가할수록 탄화 수율은 감소하였으며, 수소와 산소 함량도 감소하였다. 반면, 탄소 함량은 증가하였다. 탄화 온도가 증가할수록 바이오차의 비표면적과 미세기공은 증가하였다. 바이오차 비표면적은 탄화 온도 600 ℃에서 가장 높았다(216.15~301.80 m² /g). 600 ℃에서 탄화한 바이오차를 이용하여 메틸렌블루 흡착 실험을 수행한 결과, 참나무, 벌채부산물, 사과 전정가지의 흡착 거동은 Freundlich model, 복숭아 전정가지는 Langmuir model에 적합하였다. 흡착 동역학에서 참나무와 복숭아 전정가지는 pseudo-first-order model, 벌채부산물과 사과 전정가지는 pseudo-second-order model에 적합하였다.

• 한국의류학회지
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• 제23권4호
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• pp.510-516
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• 1999

Dyeing properties of cotton fabrics with green tea colorants were studied by investigating the effects of dyeing conditions such as colorants concentration. pH dyeing temperature and time on dye uptakes effects of mordats on dye uptakes and color change and effects of cationizing agent on dye uptakes. And various colorfastnesses of dyed fabrics were evaluated for practical use. Green tea colorants showed low affinity to cotton and produced yellowish red color. Freundlich adsorption isotherm was obtained thus it is considered that hydrogen bondings are formed between colorants and cotton. Dye uptake was maximum at pH 5 and decreased as pH increased. Mordants especially Cu and Sn were effective for increasing dye uptake. Dye uptakes were improved remarkably by cationizing. Cationized cotton showed Langumuir adsorption isotherm indicating that ionic bondings were formed between colorants and cationized cotton. While mordanting did not affect lightfastness cationizing affected adversely. Colorfastness of cationized sample was generally inferior to that of mordanted samples.

• 한국의류학회지
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• 제26권1호
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• pp.124-132
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• 2002

Dyeing properties of silk fabric on gromwell roof colorants were studied for the effect of dyeing conditions, such as methanol ratio, colorants concentration, pH, temperature and time etc. on the dye uptake and effect of mordants and mordanting methods on color change and dye uptake. And various colorfastnesses of dyed fabrics were evaluated far practical use. Gromwell colorants showed high affinity to silk and its isotherm adsorption curve was Freundlich type close to Nernst type. Therefore, it is considered that hydrogen bonding and Van der Waals force were involved in the adsorption of cromwell colorants to silk fabric. Post-mordanting method gave higher K/S value than other methods, but it was not significantly different color values from unmordanted one. Gromwell colorants produced mainly R and RP color depending on mordants and mordanting method. Dyed fabrics showed high colorfastness irrespective of mordanting treatment. Light colorfastness was increased for repeatedly dyed and Fe mordanted dyed fabrics.

• Bulletin of the Korean Chemical Society
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• 제35권2호
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• pp.377-382
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• 2014

Micro-/macroporous carbons (MMCs) were prepared using a hollow mesoporous silica capsule (HMSC) as a sacrificial hard template. The carbonization process after the infiltration of furfuryl alcohol into the template-free HMSC material afforded MMC materials in high yield. The hard template HMSC could be removed by HF etching without deteriorating the structure of MMC. The MMC materials were fully characterized by SEM, TEM, PXRD, XPS, and Raman spectroscopy. The replication processes were so successful that MMCs exhibited a hollow capsular structure with multimodal microporosity. Detailed textural properties of MMC materials were investigated by volumetric $N_2$ adsorption-desorption analysis at 77 K. To explore the gas sorption abilities of MMCs for other gases, $H_2$ and $CO_2$ sorption analyses were also performed at various temperatures. The multimodal MMC materials were found to be good sorbents for both $H_2$ and $CO_2$ at low pressure.

• 한국의류학회지
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• 제26권3_4호
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• pp.422-430
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• 2002

Dyeing properties of the colorants from gromwell on cotton fabric were investigated. The effects of dyeing conditions on dye uptake and the effects of mordants and mordanting methods on K/S value, color change and colorfastness were explored. Gromwell colorants showed low affinity to cotton fabric, and its adsorption isotherm was Freundlich type close to Langmuir type. Therefore, it was considered that hydrogen bonding and Vander Waals force were involved in the adsorption of gromwell colorants to cotton fabric. Pre-mordanting method except Sn mordant gave higher K/S value but it was not significant. Gromwell colorants produced mainly R and RP color on cotton fabric depending on mordants and mordanting method. Dyed cotton fabric showed generally high colorfastness irrespective of mordanting treatment. Light colorfastness was increased by repeat dyeing and Fe and Sn mordanting.

• 신재생에너지
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• 제2권2호
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• pp.60-68
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• 2006

소수 station의 수소분리정제를 위한 compact형 PSA 공정을 연구하였다. 기존 PSA 공정의 흡착탑이 차지하는 시스템의 공간을 줄이기 위하여 하나의 흡착탑 안에 다른 흡착탑을 넣어 흡착탑이 차지하는 공간을 최소화하였으며, 흡착탑 간의 열교환이 효과적으로 일어나도록 설계하였다. 수소 혼합물에 대한 활성탄으로 충진된 dual bed에서의 수소 혼합물에 대한 흡/탈착 동특성 실험을 실시하였으며, 시간에 따른 농도와 온도의 변화를 측정하였다. 수소 혼합물로는 $H_2/CO/CH_4/CO_2$ (69:2:3:26 vol.%) 를 사용하였으며, 흡착유량은 7LPM, 흡착압력은 9atm 조건에서 운전하였다. Inner bed와 outer bed의 성능은 각각의 열전달 특성의 차이로 인하여 다르게 나타났으나, 단일탑의 동특성보다는 우수한 성능을 보이고 있었다. 따라서 개발된 dual bed는 적은 부지를 차지하면서도, 보다 우수한 수소 분리 성능을 보일 수 있는 PSA 공정에 응용될 수 있음을 확인하였다.