• 마이크로전자및패키징학회지
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• 제25권4호
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• pp.129-135
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• 2018

신축성 기판은 신축성 전자소자의 신축성, 공정성, 내구성을 결정하는 매우 중요한 소재로서 신축성 전자소자를 개발함에 있어서 우선적으로 고려해야 된다. 특히 현재 사용되는 신축성 기판은 히스테리시스가 존재하여 센서 및 기타 응용에 많은 어려움이 있다. 본 연구에서는 신축성 소재 기판으로 사용되는 PDMS와 Ecoflex를 혼합한 PDMS-Ecoflex 하이브리드 신축성 기판을 제작하여 신축성과 히스테리시스 특성을 향상하고자 하였다. 인장 시험을 통하여 신축성 하이브리드 기판의 기계적 거동을 관찰하였으며, 투과도 측정을 통하여 투과도를 평가하였다. Ecoflex의 함량이 증가할수록 하이브리드 신축성 기판은 더 유연해지며, 탄성계수는 감소한다. 또한 PDMS 기판은 270% 변형률에서 파단이 발생한 반면, PDMS-Ecoflex 하이브리드 기판은 500%의 변형률까지 파단되지 않으며 우수한 신축성을 갖는 것을 알 수 있었다. 반복 인장시험에서 PDMS와 Ecoflex의 혼합비를 2:1로 제작된 기판은 히스테리시스가 발생하였다. 반면 1:1의 혼합비로 제작된 기판의 경우 50%, 100%의 변형률에서는 히스테리시스가 발생하지 않았다. 결론적으로 500% 이상의 신축성을 갖으면서 히스테리시스가 없은 기판을 제작하였다. 기판의 혼합비에 따른 광투과도 측정 결과, Ecoflex 기판의 투과도는 68.6% 이였으나, PDMS-Ecoflex 함량이 2:1, 1:1인 하이브리드 기판의 경우, 각각 78.6%, 75.4%의 투과율을 보이며, 향후 투명 신축성 기판으로서 개발 가능성을 보여주었다.

• 대한기계학회논문집A
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• 제31권12호
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• pp.1139-1143
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• 2007

A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

• 한국산학기술학회논문지
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• 제15권5호
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• pp.3139-3145
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• 2014

본 논문에서는 가유전체 기판을 이용하여 소형화한 마이크로파 대역의 링 하이브리드 커플러 설계에 대하여 기술한다. 가유전체 기판은 다수의 비어홀을 제 2기판에 삽입하여 유효 커패시턴스를 크게 증가시킨 구조를 갖는다. 가유전체 기판의 유효유전율은 표준형 기판에 비하여 크게 증가하게 되는데, 이에 의하여 동일한 전기적 길이 대비 물리적 길이가 크게 감소하므로 마이크로파 전송선로를 소형화시킬 수 있다. 이런 원리를 마이크로파 무선회로 설계에 적용한 사례를 보이기 위하여 가유전체 기판을 이용하여 3GHz대 링 하이브리드 커플러를 설계하고 실제로 제작 및 측정한 결과를 제시한다. 설계된 소형화된 링 하이브리드 커플러는 표준형에 비하여 전기적 성능은 유사하면서도 65%의 크기를 가진다. 측정된 전력분배비는 각각 -3.05dB와 -3.135dB이며, 두 출력간의 위상차는 동위상일 때 3도, 역위상일 때 176도로 이상적인 값과 매우 유사하다. 이로써 가유전체 기판구조로 소형화된 링 하이브리드 커플러의 설계가 타당함을 보인다.

• 한국재료학회지
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• 제24권10호
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• pp.543-549
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• 2014

A zinc oxide (ZnO) hybrid structure was successfully fabricated on a glass substrate by metal organic chemical vapor deposition (MOCVD). In-situ growth of a multi-dimensional ZnO hybrid structure was achieved by adjusting the growth temperature to determine the morphologies of either film or nanorods without any catalysts such as Au, Cu, Co, or Sn. The ZnO hybrid structure was composed of one-dimensional (1D) nanorods grown continuously on the two-dimensional (2D) ZnO film. The ZnO film of 2D mode was grown at a relatively low temperature, whereas the ZnO nanorods of 1D mode were grown at a higher temperature. The change of the morphologies of these materials led to improvements of the electrical and optical properties. The ZnO hybrid structure was characterized using various analytical tools. Scanning electron microscopy (SEM) was used to determine the surface morphology of the nanorods, which had grown well on the thin film. The structural characteristics of the polycrystalline ZnO hybrid grown on amorphous glass substrate were investigated by X-ray diffraction (XRD). Hall-effect measurement and a four-point probe were used to characterize the electrical properties. The hybrid structure was shown to be very effective at improving the electrical and the optical properties, decreasing the sheet resistance and the reflectance, and increasing the transmittance via refractive index (RI) engineering. The ZnO hybrid structure grown by MOCVD is very promising for opto-electronic devices as Photoconductive UV Detectors, anti-reflection coatings (ARC), and transparent conductive oxides (TCO).

• Journal of Welding and Joining
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• 제18권6호
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• pp.96-101
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• 2000

Sintered alumina ceramic substrate has been used for the insulating substrate for thick Hybrid IC owing to its cheapness and good insulating properties. Some of thick HIC's are important to eliminate the heat emitted from the parts that are mounted on the ceramic substrate. Sintered ceramic substrate can not transfer and emit the heat efficiently. It's been tried to do plasma spray coating of alumina ceramic on the metal substrates that have a good heat emission property. The most important properties to commercialize this ceramic coated metal substrate are surface roughness and deposition efficiency. In this study, plasma spray coating parameters are optimized to minimize the surface roughness and to maximize the deposition efficiency using Taguchi experimental method. By this optimization, the deposition efficiency was greatly improved from 35% at the frist time to 75% finally.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.657-659
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• 2008

Barrier coating properties of PVA/$SiO_2$ on the flexible substrates (PEN) have been investigated. Thin layer of PVA/$SiO_2$ organic-inorganic hybrid materials were deposited on PEN substrate by the spin-coating. The optical properties and surface roughness of barrier layer on flexible substrate were characterized by AFM, UV-Vis and WVTR/ OTR.

• 한국표면공학회지
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• 제45권3호
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• pp.106-110
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• 2012

Oblique angle deposition (OAD) is a physical vapor deposition where incident vapor flux arrives at non-normal angles. It has been known that tilting the substrate changes the properties of the film, which is thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer TiN films by cathodic arc deposition. TiN films have been deposited on cold-rolled steel sheets and stainless steel sheet. The deposition angle as well as substrate temperature and substrate bias was changed to investigate their effects on the properties of TiN films. TiN films were analyzed by color difference meter, scanning electron microscopy, nanoindenter and x-ray diffraction. The color of TiN films was not much changed according to the deposition conditions. The slanted and zigzag structures were observed from the single and multilayer films. The relation between substrate tilting angle (${\alpha}$) and the growth column angle (${\beta}$) followed the equation of $tan{\alpha}=2tan{\beta}$. The indentation hardness of TiN films deposited by OAD was low compared with the ones prepared at normal angle. However, it has been found that $H^3/E^2$ ratio of 3-layer TiN films prepared at OAD condition was a little higher than the ones prepared at normal angle, which can confirm the robustness of prepared films.

• 상하수도학회지
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• 제25권6호
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• pp.971-979
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• 2011

Palm Oil Mill Effluent (POME) is the mixed organic wastewater generated from palm oil industry. In this study, kinetic analysis with treating POME in an anaerobic hybrid reactor (AHR) was performed. Therefore, the AHR was monitored for its performances with respect to the changes of COD concentrations and hydraulic retention time (HRT). Batch tests were performed to find out the substrate removal kinetics by granular sludge from POME. Modified Stover Kincannon, First-order, Monod, Grau second-order kinetic models were used to analyze the performance of reactor. The results from the batch test indicate that the substrate removal kinetics of granular sludge is corresponds to follow Monod's theory. However, Grau second-order model were the most appropriate models for the continuous test in the AHR. The second order kinetic constant, saturation value constant, maximum substrate removal rate, and first-order kinetic constant were 2.60/day, 41.905 g/L-day, 39.683 g/L-day, and 1.25/day respectively. And the most appropriate model was Grau second-order kinetic model comparing the model prediction values and measured COD concentrations of effluent, whereas modified Stover-Kincannon model showed the lowest correlation.

• 한국전기전자재료학회논문지
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• 제22권12호
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• pp.1009-1013
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• 2009

In this study, we have been synthesized the dielectric layer using pure organic and organic-inorganic hybrid precursor on flexible substrate for improving of the organic thin film transistors (OTFTs) and, design and fabrication of organic thin-film transistors (OTFTs) using small-molecule organic semiconductors with pentacene as the active layer with record device performance. In this work OTFT test structures fabricated on polymerized substrates were utilized to provide a convenient substrate, gate contact, and gate insulator for the processing and characterization of organic materials and their transistors. By an adhesion development between gate metal and PI substrate, a PI film was treated using $O_2$ and $N_2$ gas. The best peel strength of PI film is 109.07 gf/mm. Also, we have studied the electric characteristics of pentacene field-effect transistors with the polymer gate-dielectrics such as cyclohexane and hybrid (cyclohexane+TEOS). The transistors with cyclohexane gate-dielectric has higher field-effect mobility, $\mu_{FET}=0.84\;cm^2/v_s$, and smaller threshold voltage, $V_T=-6.8\;V$, compared with the transistor with hybrid gate-dielectric.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.37.2-37.2
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• 2011

The growth of three-dimensional ZnO hybrid structures by metal-organic chemical vapor deposition was controlled through their growth pressure. Vertically aligned ZnO nanorods were grown on c-plane sapphire substrate at $600^{\circ}C$ and 400 Torr. ZnO film was then formed in-situ on the ZnO nanorods at $600^{\circ}C$ and 10 Torr. High-resolution X-ray diffraction and transmission electron microscopy measurements showed that the ZnO film on the nanorods/sapphire grew epitaxially, and that the ZnO film/nanorods hybrid structures had well-ordered wurtzite structures. The hybrid ZnO structure was shown to be about 5 ${\mu}m$ by field-emission scanning electron microscopy. The hybrid structure showed better crystalline quality than mono-layer film on sapphire substrate. Consequently, purpose of this work is developing high quality hybrid epi-growth technology using nano structure. These structures have potential applicability as nanobuilding blocks in nanodevices.