Properties of TiN Films Fabricated by Oblique Angle Deposition
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Jung, Jae-Hun
(Hybrid Materials Research Department, Research Institute of Industrial Science & Technology)
Yang, Ji-Hoon (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology) Park, Hye-Sun (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology) Song, Min-A (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology) Jeong, Jae-In (Hybrid Materials Research Department, Research Institute of Industrial Science & Technology) |
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