• 한국재료학회지
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• 제26권8호
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• pp.438-443
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• 2016

We developed an Al sputtering process by varying the plasma power, process temperature, and film thickness. We observed an increase of hillock distribution and average diameter with increasing plasma power, process temperature, and film thickness. Since the roughness of a film increases with the increase of the distribution and average size of hillocks, the control of hillock formation is a key factor in the reduction of Al corrosion. We observed the lowest hillock formation at 30 W and $100^{\circ}C$. This growth characteristic of sputtered Al thin films will be useful for the reduction of Al corrosion in the future of the electronic packaging field.

• 전자공학회논문지A
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• 제29A권1호
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• pp.33-40
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• 1992

4인치(100) 실리콘 기판상에 센서용 다이아프램을 제조할 때 생기는 식각 현상들을 관찰하고 분석하였다. 115$^{\circ}C$의 "F etch' 용액을 사용하여 300$\mu$ 이상의 깊은 식각을 행하였을 때 식각 표면에 발생하느 식각 결함은 hillock, 반응 생성물, 그리고 횐색 잔유물로 구분될 수 있었따. 특히 hillock의 경우 식각 표면에 부착된 반응 생성물의 밀도나 크기에 관계하여 |111|면들로 이루어질는 피라밋 구조나 사다리꼴 육면체등의 형태를 취함이 확인되었다. 또한 용해된 실리콘의 국부적인 과잉 포활 발생하는 흰색 잔유물의 IR 흡수 스펙트럼을 조사한 결과, Si-N-O 성분에 미량의 h와 C가 포함된 것임을 알 수 있었다. 아울러 식각면을 식각용액에 대해 아래쪽, 위쪽, 그리고 측면을 향하도록 놓았을때 식각 결함의 존재 확률과 분포 그리고 식각율의 분포를 비교한 결과 식각율의 균일성면에서는 하측방향의 자세가, 식각결함의 제거에 있어서는 측면방향의 자세가, 식각결함의 제거에 있어서는 측면방향의 자세가 유리하게 나타났으며 이를 반응조내의 흐름 패턴을 이용하여 해석하였다.

• 한국표면공학회지
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• 제56권2호
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• pp.160-168
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• 2023

Recently, investigation on metallization is a key for a stretchable display. Amorphous metal such as Ni and Zr based amorphous metal compounds are introduced for a suitable material with superelastic property under certain stress condition. However, Ni and Zr based amorphous metals have too high resistivity for a display device's interconnectors. In addition, these metals are not suitable for display process chemicals. Therefore, we choose an aluminum based amprhous metal Al-Mo as a interconnector of stretchable display. In this paper, Amorphous Forming Composition Range (AFCR) for Al-Mo alloys are calculated by Midema's model, which is between 0.1 and 0.25 molybdenum, as confirmed by X-ray diffraction (XRD). The elongation tests revealed that amorphous Al-20Mo alloy thin films exhibit superior stretchability compared to pure Al thin films, with significantly less increase in resistivity at a 10% strain. This excellent resistance to hillock formation in the Al20Mo alloy is attributed to the recessed diffusion of aluminum atoms in the amorphous phase, rather than in the crystalline phase, as well as stress distribution and relaxation in the aluminum alloy. Furthermore, according to the AES depth profile analysis, the amorphous Al-Mo alloys are completely compatible with existing etching processes. The alloys exhibit fast etch rates, with a reasonable oxide layer thickness of 10 nm, and there is no diffusion of oxides in the matrix. This compatibility with existing etching processes is an important advantage for the industrial production of stretchable displays.

• 한국환경복원기술학회지
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• 제12권5호
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• pp.110-120
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• 2009

The hipped roof on the research building, which was constructed 51.9m above sea level on a hillock by Korea National University of Education in June 1999, is composed of four inclined planes which are 12m in breadth, 8m in length and have a 30 degree gradient. For the roof vegetation, the yellow earth collected from around the building was laid on top. It was designed to supply the soil on the slope with water for a considerable period by making rainfall pool at the edges. In order to prevent the soil on the slope from being swept away, 31 sorts of grass seeds were imported from Germany and sown in the soil. At the present day, 10 years after the seeds began to sprout and inhabit the settled slope, 30 individual plant species were identified in the period between April 2008 and March 2009. Out of 31 species were seeded on the slanted, soiled roof, only 8 were still alive. It was confirmed that the Artemisia Princeps var, Chrysantheum, Prunella Vulgaris and Lespedeza Cuneata have been the major species inhabiting the east, west, south and north inclined planes respectively. The Phragmites Communis was inhabiting the edge of the roof where the water supply was adequate, while the Dianthus Barbatus was primarily inhabiting the south-east side of the roof. As a whole, 26 identifiable plants and 4 unidentified plants were observed on the inclined planes of the hipped roof. In consideration of the plant distribution on the slope, it was confirmed that the selection of seeds may have had an effect on the slope vegetation. As for the yellow earth laid on the roof, it was discovered that about 2~3cm thickness around the ridge was swept away, but the rest of the slope was in relatively good condition. Accordingly, it has been proven that vegetations can be applied to hipped roofs by using ordinary plants without any special structural measures.

• 한국인터넷방송통신학회논문지
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• 제14권5호
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• pp.215-221
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• 2014

본 논문에서는 RF 고전력 스트레스에 의한 SAW 디바이스의 신뢰성 분석을 위하여 향상된 내전력 시험시스템 및 시험방법을 제안하고 고장분석을 통해 고장메카니즘을 분석하였다. 광학현미경, SEM(Scanning Electron Microscope) 및 EDX(Energy Dispersive X-ray Spectro-scopy)장비를 이용하여 고장 분석한 결과, SAW 디바이스의 고장메카니즘은 고전류 밀도 및 고온 조건에서 줄열에 의한 Electromigration으로 분석하였다. Electromigration은 IDT전극에 void와 hillock을 생성하고, 그 결과로 전극이 단락과 단선되어 삽입손실이 증가하는 것이다. 제안된 내전력 시험시스템과 방법을 이용하여 450MHz CDMA용 SAW 필터의 가속수명시험을 수행하고, 아이링 모델과 와이블 분포를 이용하여 SAW 필터의 $B_{10}$수명은 98,500시간으로 추정하였다.

• 한국결정성장학회지
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• 제15권3호
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• pp.124-127
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• 2005

[ $Ti:LiNbO_3$ ], 광도파로 제작을 위해 큐리온도$(T_c)$ 아래에서 백금박스 내에서 알곤 과 산소 분위기 내에서 열처리 과정 동안 기판 표면의 강유전 도메인 특성 변화를 관찰하였다. 열처리 된 $LiNbO_3$ 기판의 +Z면의 경우 전체적으로 약 $1.6{\mu}m$ 두께로 도메인 반전이 이루어 졌으며, 표면에서 etch hillock이 관찰되었다. $LiNbO_3$ 결정 표면의 Li 이온이 외부로 확산 되는 영향을 감소시킬 수 있는 환경에 있는 기판 면에서 하나의 도메인이 관찰되었으며, 이때 결정 표면에서의 식각특성, 결정성 및 양이온 분포변화에 관하여 X-선 회절, AFM 및 SIMS를 이용하여 분석하였다.