Film Properties of Al Thin Films Depending on Process Parameters and Film Thickness Grown by Sputter |
Oh, Il-Kwon
(School of Electrical and Electronics Engineering, Yonsei University)
Yoon, Chang Mo (School of Electrical and Electronics Engineering, Yonsei University) Jang, Jin Wook (Samsung Electronics Test & Package Center) Kim, Hyungjun (School of Electrical and Electronics Engineering, Yonsei University) |
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