• 제목/요약/키워드: high-temperature annealing

검색결과 901건 처리시간 0.031초

고전압 방전 플라즈마에 의해 합성한 질화탄소 박막의 열처리 효과 (Effect of Annealing on Carbon Nitride Films Prepared by High Voltage Discharge Plasma)

  • 김종일
    • 한국전기전자재료학회논문지
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    • 제15권5호
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    • pp.455-459
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    • 2002
  • I have investigated the effects of annealing on a polymeric $\alpha-C_3N_{4.2}$ at high pressure and temperature in the presence of seeds of crystalline carbon nitride films prepared by a high voltage discharge plasma. The samples were evaluated by x-ray photoelectron spectroscopy (XPS), infrared spectroscopy, Auger electron spectroscopy and x-ray diffraction(XRD). Notably, XPS studies of the film composition before and after annealing demonstrate that the nitrogen composition in $\alpha-C_3N_{4.2}$ material initially containing more than 58% nitrogen decreases during the annealing process and reaches a common, stable composition of ~43%. XPS analysis also shows that the nitrogen composition in the annealed films without polymeric $\alpha-C_3N_{4.2}$ was reduced from 35% to 17%. Furthermore the concentration of the sp$^3$bonded phase increased with the increment of the annealing temperature.

열처리 온도에 따른 Li 도펀트 ZnO 박막형 공진기의 주파수 특성 (Frequency Characteristics of Li Doped ZnO Thin Film Resonator by Annealing Temperatures)

  • 김응권;김용성
    • 한국세라믹학회지
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    • 제43권9호
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    • pp.527-531
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    • 2006
  • In order to study the influence of post-annealing treatment on the frequency characteristics of the Li doped ZnO(Li:ZnO) FBAR(Film Bulk Acoustic Resonator) device, we investigated the material and electrical properties of Li:ZnO films in the annealing temperature range from 300 to $500^{\circ}C$. In our samples, as annealing temperature was increased, Li:ZnO films showed the improvement of high c-axis orientation and resistance value with relieved stress and low surface roughness. In addition to, the return loss in the frequency property of fabricated FBAR was improved by annealing treatment from 24.9 to 29.8dB. From experimental results, the optimum post-annealing temperature for FBAR is $500^{\circ}C$ and it can obtain excellent Li:ZnO FBAR performance with stronger c-axis orientation, smoother surface, relieved stress, and lower loss factor.

냉연 연속 소둔로 가열대 판온제어 (Strip temperature control for the heating furnace in the continuous-annealing line)

  • 정호성;유석환;백기남
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 26-27 Oct. 1990
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    • pp.779-782
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    • 1990
  • Recently batch type cold rolling processes have been replaced by continuous annealing type processes for cold rolled sheets of mild steel and high strength steel in order to obtain higher productivity, labor saving. In the continuous annealing line, it is very important to maintain the target steel strip temperature at the exit side of each furnace. The automation system of continuous annealing line is based on a hierachical composition. This paper shows how to preset the set value of furnace temperature control for the heating section in a continuous annealing line. Saying in other words, this paper presents the development of an adaptive control approach to control the exit strip temperature in the continuous annealing line. There are three parts in this approach; one is a process modelling and another is recursive parameter estimation and the other is a design of temperature controller.

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Ni와 Co 촉매금속의 표면 거칠기에 따른 그래핀 성장 특성 (Characteristic of Ni and Co metal-catalyst surface roughness in graphene)

  • 김은호;안효섭;장현철;조원주;이완규;정종완
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.263-263
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    • 2010
  • High temperature annealing is required to synthesize graphene using CVD. When thin metal catalyst is used for the synthesis, the high temperature pre-annealing makes the thin catalyst highly agglomerated. We investigated the agglomeration effect on the shape of the synthesized graphene. It is found that high temperature annealing makes randomly distributed many hole or blister on metal catalyst, and the synthesized graphene features floral pattern around the hole. The floral patterns of graphene turned out to be multi-layers and higher D peaks in raman spectrum.

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고온 열처리 공정이 탄화규소 쇼트키 다이오드 특성에 미치는 영향 (Effect of High Temperature Annealing on the Characteristics of SiC Schottky Diodes)

  • 정희종;방욱;강인호;김상철;한현숙;김형우;김남균;이용재
    • 한국전기전자재료학회논문지
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    • 제19권9호
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    • pp.818-824
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    • 2006
  • The effects of high-temperature process required to fabricate the SiC devices on the surface morphology and the electrical characteristics were investigated for 4H-SiC Schottky diodes. The 4H-SiC diodes without a graphite cap layer as a protection layer showed catastrophic increase in an excess current at a forward bias and a leakage current at a reverse bias after high-temperature annealing process. Moreover it seemed to deviate from the conventional Schottky characteristics and to operate as an ohmic contact at the low bias regime. However, the 4H-SiC diodes with the graphite cap still exhibited their good electrical characteristics in spite of a slight increase in the leakage current. Therefore, we found that the graphite cap layer serves well as the protection layer of silicon carbide surface during high-temperature annealing. Based on a closer analysis on electric characteristics, a conductive surface transfiguration layer was suspected to form on the surface of diodes without the graphite cap layer during high-temperature annealing. After removing the surface transfiguration layer using ICP-RIE, Schottky diode without the graphite cap layer and having poor electrical characteristics showed a dramatic improvement in its characteristics including the ideality factor[${\eta}$] of 1.23, the schottky barrier height[${\Phi}$] of 1.39 eV, and the leakage current of $7.75\{times}10^{-8}\;A/cm^{2}$ at the reverse bias of -10 V.

Superconducting Transitions of $(Pb,V)Sr_2(Ca,Er)Cu_2O_z$ Quenched from High Temperatures

  • Lee, Ho-Keun
    • Progress in Superconductivity
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    • 제1권1호
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    • pp.9-13
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    • 1999
  • The influence of quenching temperature and annealing time on superconducting characteristics has been investigated for a $(Pb_{0.6}V_{0.4})Sr_2(Ca_{0.65}Er_{0.35})Cu_2O_z$ compound. From the resistivity measurements for samples annealed at $400^{\circ}C$ to $860^{\circ}C$ in oxygen and subsequently quenched, it is observed that $T_c$(zero) of the sample decreases with the increase of annealing temperature up to $600^{\circ}C$ and increases again beyond $700^{\circ}C$. Annealings of the sample at $860^{\circ}C$ show that $T_c$(zero) goes through a maximum of 62K with the increase of the annealing time. It is also found that $T_c$(zero) of the sample quenched from high temperature decreases when the sample is subjected to low temperature annealing below. $600^{\circ}C$ in oxygen. The experimental results indicate that the as-prepared samples contain excessive oxygen and removal of this excessive oxygen in as-prepared samples is a key factor in controlling the superconducting properties of the samples and are discussed in connection with thermal gravimetric measurements.

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신선 가공한 펄라이트 강선의 어닐링시 미세 조직의 변화와 기계적 성질과의 관계 (The Relationship between Microstructures and Mechanical Properties in Cold-drawn and Annealed Pearlitic Steel Wire)

  • 박대범;강의구;남원종
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.159-163
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    • 2006
  • The effects of annealing temperature and time on mechanical properties and microstructures were studied in cold drawn pearlitic steel wires containing 0.84wt% Si. Annealing was performed from $200^{\circ}C$ to $450^{\circ}C$ with different time of 30sec, 1min, 15min and 1hr. The increase of tensile strength at low temperature was related with strain ageing. The decrease of tensile strength at high annealing temperature was related with spherodization of cementite and the occurrence of recovery of the lamellar ferrite in the pearlite. The improvement of ductility was connected with spherodization of cementite plate in pearlite and recovery process by reduction of high dislocation density at short time annealing temperature of $400^{\circ}C$.

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열처리 조건이 PECVD 방식으로 증착된 $Ta_2$$O_5$ 박막 특성에 미치는 영향 (Effect of Annealing Conditions on $Ta_2$$O_5$ Thin Films Deposited By PECVD System)

  • 백용구;은용석;박영진;김종철;최수한
    • 전자공학회논문지A
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    • 제30A권8호
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    • pp.34-41
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    • 1993
  • Effect of high temperature annealing conditions on Ta$_{2}O_{5}$ thin films was investigated. Ta$_{2}O_{5}$ thin films were deposited on P-type silicon substrates by plasma-enhanced chemical vapor deposition (PECVD) using tantalum ethylate. Ta(C$_{2}H_{5}O)_{5}$, and nitrous oxide. N$_{2}$O. The microstructure changed from amorphous to polycrystalline above 700.deg. C annealing temperature. The refractive index, dielectric onstant and leakage current of the film increased as annealing temperature increased. However, annealing in oxygen ambient reduced leakage currents and dielectric constant due to the formation of interfacial SiO$_{2}$ layer. By optimizing annealing temperature and ambient, leakage current lower than 10$^{-8}$ A/cm$^{2}$ and maximum capacitance of 9 fF/${\mu}m^{2}$ could be obtained.

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Double Step Fabrication of Ag Nanowires on Si Template

  • Zhang, J.;Cho, S.H.;Quan, W.X.;Zhu, Y.Z.;Mseo, J.
    • Journal of Korean Vacuum Science & Technology
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    • 제6권2호
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    • pp.79-83
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    • 2002
  • As Ag does not form my silicide on Si surfaces, Ag wire is a candidate for self-assembled nanowire on the reconstructed and single-domain Si(5 5 12)-2 $\times$ 1. In the present study, various Ag coverages and post-annealing temperatures had been tested to fabricate a Ag nanowire with high aspect ratio. When Ag coverage was less than 0.03 ML and the post-annealing temperature was 500(C, Ag atoms preferentially adsorbed on the tetramer sites resulting in Ag wires with an inter-row spacing of ~5 nm. However, its aspect ratio is relatively small and its height is also not even. On the other hand, the Ag-posited surface completely loses its reconstruction even with the same annealing at 500 $\^{C}$ if the initial coverage exceeds 0.05 ML. But the additional subsequent annealing at 700$\^{C}$ and slow-cooling process recovers the well-ordered Ag chain with relatively high aspect ratio on the same tetramer sites. It can be understood that, in the double step annealing process, the lower temperature annealing is required for cohesion of adsorbed Ag atoms and the higher temperature annealing is for providing Ag atoms to the tetramer sites.

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Thermopile, 펠티어소자에 적용할 $Bi_2Te_3$, $Sb_2Te_3$의 annealing 온도변화에 따른 박막특성 분석 (Thermoelectric Properties of $Bi_2Te_3$, $Sb_2Te_3$ by varying annealing temperature)

  • 김현식;최연식;박효덕;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.212-212
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    • 2009
  • Thermoelectric devices were used to wide range of application. At present, increasing the efficiency of these devices, in particular, through the preparation of materials showing a high thermoelectric figure of merit, Z, $Bi_2Te_3$ and $Sb_2Te_3$ thin films on Si substrates are deposited by flash evaporation method for thermopile sensor applications. In order to enhance the thermoelectric properties of the thin film, annealing in high vacuum is carried out in the temperature range from 200 to $350^{\circ}C$. The microstructure of the film is investigated by XRD and SEM. The resistivity and Seebeck coefficient of the films are measured by Van der Pauw method and hot probe method respectively. At elevating annealing temperature, the crystallinity and thermoelectrical properties of films are improved by increasing the size of grains. At excessive high annealing temperatures, it is shown that Seebeck coefficient of films is decreased because of Te evaporation. By optimizing the annealing conditions, it is possible to obtain a high performance thin film with a thermoelectric properties.

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