• Journal of Sensor Science and Technology
• /
• v.32 no.6
• /
• pp.340-351
• /
• 2023

Wearable sensors designed for strain, pressure, and temperature measurements are essential for monitoring human movements, health status, physiological data, and responses to external stimuli. Notably, recent research has led to the development of high-performance wearable sensors using innovative materials and device structures that exhibit ultra-high sensitivity compared with their commercial counterparts. However, the quest for accurate sensing has identified a critical challenge. Specifically, the mechanical flexibility of the substrates in wearable sensors can introduce interference signals, particularly when subjected to varying external stimuli and environmental conditions, potentially resulting in signal crosstalk and compromised data fidelity. Consequently, the pursuit of non-interference sensing technology is pivotal for enabling independent measurements of concurrent input signals related to strain, pressure, and temperature, ensuring precise signal acquisition. In this comprehensive review, we present an overview of the recent advances in noninterference sensing strategies. We explore various fabrication methods for sensing strain, pressure, and temperature, emphasizing the use of hybrid composite materials with distinct mechanical properties. This review contributes to the understanding of critical developments in wearable sensor technology that are vital for their ongoing application and evolution in numerous fields.

• Proceedings of the Korean Geotechical Society Conference
• /
• 1999.10a
• /
• pp.397-404
• /
• 1999

It is essential to measure load transfer mechanism of pile to check the appropriateness of assumptions made for design purpose and to continuously monitor the behavior of pile foundation. Through many attempts to monitor the behavior of super-structure in civil engineering area using several optical fiber sensors have been made, application of optical fiber sensor technology on pile foundation has not been tried up to now. Load transfer of model piles during compression loading was measured by optical fiber sensors and compared with the measurement by strain gauges. Fiber Bragg Grating(FBG) sensor system was used since it has many advantages, such as easy multiplexing, high sensitivity, and simple fabrication. Besides the model pile tests, uniaxial tension test of steel bar and compression tests of mortar specimen were carried out to evaluate the performance of FBG sensors in embedded environments. The shift of refilming wavelength due to the strain in FBG sensor is converted to the strain at sensor location and the dependence between them is 1.28 pm/${\mu}$ strain. FBG sensors embedded in model pile showed a better survivability than strain gauges. Measured results of load transfer by both FBG sensors and strain gauges were similar, but FBG sensors showed a smoother trend than those by strain gauge. Based on the results of model pile test, it was concluded that the use of FBG sensor for strain measurement in pile has a great potential for the analysis of pile load transfer.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2005.11a
• /
• pp.185-189
• /
• 2005

For the simultaneous measurement of strain and vibration signal, a fiber Bragg grating sensor system with a dual demodulator was proposed. One demodulator using a tunable Fabry-Perot filter could measure low-frequency signal such as strain and the other demodulator using a coarse wavelength division multiplexer could detect high-frequency signal such as vibration signal using intensity demodulation method. In order to measure strain and vibration of the composite main wing model under static loading a real time monitoring program was developed. Also using intensity demodulation of CWDM, sensitivity and resolution at high frequency vibration were evaluated.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.60 no.3
• /
• pp.594-599
• /
• 2011

A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2002.11a
• /
• pp.59-63
• /
• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• Vacuum Magazine
• /
• v.4 no.3
• /
• pp.6-11
• /
• 2017

The tactile sensor of the future robot is becoming a necessity as a sensory organ which can communicate with the person most directly. Recently, the Nature-inspired technology has provided a new direction for the development of these tactile sensors. Here, we review three different nature-inspired tactile sensory system; high sensitivity pressure sensor inspired by beetle wings, highly sensitive strain sensor inspired by the spider's sensory organs, Tactile sensor inspired by human fingertip. These nature-inspired tactile sensors are expected to provide a breakthrough that not only can sensitively measure the pressure, but also delicately recognize the softness and texture of the material just like human.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.16 no.9
• /
• pp.790-794
• /
• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• Journal of Sensor Science and Technology
• /
• v.12 no.5
• /
• pp.199-204
• /
• 2003

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097-1.21\;mV/V{\codt}kgf/cm^2$ in the temperature range of $25-200^{\circ}C$ and the maximum non-linearity is 0.43%FS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07b
• /
• pp.888-891
• /
• 2003

This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

• Proceedings of the KIEE Conference
• /
• 2002.07c
• /
• pp.1936-1938
• /
• 2002

A tunable fiber laser and the Quadrature Sampling technique are used to construct highly sensitive fiber-optic distributive Bragg grating strain sensor system. By using a wavelength-modulated fiber laser, the variations of strain-dependent Bragg wavelengths are transformed into the variations of time-domain reflection profiles. The locations of profile peaks that correspond to the applied strains are demodulated using a precise wavelength encoder that uses a fiber-optic Mach-Zehnder interferometer and Quadrature Sampling technique. With the extremely high sensitive optical encoder, we could obtain not only high sensitivity, but also very linear responses that was impossible with the conventional techniques. This paper is attempted to report the theoretical and experimental results.