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http://dx.doi.org/10.5370/KIEE.2011.60.3.594

Development of novel strain sensor using surface acoustic wave  

Oh, Hae-Kwan (아주대 전자공학과)
Hwang, U-Jin (서울과학기술대)
Eun, Kyung-Tae (아주대 전자공학과)
Choa, Sung-Hun (서울과학기술대)
Lee, Kee-Keun (아주대 전자공학과)
Yang, Sang-Sik (아주대 전자공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.60, no.3, 2011 , pp. 594-599 More about this Journal
Abstract
A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.
Keywords
Strain sensor; Surface acoustic wave (SAW); Shear horizontal wave; Rayliegh wave;
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