• Journal of Surface Science and Engineering
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• v.57 no.3
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• pp.165-178
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• 2024

In semiconductor memory device manufacturing, the capability for high aspect ratio contact (HARC) etching determines the density of memory device. Given that there is no standardized definition of "high" in high aspect ratio, it is crucial to continuously monitor recent technology trends to address technological gaps. Not only semiconductor memory manufacturing companies such as Samsung Electronics, SK Hynix, and Micron but also semiconductor manufacturing equipment companies such as Lam Research, Applied Materials, Tokyo Electron, and SEMES release annual reports on HARC etching technology. Although there is a gap in technological focus between semiconductor mass production environments and various research institutes, the results from these institutes significantly contribute by demonstrating fundamental mechanisms with empirical evidence, often in collaboration with industry researchers. This paper reviews recent studies on HARC etching and the study of dielectric etching in various technologies.

• Tunnel and Underground Space
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• v.23 no.2
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• pp.150-159
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• 2013

It is generally well known that the stratification of thermal energy in heat stores can be improved by increasing the aspect ratio (the height-to-width ratio) of the stores. Accordingly, it will be desirable to apply a high aspect ratio so as to demonstrate the good thermal performance of heat stores. However, as the aspect ratio of a store increases, the height of the store become larger compared to its width, which may be unfavorable for the structural stability of the store. Therefore, to determine an optimum aspect ratio of heat stores, a quantitative mechanical stability assessment should be performed in addition to thermal performance evaluations. In the present study, we numerically investigated the mechanical stability of silo-shaped rock caverns for underground thermal energy storage at different aspect ratios. The applied aspect ratios ranged from 1 to 6 and the mechanical stability was examined based on factor of safety using a shear strength reduction method. The results from the present study showed that the factor of safety of rock caverns tended to decrease with the increase in aspect ratio and the stress ratio of the surrounding rock mass was influential to the stability of the caverns. In addition, the numerical results demonstrated that under the same conditions of rock mass properties and aspect ratio, mechanical stability could be improved by the reduction in cavern size (storage volume), which indicates that one can design high-aspect-ratio rock caverns by dividing a single large cavern into multiple small caverns.

• Transactions of Materials Processing
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• v.16 no.1 s.91
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• pp.48-53
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• 2007

LCD-BLU(Liquid Crystal Display - Back Light Unit) consists of several optical sheets: LGP(Light Guiding Plate), light source and mold frame. The LGP of LCD-BLU is usually manufactured by etching process and forming numerous dots with $50{\mu}m$ in diameter on the surface. But the surface roughness of LGP with etched dots is very high, so there is much loss of light. In order to overcome the limit of current etched dot patterned LGP, optical pattern design with microlens of $50{\mu}m$ diameter was applied in the present study. The microlens pattern fabricated by modified LiGA with thermal reflow process was applied to the optical design of LGP and optical simulation was carried out to know tendency of microlens patterned LGP simultaneously. The attention was paid to the effects of different aspect ratio(i.e. $0.2\sim0.5$) of optical pattern conditions to the brightness distribution of BLU with microlens patterned LGP. Finally, high aspect ratio microlens patterned LGP showed superior results to the one made by low aspect ratio in average luminance.

• Journal of the Korean Graphic Arts Communication Society
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• v.28 no.1
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• pp.15-24
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• 2010

Photovoltaic solar cells are all in the incident because they are not converted into electrical energy, high-efficiency solar cells in order to reduce the loss of elements must be. Significant factor in the loss of solar cells, optical loss and electrical loss can be divided into. Optical losses occur when the sun will be joined on the surface of the reflection, the shadow loss due to electrodes, and the losses are in the solar wavelengths. Commercialization is currently the most common solar cells on the front of the light incident on the electrode is formed. Therefore, the shadow caused by the electrode to cover the dead area of the sun, due to factors that hinder the absorption of sunlight which is shadowing them and conversion efficiency of solar cells is the inhibition factor. These barriers to eliminate the electrode linewidth reduces the shadowing to reduce, but simply of the electrode line width is reduced electrode area by reducing the series resistance elevates this because to improve the electrode Aspect ratio(height/width) to increase Ag development of paste is required. In this study, aspect ratio of screen-printing method to increase the electrode Ag paste composition of the binder for the characterization of rheology in the shadow of the electrode by reducing the optical loss of the photoelectric conversion efficiency of solar cells to boost the performance measures was. Properties and printability of the paste, the binder resin sintered characteristics that affect the thermal properties are excellent with a good screen printability acrylic resin, ethyl cellulose, using a resin were evaluated. Prepared paste rheology properties, was formed to evaluate the electrode conductivity and aspect ratio.

• Structural Engineering and Mechanics
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• v.65 no.2
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• pp.163-171
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• 2018

Plain concrete is a brittle material with a very low tensile strength compared to compressive strength and critical tensile strain. This study analyzed the dynamic characteristics of high-performance fiber-reinforced cementitious composites based on slurry-infiltrated fiber concrete (SIFCON-based HPFRCC), which maximizes the steel-fiber volume fraction and uses high-strength mortar to increase resistance to loads, such as explosion and impact, with a very short acting time. For major experimental variables, three levels of fiber aspect ratio and five levels of fiber volume fraction between 6.0% and 8.0% were considered, and the flexural strength and toughness characteristics were analyzed according to these variables. Furthermore, three levels of the aspect ratio of used steel fibers were considered. The highest flexural strength of 65.0 MPa was shown at the fiber aspect ratio of 80 and the fiber volume fraction of 7.0%, and the flexural strength and toughness increased proportionally to the fiber volume fraction. The test results according to fiber aspect ratio and fiber volume fraction revealed that after the initial crack, the load of the SIFCON-based HPFRCC continuously increased because of the high fiber volume fraction. In addition, sufficient residual strength was achieved after the maximum strength; this achievement will bring about positive effects on the brittle fracture of structures when an unexpected load, such as explosion or impact, is applied.

• International Journal of Highway Engineering
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• v.20 no.3
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• pp.19-26
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• 2018

PURPOSES : The main purpose of this study is suggest of field bond strength evaluation method for more objective evaluation method through Evaluation of Bond Strength Properties with changing aspect ratio and temperature. METHODS : The evaluation is laboratory bond strength test. Using the core machine, the pull-off test method ; the bond strength test of interface layer the universal testing machine. RESULTS : As a result of the laboratory bond strength evaluation, it was verified that the bond strength by aspect ratio decreases linearly with increasing aspect ratio and the bond strength properties by temperature change existed at high and low temperature condition relative to odinary temperature condition. CONCLUSIONS : According to the results of laboratory bond strength evaluation, the field bond strength evaluation results suggest applying the proposed correction factor (0.8, 1.0, 1.4, 1.9) according to aspect ratio(0.5, 0.1, 1.5, 2.0), For more objective evaluation of the bond strength, it is analyzed that the evaluation value is within $6{\sim}32^{\circ}C$ and the result can be obtained within 5% of the coefficient of variation.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.233-236
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• 2002

The high-pressurized spray nozzle is used f3r special washing and cutting with strong impact force. The performance of this nozzle, which focused on spray penetration and radial dispersion, was mainly investigated to maximize the momentum and minimize the flow loss. Hence, our experimental research was conducted by changing the aspect ratio ranging from 0 to 3 with nozzle outlet of 1.1. The spray trajectory far high-pressurized water was experimentally investigated using PDPA diagnostics, which was available at spray downstream region. As the spray at upstream near the nozzle exit did not show the improved disintegration. The results showed empirical correlation with regard to non-dimensional axial velocity distribution, spray penetration, and radial spreading rate with photographic visualization.

• Journal of Power System Engineering
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• v.13 no.5
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• pp.11-17
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• 2009

A numerical study of unsteady mixed convection in a cavity with high viscous fluid is presented. Finite volume method was employed for the discretization and PISO algorithm was used for calculating pressure term. The parameters governing the problem are the Rayleigh number ($10^3\;{\leq}\;Ra\;{\leq}\;10^5$), the Reynolds number (0 < Re $\leq$ 1), and the aspect ratio (0.5 $\leq$ AR $\leq$ 2). The fluid used is silicon oil, a high prandtl number fluid, Pr = 909.1. The results show velocity vectors and temperature distributions. It is found that the periodic flows in a cavity are observed at very low Reynolds numbers, and the period of periodic flow decreases with increasing Reynolds and Rayleigh numbers, and increases with increasing aspect ratio. Also, the Reynolds number range of periodic flow increases with increasing Rayleigh numbers and aspect ratio.

• International Journal of Aeronautical and Space Sciences
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• v.7 no.1
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• pp.99-105
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• 2006

In this study, nonlinear static and dynamic aeroelastic analyses for a high-aspect-ratio wing have been performed. To achieve these aims, the transonic small disturbance (TSD) theory for the aerodynamic analysis and the large deflection beam theory considering a geometrical nonlinearity for the structural analysis are applied, respectively. For the coupling between fluid and structure, the transformation of a displacement from the structural mesh to the aerodynamic grid is performed by a shape function which is used for the finite element and the inverse transformation of force by work equivalent load method. To validate the current method, the present analysis results of a high-aspect-ratio wing are compared with the experimental results. Static deformations in the vertical and torsional directions caused by an angle of attack and gravity loading are compared with experimental results. Also, static and dynamic aeroelastic characteristics are investigated. The comparisons of the flutter speed and frequency between a linear and nonlinear analysis are presented.

• Steel and Composite Structures
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• v.9 no.4
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• pp.367-380
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• 2009

This study focuses on the experimental evaluation of the flexural-torsional performance of high strength thin-walled composite members. A series of tests on composite members with various sectional aspect ratios subjected to eccentric cyclic loads were conducted. Test results show that the composite member's torsional strength could be approximated using a series of linear segments and evaluated using the superposition of the component steel and reinforced concrete responses. It is also validated from the tests that the strength deterioration of members subjected to combined loads is closely related to the aspect ratios of the sections. An interaction expression between the bending and torsion for high strength thin-walled composite members is proposed for engineering practice references.