• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.233-233
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• 2010

Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

• 한국표면공학회지
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• 제39권3호
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• pp.142-146
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• 2006

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880\;mm{\times}660\;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{\times}10^{11}\;cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880\;mm{\times}660\;mm$ as rf power increased.

• 한국환경과학회지
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• 제32권3호
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• pp.197-204
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• 2023

This study aims to inactivate Artemia sp. (Zooplankton) in ballast water through the dielectric barrier discharge (DBD) plasma process. The DBD plasma process has the advantage of enabling direct electric discharge in water and utilizing chemically active species generated by the plasma reaction. The experimental conditions for plasma reaction are as follows; high voltage of 9-22 kV, plasma reaction time of 15-600 s, and air flow rate of 0.5-5.5 L/min. The results showed that the optimal experimental conditions for Artemia sp inactivation were 16 kV, 60 s, 2.5 L/min, respectively. The concentrations of total residual oxidants and ozone generated by plasma reaction increased with an increase of in voltage and reaction time, and the concentration of generated air did not increase above a certain amount.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2344-2347
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• 2007

To generate negative ion, a small dielectric barrier discharge (DBD) plasma reactor was used in this study and operated by high AC voltage. With increasing of voltage, we can get more negative ions. However unfortunately, if the input voltage is too high, it will also cause formation of ozone which is very harmful to human being health. So the work of finding out the best condition of Voltage and frequency was carried out firstly. After several times of measurement, operating at 20 kHz frequency is the best condition generating high ion concentration without ozone. For the purpose of finding out the best reactor structure, two types of surface dielectric barrier discharge (DBD) reactors were examined to produce negative oxygen ions at the conditions of 20 kHz frequency. The results indicated that the surface DBD reactor with several small tips showed better characteristics for generation of negative oxygen ions at the same condition.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2004년도 제28회 KOSCO SYMPOSIUM 논문집
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• pp.83-88
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• 2004

High voltage AC electric field has been applied to turbulent propane jets to investigate the effect of electric field on liftoff characteristics. Liftoff velocity and liftoff height have been measured by varying the applied voltage and frequency. Liftoff velocities were delayed and liftoff heights were reduced by applying AC, not by DC. The electric effect became disappeared with further increasing jet velocities, which shows that the effect can be explained by the balance between inertia force and electric force. The flame stabilization effect was intensified as either applied voltage or frequency increased. Plasma streamers were generated between the flame and the jet under high voltage conditions. Liftoff velocity in the absence of plasma can be well correlated by the function of voltage and frequency.

• Journal of Power Electronics
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• 제6권1호
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• pp.45-51
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• 2006

A new high efficiency phase shifted full bridge (PSFB) converter for the power sustaining module of a plasma display panel (PDP) is proposed in this paper. The proposed converter employs a voltage doubler rectifier without an output inductor. Since it has no output inductor, the voltage stresses of the secondary rectifier diodes can be clamped at the output voltage level. No dissipative resistor-capacitor (RC) snubber for rectifier diodes is needed. Therefore, high efficiency, as well as, a low noise output voltage can be realized. Due to the elimination of the large output inductor, it features a simple structure, lower cost, smaller mass and lighter weight. Furthermore, the proposed converter has wide zero voltage switching (ZVS) ranges with low current stresses of the primary switches. Also the resonance between the leakage inductor of the transformer and the capacitor of the voltage doubler cell reduces the current stresses of the rectifier diodes. In this paper, operational principles, an analysis of the proposed converter and experimental results are presented.

• 한국표면공학회지
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• 제36권2호
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• pp.148-154
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• 2003

Short ($\tau$=40 $mutextrm{s}$) and high-voltage ($U_{sub}$=2~8 kV) negative substrate bias pulses were used to assist pulsed magnetron sputtering DLC films deposition. Space- and time-resolved probe measurements of the plasma characteristics have been performed. It was shown that in case of high-voltage substrate bias spatial non-uniformity of the magnetron discharge plasma density greatly affected DLC deposition process. By Raman spectroscopy it was found that maximum percentage of s $p^3$-bonded carbon atoms (40 ~ 50%) in the coating was attained at energy $E_{c}$ ~700 eV per deposited carbon atom. Despite rather low diamond-like phase content these coatings are characterized by good adhesion due to ion mixing promoted by high acceleration voltage. Short duration of the bias pulses is also important to prevent electric breakdowns of insulating DLC film during its growth.wth.

• Journal of Electrical Engineering and Technology
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• 제9권5호
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• pp.1712-1718
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• 2014

Experimental analysis according to the plasma actuator design variables was performed in order to verify the effects of sliding discharge plasma on aerodynamic drag reduction of a high-speed train. For the study, sliding discharge plasma actuator and high-frequency, high-voltage power supply were developed and experimented to figure out the best design variables for highest ionic wind velocity which could reduce the drag force. And then, 5% reduced-scale model of a high-speed train was built for wind tunnel test to verify it. From the results, it was confirmed that sliding discharge plasma had contribution to reduce the drag force and it had the potential to be applied to real-scale trains.

• 한국진공학회지
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• 제5권1호
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• pp.85-92
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• 1996

The external electricla characteristics of helicon wave plasmas were measured over a wide range of RF power and magnetic filed. External parameters. such as antenna voltage , current, phase shift, and interanl parameter, electron density were measured at 7MHz, 1mTorr Ar discharge . The equivalent discharge resistance and reactance, and the power transfer efficiency were calculated through these measurements. There are a helicon mode which produces high density plasma by helicon wave and a lowmode which produces low density plasma by capaictive electric field. In case of the helicon mode, the anternna voltage and current were lower than those of the low-mode. The phase difference between voltage and current decreased suddenly at the transition point from the low-mode to the helicon mode. Equivalent resistance and power efficiency increased and reactance decreased suddenly at the transition point. These results mean that the power transperred to plasma and the nutual coupling between the antenna and plasma increase as the mode changes from the low-mode to the helicon mode.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2005년도 전력전자학술대회 논문집
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• pp.399-401
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• 2005

A new high performance energy-recovery circuit (ERC) for a plasma display panel (PDP) is proposed. Two different ERCs are employed on both sides of the PDP, and slow falling and fast rising times are applied. It features a zero voltage switching (ZVS), low electromagnetic interference (EMI), low current stress, high efficiency, no severe voltage notch, reduced sustaining voltage, and high energy-recovery capability.