• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2106-2109
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• 2008

Nanofluids have been studied as possible alternatives for heat transfer fluids to improve the efficiency of heat exchangers. There are deviations of measured effective thermal conductivities between research-groups, and the mechanisms of the effective thermal conductivity enhancement of nanofluids are not confirmed yet. In this study, the effects of particle shape on the effective thermal conductivity enhancement are discussed and presented as a possible explanation of the deviations. The particle motion effect is found to be negligible for nanofluids of high aspect ratio cylindrical particles, which is believed to be important for nanofluids of spherical particles, while the percolation network formation and contact resistance play dominant roles in determining the effective thermal conductivity.

• Tribology and Lubricants
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• 제18권3호
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• pp.194-203
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• 2002

This paper is the first step fur thermo-mechanical stress analyses of part with coated layer under contact load. A lot of coated material is applied in many structures to endure severe situation, like thermal stresses, high temperature gradients, irradiation, impacts by microscopic meteorites, and so on. In this part we are going to apply the FEM to analyze space parts with a coated layer subjected to a contact load thermo-mechanically. Coating layer is very thin in comparision with the structure, therefore it should take more times and behaviors to analyze whole model. In these reason we develop the FEM method of analyzing part with coated layer under contact load using partial model. Steady state temperature distribution of the part is obtained first, and then we apply quasi-static external load on the part. To obtain the final stage of solution, we compute the total solution, and by subtracting the thermal strain from the total ones we get the mechanical strains to compute stresses of the parts. In using the FEM, one has to discretize the model into many sub-domain, finite elements. The method is consisited of two steps. First step is to analyze the whole model with rather coarse meshes. Second step we cut a small region near the loading point, and analyze with very fine meshes. This method is allowable by the Saint-Venant's principle. And then, we finally shall check the therma1 load on the stresses of the space part with coating layer with or without substrate cracks. Then, we predict the actual behaviors of the part used in space.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.365-365
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• 2010

Similar to the superhydrophobic surfaces of lotus leaf, water strider leg is attributed to hierarchical structure of micro pillar and nano-hair coated with low surface energy materials, by which water strider can run and even jump on the water surface. In order to mimick its leg, many effort, especially, on the fabrication of nanohairs has been made using several methods such as a capillarity-driven molding and lithography using poly(urethane acrylate)(PUA). However most of those effort was not so effective to create the similar structure due to its difficulty in the fabrication of nanoscale hairy structures with hydrophobic surface. In this study, we have selected a low surface energy polymeric material of polytetrafluoroethylene (PTFE, or Teflon) assisted with surface modification of CF4 plasma treatment followed by hydrophobic surface coating with pre-cursor of hexamethyldisiloxane (HMDSO) using a plasma enhanced chemical vapor deposition (PE-CVD). It was found that the plasma energy and duration of CF4 treatment on PTFE polymer could control the aspect ratio of nano-hairy structure, which varying with high aspect ratio of more than 20 to 1, or height of over 1000nm but width of 50nm in average. The water contact angle on pristine PTFE surface was measured as approximately $115^{\circ}$. With nanostructures by CF4 plasma treatment and hydrophobic coating of HMDSO film, we made a superhydrophobic nano-hair structure with the wetting angle of over $160^{\circ}C$. This novel fabrication method of nanohairy structures has been applied not only on 2-D flat substrate but also on 3-D substrates like wire and cylinder, which is similarly mimicked the water strider's leg.

• 센서학회지
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• 제9권5호
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• pp.380-388
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• 2000

LIGA-like 공정을 이용하여 고종횡비를 갖는 초소형 니켈 터빈을 제작하기 위하여 블레이드에 대한 유한 요소 해석을 수행하여 안전한 운전 조건을 연구하였다. 이 해석으로부터 터빈의 입구와 출구의 압력 차이가 44kPa 정도일 때에 항복강도를 넘지 않도록 해야 하며 축의 외경과 터빈 날개의 내경 사이의 접촉에 의한 마찰계수와 최대 응력 사이의 관계는 약간 반비례하는 경향을 보였다. 즉, 터빈이 회전하는 상태에서 최대 응력은 접촉 마찰이 증가함에 따라 감소했다. 터빈과 같이 반복하중을 받는 부분은 취성이 강한 실리콘보다는 금속으로 제작해야 하며 이를 위해서는 표면 미세 가공 보다 LTGA-like 공정으로 제작되어야 한다. 본 연구는 초소형 구조물에서 움직이는 부분과 고정된 부분의 접촉 문제를 갖는 여러 종류의 문제를 다루는 데에 이용될 수 있다.

• Journal of the Korean Society for Industrial and Applied Mathematics
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• 제15권1호
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• pp.57-65
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• 2011

In this paper, a good quality mesh generation for the finite element method is investigated for artificial hip joint simulations. In general, bad meshes with a large aspect ratio or mixed elements can give rise to excessively long computational running times and extremely high errors. Typically, hexahedral elements outperform tetrahedral elements during three-dimensional contact analysis using the finite element method. Therefore, it is essential to mesh biologic structures with hexahedral elements. Four meshing schemes for the finite element analysis of an artificial hip joint are presented and compared: (1) tetrahedral elements, (2) wedge and hexahedral elements, (3) open cubic box hexahedral elements, and (4) proposed hexahedral elements. The proposed meshing scheme is to partition a part before seeding so that we have a high quality three-dimensional mesh which consists of only hexahedral elements. The von Mises stress distributions were obtained and analyzed. We also performed mesh refinement convergence tests for all four cases.

• 한국표면공학회지
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• 제55권6호
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• pp.342-352
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• 2022

Purine catabolite screening enables reliable diagnosis of certain diseases. In this regard, the development of a facile detection strategy with high sensitivity and selectivity is demanded for point-of-care applications. In this work, the simultaneous detection of uric acid (UA), xanthine (XA), and hypoxanthine (HX) was carried out as model purine catabolites by surface-enhanced Raman Spectroscopy (SERS). The detection assay was conducted by employing high-aspect ratio Au nanopillar substrates coupled with in-situ Au electrodeposition on the substrates. The additional modification of the Au nanopillar substrates via electrodeposition was found to be an effective method to encapsulate molecules in solution into nanogaps of growing Au films that increase metal-molecule contact and improve substrate's sensitivity and selectivity. In complex solutions, the approach facilitated ternary identification of UA, XA, and HX down to concentration limits of 4.33 𝜇M, 0.71 𝜇M, and 0.22 𝜇M, respectively, which are comparable to their existing levels in normal human physiology. These results demonstrate that the proposed platform is reliable for practical point-of-care analysis of biofluids where solution matrix effects greatly reduce selectivity and sensitivity for rapid on-site disease diagnosis.

• 한국전산유체공학회지
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• 제21권4호
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• pp.90-95
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• 2016

Leidenfrost drops with ellipsoidal shaping can control the bouncing height by adjusting the aspect ratio(AR) of the shape at the moment of impact. In this work, we focus on the effect of the AR and the impact Weber number(We) on the non-axisymmetrical spreading dynamics of the drop, which plays an important role in the control of bouncing. To understand the impact dynamics, the numerical simulation is conducted for the ellipsoidal drop impact upon the perfect non-wetting solid surface by using volume of fluid method, which shows the characteristics of the spreading behavior in each principal axis. As the AR increases, the drop has a high degree of the alignment into one principal axis, which leads to the consequent suppression of bouncing height with shape oscillation. As the We increases, the maximum spreading diameters in the principal axes both increase whereas the contact time on the solid surface rarely depends on the impact velocity at the same AR. The comprehensive understanding of the ellipsoidal drop impact upon non-wetting surface will provide the way to control of drop deposition in applications, such as surface cleaning and spray cooling.

• 대한기계학회논문집A
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• 제34권11호
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• pp.1721-1725
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• 2010

본 논문에서는 뒷면 노광법과 감광제의 열분해법을 이용하여 다양한 형상을 가지는 탄소 마이크로니들의 제조방법과 제조된 마이크로니들을 사용하여 소수성 표면제어에 대한 연구를 수행하였다. SU-8 이 도포된 표면마스크 뒷면으로부터 자외선을 조사하여 다양한 지름, 간격, 그리고 높이를 가지는 폴리머 마이크로니들을 제조하였다. 이니들은 이후 열처리공정을 통해서 수축, 열변형 등의 형상변화를 거치면서 10 이상의 높은 종횡비와 나노사이즈의 뾰족한 팁을 가지는 탄소 재질의 마이크로니들로 변하게 된다. 탄소 마이크로니들을 가지는 석영기판은 친수성표면을 가지고 있기 때문에 표면에너지가 낮은 물질을 처리하여 소수성 정도를 제어하였다. HMDS 처리는 SU-8 니들보다는 탄소 니들의 경우에 표면의 소수성 조절에 효과가 있음을 접촉각의 측정과 XPS 측정결과로부터 확인할 수 있었다. 본 논문에서 제시하는 탄소 마이크로니들의 제조기술과 표면처리기술은 세포분석 및 바이오분야 그리고 자기세정분야 등에서 유용하게 사용될 수 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.148-149
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• 2007

We present the design and fabrication prcoess of a two-axis tilting micromirror device driven by the electrostatic vertical comb actuator. A high aspect-ratio comb actuator is fabricated by multiple DRIE process in order to achieve large scan angle. The proposed fabrication process enables a mirror to be fabricated on the wafer-scale. By bonding a double-side polished (DSP) wafer and a silicon-on-insulator (SOI) wafer together, all actuators on the wafer are completely hidden under the reflectors. Nickel lines are embedded on a Pyrex wafer for the electrical access to numerous electrodes of mirrors. An anodic bonding step is implemented to contact electrical lines with ail electrodes on the wafer at a time. The mechanical angle of a fabricated mirror has been measured to be 1.9 degree and 1.6 degree, respectively, in the two orthogonal axes under driving voltages of 100 V. Also, a $8{\times}8$ array of micromirrors with high fill-factor of 70 % is fabricated by the same fabrication process.